电子级超纯氮深冷空分流程节能优化研究

曾海涛; 徐锋; 余志鹏; 蒲亮; 刘运生

doi:10.7652/xjtuxb202607010

您当前的位置：

首页 >

文章列表页 >

电子级超纯氮深冷空分流程节能优化研究

专题高纯气体制备 | 更新时间：2026-07-09

- 电子级超纯氮深冷空分流程节能优化研究
- Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen
- 西安交通大学学报 2026年60卷第7期页码：97-108
- 作者机构：
  
  西安交通大学能源与动力工程学院，710049，西安
  宏芯气体（上海）有限公司，201210，上海
  西安交通大学深低温技术与装备教育部重点实验室，710049，西安
  江西卓超科技有限公司，338000，江西新余
- 作者简介：
  
  作者简介：曾海涛（2002—），男，硕士生；
  蒲亮（通信作者），男，教授，博士生导师。
- 基金信息：
  
  江西省创新领军人才长期资助项目(S2021CQKJ0384)
- DOI：10.7652/xjtuxb202607010
  中图分类号： TQ116
- 收稿：2025-11-18，
  
  纸质出版：2026-07-10
- 稿件说明：
移动端阅览
曾海涛, 徐锋, 余志鹏, 等. 电子级超纯氮深冷空分流程节能优化研究[J]. 西安交通大学学报, 2026,60(7):97-108.

ZENG Haitao, XU Feng, YU Zhipeng, et al. Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen[J]. Journal of Xi'an Jiaotong University, 2026, 60(7): 97-108.
曾海涛, 徐锋, 余志鹏, 等. 电子级超纯氮深冷空分流程节能优化研究[J]. 西安交通大学学报, 2026,60(7):97-108. DOI： 10.7652/xjtuxb202607010.

ZENG Haitao, XU Feng, YU Zhipeng, et al. Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen[J]. Journal of Xi'an Jiaotong University, 2026, 60(7): 97-108. DOI： 10.7652/xjtuxb202607010.

摘要

为满足电子行业对超纯氮品质要求的提升，改善深冷空分生产电子级超纯氮的能耗，利用Aspen Plus仿真软件构建了深冷空分制氮流程模型，并进行了多目标优化分析。首先，在相似氮产品要求前提下，比较了2种制氮流程的模拟结果；然后，以性能表现较优的低压塔抽气双塔流程为基础，通过Box-Behnken响应曲面法分析了比功耗对高压塔分离压力、低压塔分离压力、高压塔理论塔板数、低压塔理论塔板数的敏感性，分析了设计变量间相互作用对比功耗的影响，建立了包括比功耗在内的4个响应量与设计变量之间的预测模型，得出了最优参数组合并对优化前、后系统主要部件进行了

