机床滚转角测量中敏感元件倾斜引起的误差分析

钟丽红 1; 王昭 1; 汤善治 1; 高建民 2; 郭俊杰 3

doi:10.7652/xjtuxb201305018

您当前的位置：

首页 >

文章列表页 >

机床滚转角测量中敏感元件倾斜引起的误差分析

更新时间：2025-07-09

- 机床滚转角测量中敏感元件倾斜引起的误差分析
- Measurement Error Analysis for Machine Tool Roll Error Measurement Due to Inclined Half Wave Plate
- 西安交通大学学报 2013年47卷第5期页码：99-103
- 作者机构：
  
  西安交通大学机械工程学院,西安,710049
- 作者简介：
- 基金信息：
  
  : 2012-09-17。作者简介: 钟丽红(1987—),女,硕士生;王昭(通信作者),女,教授,博士生导师。基金项目: 国家科技重大专项资助项目(2012ZX04003071)
- DOI：10.7652/xjtuxb201305018
  中图分类号： TH741.2
- 网络首发：2013-05-10，
  
  纸质出版：2013
- 稿件说明：
移动端阅览
钟丽红 1, 王昭 1, 汤善治 1, 等. 机床滚转角测量中敏感元件倾斜引起的误差分析[J]. 西安交通大学学报, 2013,47(5):99-103.

Measurement Error Analysis for Machine Tool Roll Error Measurement Due to Inclined Half Wave Plate[J]. 2013, 47(5): 99-103.
钟丽红 1, 王昭 1, 汤善治 1, 等. 机床滚转角测量中敏感元件倾斜引起的误差分析[J]. 西安交通大学学报, 2013,47(5):99-103. DOI： 10.7652/xjtuxb201305018.

Measurement Error Analysis for Machine Tool Roll Error Measurement Due to Inclined Half Wave Plate[J]. 2013, 47(5): 99-103. DOI： 10.7652/xjtuxb201305018.

摘要

为研究正交偏振光相位法测量机床滚转角过程中

机床的俯仰、偏摆运动误差对测量精度的影响

建立了测量光路数学模型

利用琼斯矩阵法计算光路中光的偏振态变换过程

并推导出被测滚转角与相位变化量间的测量公式。在此基础上

采用光的偏振和晶体光学理论

分析了测量过程中机床俯仰、偏摆运动误差造成的敏感元件(即1/2波片)倾斜所引起的测量误差。分析结果表明

1/2波片在倾斜角度小于2°的情况下所引起的测量误差小于0.1%

对测量精度影响较小

从而论证了正交偏振光相位法高精度测量机床滚转角的可行性。

Abstract

To evaluate the influence of motion error of machine tool

such as pitch and yaw

on the roll error measurement

a mathematical model was established

then the conversion process of the lasers through the measurement system was calculated by Jones matrix method and measurement formula between the phase and the roll error was ultimately derived. The measurement error caused by angular motion error of the sensitive component

ie the half wave plate

was analyzed theoretically following polarization and crystal optics theory. Results show that the measurement error gets less than 0.1% which illustrates the feasibility of the method for roll error measurement by orthogonally polarized lasers.

关键词

Keywords

references

汤善治, 王昭, 蒋志雄, 等. 皮米级分辨率测量及细分技术进程 [J]. 光子学报, 2010, 39(S1): 14-18.

TANG Shanzhi, WANG Zhao, JIANG Zhixiong, et al. Progress in measurement with picometer resolution and subdivision technique [J]. Acta Photonica Sinica, 2010, 39(S1): 14-18.

TANG Shanzhi, WANG Zhao, JIANG Zhixiong, et al. A new measuring method for circular motion accuracy of NC machine tools based on dual-frequency laser interferometer [C]∥2011 IEEE International Sympos-ium on Assembly and Manufacturing. Piscataway, NJ, USA: IEEE, 2011: 25-27.

TANG Shanzhi, WANG Zhao, ZHONG Lihong, et al. Error analysis of a plane mirror interferometer based on geometric optical paths [J]. Optics Express, 2012, 20(5): 5108-5118.

张之江, 于瀛洁. 三维小角度测量系统建模 [J]. 计量学报, 2003, 24(1): 21-25.

