高<italic style="font-style: italic">g</italic>值微机电系统加速度传感器可靠性的相场分析方法

侯宪阁; 黄艳辉; 周铭; 赵杰; 夏勇; 张庆

doi:10.7652/xjtuxb202608018

您当前的位置：

首页 >

文章列表页 >

高g值微机电系统加速度传感器可靠性的相场分析方法

更新时间：2026-07-28

- 高g值微机电系统加速度传感器可靠性的相场分析方法
- Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers
- 西安交通大学学报 2026年60卷第8期页码：205-217
- 作者机构：
  
  西安交通大学仪器科学与技术学院，710049，西安
  安徽北方微电子研究院有限公司，215163，江苏苏州
- 作者简介：
  
  作者简介：侯宪阁（2001-），男，博士生；
  张庆（通信作者），男，教授，博士生导师。
- 基金信息：
  
  国家科技重大专项资助项目(2025ZD1401600);安徽省微机电系统（MEMS）技术产业创新研究院创新课题
- DOI：10.7652/xjtuxb202608018
  中图分类号： TH825
- 收稿：2025-12-03，
  
  网络首发：2026-03-30，
  
  纸质出版：2026-08-10
- 稿件说明：
移动端阅览
侯宪阁, 黄艳辉, 周铭, 等. 高g值微机电系统加速度传感器可靠性的相场分析方法[J]. 西安交通大学学报, 2026,60(8):205-217. DOI: 10.7652/xjtuxb202608018.

HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J]. Journal of Xi'an Jiaotong University, 2026, 60(8): 205-217. DOI: 10.7652/xjtuxb202608018.
侯宪阁, 黄艳辉, 周铭, 等. 高g值微机电系统加速度传感器可靠性的相场分析方法[J]. 西安交通大学学报, 2026,60(8):205-217. DOI: 10.7652/xjtuxb202608018. DOI：

HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J]. Journal of Xi'an Jiaotong University, 2026, 60(8): 205-217. DOI: 10.7652/xjtuxb202608018. DOI：

摘要

针对高

值（

为重力加速度）微机电系统（MEMS）加速度传感器在极端冲击环境下的结构失效问题，提出了一种利用相场断裂模型的可靠性分析方法。该方法以相场断裂理论为基础，构建了包含失效形式识别、裂纹演化仿真、结构改进与再验证的可靠性分析流程。通过静力学与瞬态分析，并结合相场断裂模型，对裂纹萌生与扩展的微尺度过程进行了定量化与可视化表征，并与三维高

值冲击试验结果进行了对比验证。在此基础上，针对扭转梁根部的高应力集中区域提出了圆角改进设计，并通过静力、瞬态再分析以及相场断裂的对比验证，完成改进方案的抗断裂性能评估。研究结果表明：扭转梁根部存在显著的应力集中现象，是裂纹萌生与扩展的主导区域，由此揭示了应力集中与裂纹演化之间的关联。所提出的梁根圆角改进设计使应力集中降低了约18%，裂纹扩展延迟了约40%，从而提高了传感器在高

值冲击工况下的抗断裂可靠性。该研究为高

值MEMS加速度传感器的可靠性分析供了一种解决方案。

Abstract

To address structural failures in high-

micro-electro-mechanical system (MEMS) accelerometers under extreme shock environments

a reliability analysis method using the phasefield fracture model was proposed. Based on phase-field fracture theory

a reliability analysis workflow encompassing failure mode identification

crack evolution simulation

structural improvement

and re-validation was established. The micro-scale processes of crack initiation and propagation were quantitatively and visually characterized through static and transient analyses combined with a phase-field fracture model. The numerical results were comparatively validated against three-dimensional high-

shock test result

s. On this basis

a fillet improvement design was proposed for the high stress concentration region at the torsion-beam root

and the fracture resistance of the improved scheme was evaluated via static and transient re-analysis together with phase-field fracture-based comparative validation. The results indicate that pronounced stress concentration at the torsion-beam root is the dominant region governing crack initiation and propagation

thereby revealing the relationship between stress concentration and crack evolution. The proposed beam-root fillet improvement design reduces stress concentration by approximately 18% and delays crack propagation by about 40%

thus improving the fracture resistance reliability of the sensor under high-

impact conditions. This study provides a feasible solution for the reliability analysis of high-

MEMS accelerometers.

关键词

Keywords

references

刘思远.压阻式高 g 值加速度传感器设计与制备[D ] .太原：中北大学，2024.

关存贺，许高斌，王焕章，等.复杂应力条件下MEMS加速度传感器可靠性分析[J].电子测量与仪器学报，2023，37（7）：17-25.

Guan Cunhe, Xu Gaobin, Wang Huanzhang, et al. Reliability analysis of MEMS acceleration sensors under complex stress conditions[J]. Journal of Electronic Measurement and Instrumentation, 2023, 37 (7)：17-25.

李世维，王群书，古仁红，等.高 g 值微机械加速度传感器的现状与发展[J ] .仪器仪表学报，2008， 29（4）：892-896.

Li Shiwei, Wang Qunshu, Gu Renhong, et al. Situation and trend of high- g micromachined accelerometer[J ] . Chinese Journal of Scientific Instrument, 2008, 29 (4)：892-896.

Xu Yingyu, Liu Shuibin, He Chunhua, et al. Reliability of MEMS inertial devices in mechanical and thermal environments:a review [J].Heliyon,2024,10（5）：e27481.

GB/T 33929—2017 MEMS高 g 值加速度传感器性能试验方法[S ] .

Delrio F W, Cook R F, Boyce B L.Fracture strength of micro-and nano-scale silicon components [J].Applied Physics Reviews,2015,2（2）:021303.