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488308&type=

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488308&type=small

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488308&type=middle

分析。结果表明：预测模型具有优良的准确性；在最优参数组合下，预测值与模拟值的误差为0.02%；流程中大部分

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488309&type=

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488309&type=small

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488309&type=middle

损源于空气压缩单元、精馏单元及主换热器；优化后，氮气产量提升了7.30%，比功耗降低了3.74%，单位产量氮气

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488332&type=

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488332&type=small

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488332&type=middle

损降低了6.33%，系统

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488318&type=

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488318&type=small

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488318&type=middle

效率从45.13%提升至47.05%。

Abstract

To meet the increasing demand for electronic-grade ultra-pure nitrogen and to minimize energy consumption during production of such nitrogen via cryogenic air separation，cryogenic air separation process models were developed using Aspen Plus，and a multi-obj ective optimization analysis was conducted.Firstly，the simulation results of two nitrogen production processes were compared under equivalent nitrogen product specifications.Secondly，based on the superior performance of the dual-column process with gas extraction from the low-pressure column（LPC），the sensitivity of specific power consumption to four design variables—separation pressure of the high-pressure column（HPC），separation pressure of the LPC，and the number of theoretical stages in both columns—was investigated using the Box-Behnken response surface methodology. The interactions between these design variables and their effects on specific power consumption were analyzed，and predictive models relating the design variables to four response variables were established.An optimal parameter combination was subsequently identified，followed by a comparative exergy analysis between the optimized and initial conditions.The results indicate that the predictive models exhibit high accuracy，with a relative error of only 0.02% between the predicted and simulated values under optimal parameter combination. Most of the exergy destruction comes from the air compression unit，distillation unit，and main heat exchanger. After optimization，nitrogen production increased by 7.30%，specific power consumption decreased by 3.74%，and exergy destruction per unit of nitrogen production was reduced by 6.33%.Consequently，the system exergy efficiency was enhanced from 45.13% to 47.05%.

关键词

Keywords

references

Li Gen, Chen Hao, Guo Huan, et al.A novel coupled system of compressed air energy storage system and air separation unit:thermodynamic and economic evaluation [J].Energy, 2025, 335:138303.

李玄武.深冷法现场制氮装置设计及工业实施[D].广州:华南理工大学, 2017.

Huo Changjiang, Sun Jinju, Song Peng.Energy, exergy and economic analyses of an optimal use of cryogenic liquid turbine expander in air separation units [J].Chemical Engineering Research and Design, 2023, 189: 194-209.

Maroukis G, Georgiadis M C.Modeling, simulation, and techno-economic optimization of argon separation processes [J]. Chemical Engineering Research and Design, 2022, 184:165-179.

郑捷宇, 厉彦忠, 司标, 等.基于 https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488385&type= https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488385&type=small https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=112488385&type=middle 分析的空分流程对比研究[J ] .工程热物理学报, 2015, 36 (10):2097-2101.

Zheng Jieyu, Li Yanzhong, Si Biao, et al.Comparative study of air separation process based on exergy analysis [J].Journal of Engineering Thermophysics, 2015, 36(10):2097-2101.

Zonouz M J, Mehrpooya M.Parametric study of a hybrid one column air separation unit (ASU)and CO 2 power cycle based on advanced exergy cost analysis results [J ] .Energy, 2017, 140(Part 1):261-275.

He Xiufen, Liu Yunong, Rehman A, et al.A novel air separation unit with energy storage and generation and its energy efficiency and economy analysis [J]. Applied Energy, 2021, 281:115976.

Tong Lige, Zhang Aijing, Li Yongliang, et al.Exergy and energy analysis of a load regulation method of CVO of air separation unit [J].Applied Thermal Engineering, 2015, 80:413-423.

Chen Guofu.Calculate the power of cryogenic air separation units [J]. Chemical Engineering Progress, 2020, 116(6):26-33.

周霞.空分压缩余热回收系统设计运行理论与实验研究[D].杭州:浙江大学, 2022.

Mora C A, Orjuela A.Modeling, validation and exergy evaluation of a thermally-integrated industrial cryogenic air separation plant in Colombia [J].Chemical Engineering Research and Design, 2022, 185:73-86.

Ziębik A, Gładysz P.Systems approach to energy and exergy analyses [J].Energy, 2018, 165 (Part A):396-407.

Kingston D, Wilhelmsen Ø, Kjelstrup S.Minimum entropy production in a distillation column for air separation described by a continuous non-equilibrium model [J].Chemical Engineering Science, 2020, 218:115539.

Wang Zhiyu, Wang Wenhai, Qin Weizhong, et al. Analysis of carbon footprint reduction for three novel air separation columns [J].Separation and Purification Technology, 2021, 262:118318.

Wang Zhiyu, Qin Weizhong, Yang Chunhua, et al. Heat-transfer distribution optimization for the heatintegrated air separation column [J].Separation and Purification Technology, 2020, 248:117048.

文兆伦, 李沛睿, 张忠林, 等.基于自热再生的隔壁塔深冷空分工艺设计及优化[J].化工学报, 2023, 74(7):2988-2998.

