济南大学机械工程学院,250022,济南
山东省传感技术与高精度称重仪器重点实验室,250004,济南
作者简介:刘源(2000—),男,硕士生;
李映君(通信作者),男,教授,硕士生导师。
收稿:2025-09-25,
纸质出版:2026-05-10
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刘源, 李映君, 王桂从, 等. 聚偏氟乙烯柔性压电式传感器的研制与应用研究[J]. 西安交通大学学报, 2026,60(5):164-173. DOI: 10.7652/xjtuxb202605016.
LIU Yuan, LI Yingjun, WANG Guicong, et al. Study on the Development and Application of Polyvinylidene Fluoride Flexible Piezoelectric Sensor[J]. Journal of Xi'an Jiaotong University, 2026, 60(5): 164-173. DOI: 10.7652/xjtuxb202605016.
针对柔性传感器灵敏度低、制备工艺复杂、难以精准检测动态生理信号的问题,采用纳米纤维素(CNF)与氧化锌(ZnO)协同改性策略,通过超声波辅助分散-磁力搅拌耦合工艺优化纳米填料分布,结合溶剂蒸发法制备了厚度为0.1mm的聚偏氟乙烯(PVDF)基复合压电薄膜,并开发聚酰亚胺(PI)胶带柔性封装工艺,构建可穿戴传感器件。实验表明,该传感器在0~700 Pa压力范围内呈线性响应,拟合优度
R
2
达到0.983。电压灵敏度达1.1676 V/kPa,相较于PVDF柔性传感器提高了30.6%。响应、恢复时间分别为13、204 ms,且成功实现了人体手腕与手肘运动、颈动脉搏动及鼻息振动等多频生理信号的高保真捕获。研究证实CNF/ZnO协同增强机制可显著提升PVDF压电性能,为可穿戴生理信号监测提供了新材料解决方案。
To address the issues of low sensitivity
complex fabrication processes
and difficulties in accurately detecting dynamic physiological signals in flexible sensors
a synergistic modification strategy using cellulose nanofibers (CNF) and zinc oxide (ZnO) is adopted. By employing an ultrasonic-assisted dispersion combined with magnetic stirring process
the distribution of nanofillers was optimized. A polyvinylidene fluoride (PVDF) -based composite piezoelectric film with a thickness of 0.1 mm was fabricated via the solvent evaporation method
and a polyimide (PI) tape-based flexible encapsulation process was developed to construct a wearable sensor device. Experiments show that the sensor exhibits a linear response within the pressure range of 0—700 Pa
with a goodness-of-fit
R
2
of 0.983. The voltage sensitivity reaches 1.1676 V/kPa
representing a 30.6% improvement compared to PVDF flexible sensors. The response/recovery time is 13
204 ms
and the sensor successfully achieves high-fidelity capture of multi-frequency physiological signals such as human wrist and elbow movements
carotid artery pulsations
and nasal airflow vibrations. The study confirms that the synergistic enhancement mechanism of CNF/ZnO significantly improves the piezoelectric performance of PVDF
providing a new material solution for wearable physiological signal monitoring.
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