Au修饰SnO<sub>2</sub>薄膜兼容型高响应乙炔气体传感器研制

胡宗鑫; 田兵; 谭则杰; 徐振恒; 王海容

doi:10.7652/xjtuxb202409013

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Au修饰SnO₂薄膜兼容型高响应乙炔气体传感器研制

—————————————————————— | 更新时间：2025-07-28

- Au修饰SnO₂薄膜兼容型高响应乙炔气体传感器研制
- Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film
- 西安交通大学学报 2024年58卷第9期页码：129-138
- 作者机构：
  
  1. 西安交通大学精密微纳制造技术全国重点实验室,西安,710049
  2. 西安交通大学机械工程学院,西安,710049
  3. 南方电网数字电网研究院有限公司,广州,510700
- 作者简介：
  
  : 2024-01-24。作者简介: 胡宗鑫(1998—),男,硕士生
  谭则杰(通信作者),男,工程师。基金项目: 国家重点研发计划资助项目(2022YFB3206800)
- 基金信息：
  
  : 2024-01-24。作者简介: 胡宗鑫(1998—),男,硕士生;谭则杰(通信作者),男,工程师。基金项目: 国家重点研发计划资助项目(2022YFB3206800);南方电网数字电网研究院股份有限公司科技项目(210000KC23010005)。
- DOI：10.7652/xjtuxb202409013
  中图分类号： TM835;TP212
- 网络首发：2024-09-10，
  
  纸质出版：2024
- 稿件说明：
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胡宗鑫, 田兵, 谭则杰, 等. Au修饰SnO₂薄膜兼容型高响应乙炔气体传感器研制[J]. 西安交通大学学报, 2024,58(9):129-138. DOI: 10.7652/xjtuxb202409013.

HU Zongxin, TIAN Bing, TAN Zejie, et al. Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film[J]. 2024, 58(9): 129-138. DOI: 10.7652/xjtuxb202409013.
胡宗鑫, 田兵, 谭则杰, 等. Au修饰SnO₂薄膜兼容型高响应乙炔气体传感器研制[J]. 西安交通大学学报, 2024,58(9):129-138. DOI: 10.7652/xjtuxb202409013. DOI：

HU Zongxin, TIAN Bing, TAN Zejie, et al. Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film[J]. 2024, 58(9): 129-138. DOI: 10.7652/xjtuxb202409013. DOI：

摘要

为了实现变压器油中溶解的乙炔气体检测

研发了一款基于Au修饰SnO

气敏薄膜的乙炔气体传感器。通过射频溅射制备SnO

薄膜

进而通过直流溅射制备Au并改变溅射时间

得到不同Au修饰量的气敏薄膜

采用微机电系统(MEMS)工艺开发了基于气敏薄膜的乙炔气体传感芯片。对比纯SnO

以及不同Au修饰量的SnO

气敏薄膜的气敏性能

结果显示

基于20 s-Au修饰的SnO

薄膜MEMS乙炔传感器性能最佳

最佳工作温度为200 ℃

体积分数为1×10

-6

的乙炔气体的响应值高达14

响应恢复时间分别为5 s和87 s

且具有良好的重复性

检测限低至0.1×10

-6

(体积分数)。对比测试体积分数为1×10

-6

下变压器油中溶解的氢气、甲烷等其他气体

所研发的MEMS乙炔气体传感器仍具有优越的选择性

在长期测试下保持良好稳定性

可为解决变压器油中溶解乙炔气体的检测难题提供一种元件选择。

Abstract

To detect acetylene gas dissolved in transformer oil

an acetylene gas sensor based on Au decorated SnO

gas sensing thin film is developed. SnO

thin films were prepared using radio frequency magnetron sputtering followed by the deposition of Au using direct current magnetron sputtering. The different amounts of Au decoration were realized by adjusting the deposition time.Then the acetylene gas sensing chips

based on gas sensing thin films

are fabrica

ted using the process of micro electro mechanical systems(MEMS). The sensing properties of the pure SnO

and Au decorated SnO

films are compared. The results indicates that the sensor using the 20 s-Au decorated SnO

film shows superior performance

operating optimally at 200 °C. It exhibits a response value of 14 to acetylene gas at a volume fraction of 1×10

-6

with response and recovery times of 5 s and 87 s

respectively. The sensor exhibits excellent repeatability

with a detection limit of 0.1×10

-6

in volume fraction. In comparison testing against hydrogen

methane

and other gases dissolved in the transformer oil at a concentration of 1×10

-6

volume fraction

the sensor has a good selective response to acetylene and maintains excellent performance stability over long-term testing. It can serve as a component selection for addressing the challenge of detecting dissolved acetylene gas in transformer oil.