Wen Zhaolun, Li Peirui, Zhang Zhonglin, et al.Design and optimization of cryogenic air separation process with dividing wall column based on self-heat regeneration [J]. CIESC Journal, 2023, 74(7):2988-2998.

王小云, 丁传敏, 牛艳霞.深冷空分工艺的模拟与优化[J].应用化工, 2023, 52(11):3003-3007.

Wang Xiaoyun, Ding Chuanmin, Niu Yanxia.Simulation and optimization of cryogenic air separation process [J]. Applied Chemical Industry, 2023, 52(11):3003-3007.

Mora C A, Orjuela A.Modeling, validation and exergy evaluation of a thermally-integrated industrial cryogenic air separation plant in Colombia: part Ⅱ optimization under variable products demand [J].Chemical Engineering Research and Design, 2023, 191:537-551.

Kong Fulin, Shen Minghai, Tong Lige, et al.A novel multi-objective optimization framework based on the absolute priority method for co-production air separation systems [J].Chemical Engineering Science, 2025, 317:122099.

荣杨一鸣, 吴巧仙, 周霞, 等.空分系统空气压缩余热自利用性能优化研究[J].化工学报, 2021, 72(3):1654-1666.

Rong Yangyiming, Wu Qiaoxian, Zhou Xia, et al.Research on optimization of self-utilization performance of air compression waste heat in air separation system [J]. CIESC Journal, 2021, 72(3):1654-1666.

Yuan Yuxing, Na Hongming, Du Tao, et al.Multiobjective optimization and analysis of material and energy flows in a typical steel plant [J].Energy, 2023, 263(Part D):125874.

Saini A, Ghosh S, Kar S, et al.Modeling and optimization for nitrogen liquefaction with subcooling and air separation unit from air [J].International Journal of Engineering and Advanced Technology, 2019, 8 (4):1770-1782.

李燕鹏.低温空气分离装置的流程选型方法研究[D].杭州:浙江大学, 2019.

杨泽萌, 韩晓萌, 卢新发.基于稳态模拟技术的空分增氮工艺流程设计与实施[J].冶金动力, 2022(1):39-42.

Yang Zemeng, Han Xiaomeng, Lu Xinfa.Design and implementation of air separation nitrogen increasing process based on steady-state simulation technology [J]. Metallurgical Power, 2022(1):39-42.

常亮, 刘兴高.内部热耦合空分塔的节能优化分析[J].化工学报, 2012, 63(9):2936-2940.

Chang Liang, Liu Xinggao.Energy optimization analysis of internal thermally coupled air separation columns [J]. CIESC Journal, 2012, 63(9):2936-2940.

Yang Yan, Tong Lige, Liu Yuxin, et al.A novel integrated system of hydrogen liquefaction process and liquid air energy storage (LAES):energy, exergy, and economic analysis [J].Energy Conversion and Management, 2023, 280:116799.

Fu Chao, Gundersen T.Using exergy analysis to reduce power consumption in air separation units for oxy-combustion processes [J].Energy, 2012, 44(1):60-68.

Fu Chao, Gundersen T.Recuperative vapor recompression heat pumps in cryogenic air separation processes [J].Energy, 2013, 59:708-718.

张涛, 马国光, 冷南江, 等.某油田深冷空分制氮工艺优化研究[J].石油与天然气化工, 2022, 51 (6):61-69.

Zhang Tao, Ma Guoguang, Leng Nanjiang, et al.Optimization of nitrogen production process by cryogenic air separation in an oil field [J].Chemical Engineering of Oil & Gas, 2022, 51(6):61-69.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

储换热单元优化的液态存储压缩CO2储能系统性能提升

褐煤抽气预干燥超临界二氧化碳循环发电系统性能分析

草酸-硫酸体系协同浸出硫铁矿渣中铁的机理及工艺优化

基于储换热单元优化的液态存储压缩CO2储能系统性能提升

储能的低温空气分离系统热力学与经济性分析