高频动态压电式压力传感器结构设计与实验研究

王桂从; 孟令源; 李映君; 刘源; 蔡思康

doi:10.7652/xjtuxb202406019

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高频动态压电式压力传感器结构设计与实验研究

—————————————————————— | 更新时间：2025-07-28

- 高频动态压电式压力传感器结构设计与实验研究
- Structural Design and Experimental Study of High Frequency Dynamic Piezoelectric Pressure Sensor
- 西安交通大学学报 2024年58卷第6期页码：203-214
- 作者机构：
  
  济南大学机械工程学院,济南,250022
- 作者简介：
  
  : 2023-10-28。作者简介: 王桂从(1981—),女,副教授
  李映君(通信作者),男,教授,硕士生导师。基金项目: 国家自然科学基金资助项目(51875250)
- 基金信息：
  
  : 2023-10-28。作者简介: 王桂从(1981—),女,副教授;李映君(通信作者),男,教授,硕士生导师。基金项目: 国家自然科学基金资助项目(51875250);山东省自然科学基金资助项目(ZR2023ME109);济南市“新高校20条”资助项目(202228116)
- DOI：10.7652/xjtuxb202406019
  中图分类号： TH82
- 网络首发：2024-06-10，
  
  纸质出版：2024
- 稿件说明：
移动端阅览
王桂从, 孟令源, 李映君, 等. 高频动态压电式压力传感器结构设计与实验研究[J]. 西安交通大学学报, 2024,58(6):203-214.

WANG Guicong, MENG Lingyuan, LI Yingjun, et al. Structural Design and Experimental Study of High Frequency Dynamic Piezoelectric Pressure Sensor[J]. 2024, 58(6): 203-214.
王桂从, 孟令源, 李映君, 等. 高频动态压电式压力传感器结构设计与实验研究[J]. 西安交通大学学报, 2024,58(6):203-214. DOI： 10.7652/xjtuxb202406019.

WANG Guicong, MENG Lingyuan, LI Yingjun, et al. Structural Design and Experimental Study of High Frequency Dynamic Piezoelectric Pressure Sensor[J]. 2024, 58(6): 203-214. DOI： 10.7652/xjtuxb202406019.

摘要

针对激波压力信号快速测量需求的提升

提出了一种基于压电效应的高频动态激波压力传感器结构形式及测量原理。通过分析激波信号的时频特性

确定高频动态压电式压力传感器的性能需求; 采用高频动态压电式压力传感器的测量原理

对提出的激波压力测量进行了分析; 基于变形协调一致原则

建立了静力学和动力学模型

分析传感器结构参数对灵敏度和固有频率的影响规律; 将优化后的传感器三维模型导入ANSYS中进行静力学、动力学和压电耦合分析

验证了传感器结构及其测量原理的可行性。通过准静态标定和动态标定实验

得到传感器的电压灵敏度、非线性度和固有频率等测量性能指标

实验结果表明:研制的高频动态压电式激波压力传感器样机具有高灵敏度3.19 mV/kPa、高固有频率特性95.625 Hz和短上升时间10.45 μs特性

能够满足实际测试需求。

Abstract

The structure and measurement principles of a high-frequency dynamic piezoelectric shock wave pressure sensor based on piezoelectric effect are proposed in response to the increasing demand for fast measurement of shock wave pressure signals. The performance requirements of the high-frequency dynamic piezoelectric pressure sensor are determined by analyzing the time-frequency characteristics of shock wave signal. The measurement principle of the high-frequency dynamic piezoelectric pressure sensor is used to analyze the proposed shock wave pressure measurement. Based on the principle of deformation coordination and consistency

static and dynamic models are established to analyze the influence of sensor structural parameters on sensitivity and natural frequency. The optimized three-dimensional model of the sensor is imported into ANSYS for static

dynamic

and piezoelectric coupling analyses

and the feasibility of the sensor structure and its measurement principle is verified. Through quasi-static and dynamic calibration experiments

the measurement performance indicators of the sensor

such as voltage sensitivity

nonlinearity

and natural frequency

are obtained. The experimental results show that the developed prototype of the high-frequency dynamic piezoelectric shock wave pressure sensor has high sensitivity: 3.19 mV/kPa

high natural frequency characteristic: 95.625 Hz

and short rise time: 10.45 μs

which can meet the requirements in actual tests.