关键词

Keywords

references

ELELE U, NEKAHI A, ARSHAD A, et al. Towards online ageing detection in transformer oil: a review [J]. Sensors, 2022, 22(20): 7923.

连玮. 变压器油中溶解气体的分析及故障判断 [J]. 山东电力高等专科学校学报, 2023, 26(2): 54-57.

LIAN Wei. Analysis and fault diagnosis of dissolved gas in transformer oil [J]. Journal of Shandong Electric Power College, 2023, 26(2): 54-57.

王志鑫, 毛庆波, 刘导, 等. 某电厂220 kV变压器乙炔异常的分析及处理 [J]. 电工技术, 2023(7): 217-219.

WANG Zhixin, MAO Qingbo, LIU Dao, et al. Analysis and treatment of abnormal C2H2 in 220 kV power transformer of a power plant [J]. Electrical Engineering, 2023(7): 217-219.

张赛, 陈培阳, 吴丹. 基于变压器油中乙炔气体的MEMS传感器研究 [J]. 电力设备管理, 2023(20): 250-252.

ZHANG Sai, CHEN Peiyang, WU Dan. Research on MEMS sensors based on acetylene gas in transformer oil [J]. Electric Power Equipment Management, 2023(20): 250-252.

李海威. 变压器油处理产生乙炔原因分析 [J]. 高电压技术, 2003, 29(7): 52-53.

LI Haiwei. Analysis of C2H2 in the purifying process of transformer [J]. High Voltage Engineering, 2003, 29(7): 52-53.

单玉涛. 变压器油中含有乙炔的常见故障分析 [J]. 西北电力技术, 2002, 30(6): 30-33.

SHAN Yutao. Common fault analysis of acetylene in transformer oil [J]. Northwest China Electric Power, 2002, 30(6): 30-33.

景桂荣. 从变压器油气相色谱的特征气体到故障判断 [J]. 内蒙古科技与经济, 2019(21): 107-108.

JING Guirong. From the characteristic gases of transformer oil gas chromatography to fault diagnosis [J]. Inner Mongolia Science Technology Economy, 2019(21): 107-108.

钟素梅. 一起110 kV变压器油中溶解气体含量异常分析 [J]. 黑龙江电力, 2023, 45(1): 78-81.

ZHONG Sumei. Analysis of abnormal dissolved gas content in 110 kV transformer oil [J]. Heilongjiang Electric Power, 2023, 45(1): 78-81.

蒋芝, 陈红生, 薛长志, 等. 变压器油热老化过程中性能变化及红外光谱分析 [J]. 电工材料, 2023(2): 36-40.

JIANG Zhi, CHEN Hongsheng, XUE Changzhi, et al. Performance change and infrared spectrum analysis of transformer oil during thermal aging [J]. Electrical Engineering Materials, 2023(2): 36-40.

周英武, 高丽君, 周红燕. 乙炔工艺系统安全控制研究与应用 [J]. 中国氯碱, 2020(5): 34-35.

ZHOU Yingwu, GAO Lijun, ZHOU Hongyan. Research and application of safety control in acetylene process system [J]. China Chlor-Alkali, 2020(5): 34-35.

LEE J H, PARK M S, JUNG H, et al. Selective C2H2 detection with high sensitivity using SnO2 nanorod based gas sensors integrated with a gas chromatography [J]. Sensors and Actuators:B Chemical, 2020, 307: 127598.

王思怡, 于灵敏, 董天阳, 等. 原位合成Cr掺杂的SnO2纳米墙及其乙炔气敏性能研究 [J]. 西安工业大学学报, 2023, 43(6): 553-560.

WANG Siyi, YU Lingmin, DONG Tianyang, et al. In situ growth of Cr doped SnO2 nanowalls and their gas sensing performance to acetylene [J]. Journal of Xi'an Technological University, 2023, 43(6): 553-560.

李艳琼, 曾文, 谢国亚. 一维纳米SnO2传感器对变压器油中气体的检测 [J]. 电子元件与材料, 2013, 32(3): 50-53.