尹丽晶，张魁，崔波.MEMS器件可靠性评价标准分析及建议[J].环境技术，2024，42（8）：23-27.

Yin Lijing, Zhang Kui, Cui Bo. Analysis and suggestion on reliability evaluation standards of MEMS devices[J]. Environmental Technology, 2024, 42 (8): 23-27.

张豪，于继东，裴晓阳，等.相场断裂方法发展概况[J].高压物理学报，2019,33（3）:030109. Zhang Hao, Yu Jidong, Pei Xiaoyang, et al. An overview of phase field approach to fracture[J].Chinese Journal of High Pressure Physics,2019,33（3）:030109.

Kristensen P K, Niordson C F, Martínez-Pañeda E. An assessment of phase field fracture:crack initiation and growth[J].Philosophical Transactions of the Royal Society: A Mathematical, Physical and Engineering Sciences,2021,379（2203）:20210021.

Nagaraja S, Carrara P, DE L L.Experimental characterization and phase-field modeling of anisotropic brittle fracture in silicon [J].Engineering Fracture Mechanics,2023,293:109684.

Li Peidong, Li Weidong, Tan Yu, et al. A phase field fracture model for ultra-thin micro-/nano-films with surface effects [J].International Journal of Engineering Science,2024,195:104004.

Bourdin B, Francfort G A, Marigo J J.Numerical experiments in revisited brittle fracture[J].Journal of the Mechanics and Physics of Solids,2000,48（4）:797-826.

Carollo V, Guillén-Hernández T, Reinoso J, et al. Recent advancements on the phase field approach to brittle fracture for heterogeneous materials and structures[J].Advanced Modeling and Simulation in Engineering Sciences,2018,5（1）:8.

吴建营.固体结构损伤破坏统一相场理论、算法和应用[J].力学学报，2021，53（2）：301-329.

Wu Jianying. On the unified phase-field theory for damage and failure in solids and structures: theoretical and numerical aspects[J]. Chinese Journal of Theoretical and Applied Mechanics, 2021, 53 (2): 301-329.

Wu Jianying, Nguyen V P.A length scale insensitive phase-field damage model for brittle fracture [J]. Journal of the Mechanics and Physics of Solids,2018, 119:20-42.

Wu Jianying, Nguyen V P, Nguyen C T, et al. Phasefield modeling of fracture [M]//Bordas S P A, Balint D S.Advances in Applied Mechanics. Amsterdam, Netherland: Elsevier,2020:1-183.

汤涛，乔中华.相场方程的高效数值算法[J].中国科学（数学），2020，50（6）：775-794.

Tang Tao, Qiao Zhonghua. Efficient numerical methods for phase-field equations[J]. Scientia Sinica (Mathematica), 2020, 50 (6): 775-794.

张文兵，沈振中，徐力群，等.基于COMSOL的脆性材料相场断裂模型[J].计算力学学报，2023，40（2）：273-280.

Zhang Wenbing, Shen Zhenzhong, Xu Liqun, et al. A phase-field fracture model for brittle materials based on COMSOL[J]. Chinese Journal of Computational Mechanics, 2023, 40 (2): 273-280.

Anderson T L.Fracture mechanics:fundamentals and applications [M].3rd ed. Boca Raton, USA:CRC Press,2005.

田富成，冀家乐，陈树昱，等.软材料大变形断裂的相场建模与应用[J].高分子学报，2025，56（2）：179-199.

Tian Fucheng, Ji Jiale, Chen Shuyu, et al. Large deformation fracture in soft materials: phase-field modeling and applications[J]. Acta Polymerica Sinica, 2025, 56 (2): 179-199.

Feng Ye, Li Jie. Phase-field cohesive fracture theory:a unified framework for dissipative systems based on variational inequality of virtual works [J].Journal of the Mechanics and Physics of Solids,2022,159:104737.

裘沙沙，刘星泽，宁文杰，等.断裂相场模型的三维自适应有限元方法[J].应用数学和力学，2024，45（4）：391-399.

Qiu Shasha, Liu Xingze, Ning Wenjie, et al. A threedimensional adaptive finite element method for phasefield models of fracture[J]. Applied Mathematics and Mechanics, 2024, 45 (4): 391-399.

Klinsmann M, Rosato D, Kamlah M, et al. An assessment of the phase field formulation for crack growth [J].Computer Methods in Applied Mechanics and Engineering,2015,294:313-330.

刘陈飘，刘凯，王芳丽，等.基于相场法的铝锂合金搅拌摩擦焊接头脆性断裂数值模拟[J].焊接学报，2025，46（10）：33-43.

Liu Chenpiao, Liu Kai, Wang Fangli, et al. Numerical simulation of brittle fracture of Al-Li alloy joint by friction stir welding based on phase field method[J]. Transactions of the China Welding Institution, 2025, 46 (10): 33-43.

Sarmadi N, Mousavi Nezhad M, Fisher Q J.On the numerical and mesh-dependent parameters in a computationally enhanced phase-field fracture model coupled with a novel mesh refinement strategy [J].Engineering With Computers,2023,39（6）:3973-3992.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

高g值微机电系统加速度传感器可靠性的

基于离散时间贝叶斯网络的动态故障树分析方法

超临界流体换热可视化实验研究进展

回转误差双目视觉同步测量方法

采用多场景多目标鲁棒优化的矩阵式单元制造系统生产-物流联动调度

高g值微机电系统加速度传感器可靠性的相场分析方法

Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers

DOI：10.7652/xjtuxb202608018

摘要

Abstract

关键词

Keywords

references