关键词

Keywords

references

徐锋, 刘应华. 升压速率对正拱普通型爆破片爆破压力的影响规律及机理研究 [J]. 机械工程学报, 2023, 59(2): 69-79.

XU Feng, LIU Yinghua. Study on effect and mechanism of pressure rise rate on the bursting pressure of conventional domed bursting disc [J]. Journal of Mechanical Engineering, 2023, 59(2): 69-79.

姜昌兴, 宋超鑫, 雷小华, 等. 基于一体化探针的航空发动机内流多方向压力测量技术研究 [J]. 仪器仪表学报, 2021, 42(10): 9-19.

JIANG Changxing, SONG Chaoxin, LEI Xiaohua, et al. Study on the multi-direction pressure measurement technology of aero engine internal flow based on an integrated probe [J]. Chinese Journal of Scientific Instrument, 2021, 42(10): 9-19.

顾加雨, 夏勋荣, 张超, 等. 基于传感器技术的冲击波治疗仪穿透深度检测系统的设计 [J]. 中国医疗设备, 2022, 37(3): 5-8.

GU Jiayu, XIA Xunrong, ZHANG Chao, et al. Design of penetration depth detection system of shock wave therapy instrument based on sensor technology [J]. China Medical Devices, 2022, 37(3): 5-8.

郭庆, 王毛凯, 王文廉. 基于压电薄膜的一体式冲击波测试系统 [J]. 中北大学学报(自然科学版), 2023, 44(2): 162-167, 175.

GUO Qing, WANG Maokai, WANG Wenlian. Integrated shockwave measurement system based on piezoelectric film [J]. Journal of North University of China(Natural Science Edition), 2023, 44(2): 162-167, 175.

陈学文, 赖富文, 牛博怀, 等. 应用于炮口冲击波的生物表面压力测试系统 [J]. 兵器装备工程学报, 2022, 43(5): 261-265.

CHEN Xuewen, LAI Fuwen, NIU Bohuai, et al. Pressure measurement system of biological surface applied to muzzle shock wave [J]. Journal of Ordnance Equipment Engineering, 2022, 43(5): 261-265.

王洪悦, 董全, 颜杰, 等. 喷气策略对多点喷射天然气发动机燃烧及排放的影响 [J]. 西安交通大学学报, 2022, 56(2): 57-65.

WANG Hongyue, DONG Quan, YAN Jie, et al. Influence of injection strategy on combustion and emissions of multi-point injection natural gas engine [J]. Journal of Xi'an Jiaotong University, 2022, 56(2): 57-65.

高永卫, 魏斌斌, 梁栋. 翼型风洞试验技术研究现状 [J]. 空气动力学学报, 2021, 39(6): 85-100.

GAO Yongwei, WEI Binbin, LIANG Dong. Research status of airfoil wind tunnel experimental technology [J]. Acta Aerodynamica Sinica, 2021, 39(6): 85-100.

刘东来, 王伟魁, 李文博, 等. 冲击波超压传感器研究现状 [J]. 遥测遥控, 2019, 40(5): 7-15.

LIU Donglai, WANG Weikui, LI Wenbo, et al. Research status of shock wave overpressure sensor [J]. Journal of Telemetry, Tracking and Command, 2019, 40(5): 7-15.

ABIRI A, PARSAYAN A. The bullet shockwave-based real-time sniper sound source localization [J]. IEEE Sensors Journal, 2020, 20(13): 7253-7264.