LI Yanqiong, ZENG Wen, XIE Guoya. Gas sensing characteristics of one dimension nanosized SnO2 sensor in transformer oil detection [J]. Electronic Components and Materials, 2013, 32(3): 50-53.

ZHOU Qu, TANG Chen, ZHU Siping, et al. Synthesis, characterisation and sensing properties of Sm2O3 doped SnO2 nanorods to C2H2 gas extracted from power transformer oil [J]. Materials Technology, 2016, 31(6): 364-370.

TIAN Xin, HU Zongxin, JIA Chen, et al. A review of advanced gas sensor based on sputtering SnO2 thin film-challenges and opportunities [J]. Journal of Environmental Chemical Engineering, 2023, 11(6): 111516.

IVANOVSKAYA M, OVODOK E, GAEVSKAYA T, et al. Effect of Au nanoparticles on the gas sensitivity of nanosized SnO2 [J]. Materials Chemistry and Physics, 2021, 258: 123858.

MIURA S, KITAOKA T. In situ synthesis of gold nanoparticles on zinc oxides preloaded into a cellulosic paper matrix for catalytic applications [J]. BioResources, 2011, 6(4): 4990-5000.

ZHAO Rongjun, ZHANG Xu, PENG Sijia, et al. Shaddock peels as bio-templates synthesis of Cd-doped SnO2 nanofibers: a high performance formaldehyde sensing material [J]. Journal of Alloys and Compounds, 2020, 813: 152170.

QIN Shuaiwei, TANG Pinggui, FENG Yongjun, et al. Novel ultrathin mesoporous ZnO-SnO2 n-n heterojunction nanosheets with high sensitivity to ethanol [J]. Sensors and Actuators: B Chemical, 2020, 309: 127801.

KHUDADAD A I, YOUSIF A A, ABED H R. Effect of heat treatment on WO3 nanostructures based NO2 gas sensor low-cost device [J]. Materials Chemistry and Physics, 2021, 269: 124731.

BÂRSAN N, WEIMAR U. Understanding the funda-mental principles of metal oxide based gas sensors: the example of CO sensing with SnO2 sensors in the presence of humidity [J]. Journal of Physics: Condensed Matter, 2003, 15(20): R813-R839.

GAO Xin, ZHOU Qu, LU Zhaorui, et al. Synthesis of Cr2O3 nanoparticle-coated SnO2 nanofibers and C2H2 sensing properties [J]. Frontiers in Materials, 2019, 6: 163.

KAMBLE C, NARWADE S, MANE R. Detection of acetylene(C2H2)gas using Ag-modified ZnO/GO nanorods prepared by a hydrothermal synthesis [J]. Materials Science in Semiconductor Processing, 2023, 153: 107145.

BARSAN N, WEIMAR U. Conduction model of metal oxide gas sensors [J]. Journal of Electroceramics, 2001, 7(3): 143-167.

XU Hongyan, KARBALAEI AKBARI M, WEI Zihan, et al. Plasma-induced sub-10 nm Au-SnO2-In2O3 heterostructures fabricated by atomic layer deposition for highly sensitive ethanol detection on ppm level [J]. Applied Surface Science, 2021, 563: 150400.

CAO Huitong, HU Zongxin, WEI Xueyong, et al. Conductometric ethanol gas sensor based on a bilayer film consisting of SnO2 film and SnO2/ZnSnO3 porous film prepared by magnetron sputtering [J]. Sensors and Actuators: B Chemical, 2023, 382: 133562.

ZHANG Nan, FAN Yizhuo, LU Yang, et al. Synthesis of au-decorated SnO2 crystallites with exposed(221)facets and their enhanced acetylene sensing properties [J]. Sensors and Actuators: B Chemical, 2020, 307: 127629.

陈雪松, 卢秋虹, 王海花, 等. Au修饰SnO2复合纳米材料的制备和气敏性能 [J]. 材料研究学报, 2012, 26(4): 349-354.

CHEN Xuesong, LU Qiuhong, WANG Haihua, et al. Synthesis and GAS sensing properties of Au-modified SnO2 composite nanomaterials [J]. Chinese Journal of Materials Research, 2012, 26(4): 349-354.

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Au修饰SnO2薄膜兼容型高响应乙炔气体传感器研制

Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO2 Thin Film

DOI：10.7652/xjtuxb202409013

摘要

Abstract

关键词

Keywords

references

Au修饰SnO₂薄膜兼容型高响应乙炔气体传感器研制

Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film