ZHANG Zhijiang, YU Yingjie. Modeling of three-dimensional small angle measurement system [J]. Acta Metrologica Sinica, 2003, 24(1): 21-25.

马军山, 王向朝, 方祖捷. 滚转角误差的光学精密测量技术研究 [J]. 光学学报, 2000, 20(10): 1403-1406.

MA Junshan, WANG Xiangzhao, FANG Zujie. Optical precision measurement technique of rolling error [J]. Acta Optica Sinica, 2000, 20(10): 1403-1406.

翟玉生, 冯其波, 张斌. 一种基于光栅的滚转角测量新方法 [J]. 光学学报, 2008, 28(S2): 112-116.

ZHAI Yusheng, FENG Qibo, ZHANG Bin. A novel method for roll measurement based on grating [J]. Acta Optica Sinica, 2008, 28(S2): 112-116.

陈蕾, 张恩耀, 郭宏. 一种新的滚转角检测方法 [J]. 光电子激光, 2003, 14(6): 625-628.

CHEN Lei, ZHANG Enyao, GUO Hong. A novel method of rolling angle measurement [J]. Journal of Optoelectronics Laser, 2003, 14(6): 625-628.

LI Shiguang, YANG Changxi, ZHANG Enyao, et al. Compact optical roll-angle sensor with large measurement range and high sensitivity [J]. Optics Letters, 2005, 30(3): 242-244.

JIANG Hong, YIN Chunyong. Sensitivity enhanced roll angle measurement [J]. Optical Engineering, 2000, 39(2): 516-519.

LIU Zhongyao, LIN Dejiao, JIANG Hong, et al. Roll angle interferometer by means of wave plates [J]. Sensors and Actuators: A Physical, 2003, 104(2): 127-131.

WU C M, CHUANG Y T. Roll angular displacement measurement system with microradian accuracy [J]. Sensors and Actuators: A Physical, 2004, 116(11): 145-149.

TAN Yidong, ZHANG Shulian. Orthogonally linear-ly polarized dual frequency Nd: YAG lasers with tunable frequency difference and its application in precision angle measurement [J]. Chinese Physics Letters, 2007, 24(9): 2590-2593.

张剑, 李国华. 波片延迟误差校正的理论与技术 [J]. 激光技术, 2006, 30(3): 274-276.

ZHANG Jian, LI Guohua. The theory of correcting the retardation deviation of a wave-plate [J]. Laser Technology, 2006, 30(3): 274-276.

陈西园, 单明. 斜入射条件下的琼斯矩阵 [J]. 辽宁石油化工大学学报, 2004, 24(4): 93-96.

CHEN Xiyuan, SHAN Ming. Jones matrix with slanting incident wave [J]. Journal of Liaoning University of Petroleum Chemical Technology, 2004, 24(4): 93-96.

张维光,赵宏.线结构光多传感器三维测量系统误差校正方法.2011,45(6):75-80.

罗涛,牟轩沁.一种胸部X射线摄影图像中结节检测的多尺度匹配滤波器.2011,45(4):30-35.

郝元宏,韩静,齐春.一种新的浮选泡沫图像识别方法.2011,45(4):104-108.

陈蓉,孙剑,徐宗本.彩色图像分割中基于图上半监督学习算法研究.2011,45(2):11-14.

刘侍刚,彭亚丽,韩崇昭.一种准线性光束平差方法.2010,44(12):1-4.

王金栋,郭俊杰,邓玉芬,等.应用激光跟踪仪的数控机床几何精度检测.2011,45(03):85-90.

伍宏亮,毛军红.单级悬浮工作台平面运动测量系统对准误差分析.2010,44(01):51-55.

姜歌东,陶涛,梅雪松,等.一种基于Radon变换的精密工作台微位移和转动测量方法.2009,43(05):31-35.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

静压导轨误差均化效应影响因素研究

一种采用2级反向传播神经网络的输电线路故障测距方法

动态参数影响下液体静压主轴运动精度分析及优化

水蒸气掺混对氨裂解气旋流燃烧与排放特性的影响研究

三塔合一间接空冷系统结构参数对夏季运行特性的影响研究