周行健, 雷程, 梁庭, 等. 高频响MEMS压力传感器动态性能研究 [J]. 舰船电子工程, 2023, 43(4): 167-171.

ZHOU Xingjian, LEI Cheng, LIANG Ting, et al. Dynamic performance research of high frequency response MEMS pressure sensor [J]. Ship Electronic Engineering, 2023, 43(4): 167-171.

YAO Zhenjian, LI Yongsheng, DING Yifan, et al. Improved shock tube method for dynamic calibration of the sensitivity characteristic of piezoresistive pressure sensors [J]. Measurement, 2022, 196: 111271.

赵立波, 赵玉龙, 李建波, 等. 倒杯式耐高温高频响压阻式压力传感器 [J]. 西安交通大学学报, 2010, 44(7): 50-54.

ZHAO Libo, ZHAO Yulong, LI Jianbo, et al. Inverted-cup high-temperature and high-frequency piezoresistive pressure sensor [J]. Journal of Xi'an Jiaotong University, 2010, 44(7): 50-54.

杨秋菊, 王彤. 扩散硅压阻式压力传感器非线性误差纠正方法 [J]. 哈尔滨工程大学学报, 2023, 44(3): 466-472.

YANG Qiuju, WANG Tong. Nonlinear error correction method of diffused silicon piezoresistive pressure sensors [J]. Journal of Harbin Engineering University, 2023, 44(3): 466-472.

王俊杰, 刘劲, 傅正义, 等. 超微型全石英光纤Fizeau腔水下激波压力传感器 [J]. 光学学报, 2019, 39(2): 214-222.

WANG Junjie, LIU Jin, FU Zhengyi, et al. Miniature underwater shock wave pressure sensor based on all-silica optical fiber Fizeau cavity [J]. Acta Optica Sinica, 2019, 39(2): 214-222.

LI Yingjun, YANG Zhikang, WANG Guicong, et al. Research on piezoelectric pressure sensor for shock wave load measurement [J]. ISA Transactions, 2020, 104: 382-392.

冯斌, 马时亮. 激波压力传感器信号处理电路设计 [J]. 计量与测试技术, 2011, 38(11): 1-2.

FENG Bin, MA Shiliang. Design of signal processing circuit for shock pressure sensor [J]. Metrology Measurement Technique, 2011, 38(11): 1-2.

WANG Zhaoguang, GIGLMAIER M, HOPFES T, et al. Impact of sensor housing geometries on transient stagnation pressure measurements in impulse facilities [J]. Experimental Thermal and Fluid Science, 2019, 109: 109851.

KIM N I, CHANG Yuli, CHEN Jie, et al. Piezoelectric pressure sensor based on flexible gallium nitride thin film for harsh-environment and high-temperature applications [J]. Sensors and Actuators: A Physical, 2020, 305: 111940.

KRAUSE T, MEIER M, BRUNZENDORF J. Influence of thermal shock of piezoelectric pressure sensors on the measurement of explosion pressures [J]. Journal of Loss Prevention in the Process Industries, 2021, 71: 104523.

WANG Guicong, LI Yingjun, CUI Huanyong, et al. Acceleration self-compensation mechanism and experimental research on shock wave piezoelectric pressure sensor [J]. Mechanical Systems and Signal Processing, 2021, 150: 107303.

KENDA M, KLOBCˇAR D, BRACˇUN D. Condition based maintenance of the two-beam laser welding in high volume manufacturing of piezoelectric pressure sensor [J]. Journal of Manufacturing Systems, 2021, 59: 117-126.

姚贞建, 王中宇, 王辰辰, 等. 压力传感器动态特性参数不确定度评定 [J]. 北京航空航天大学学报, 2018, 44(8): 1672-1681.

YAO Zhenjian, WANG Zhongyu, WANG Chenchen, et al. Uncertainty evaluation for dynamic characteristic parameters of pressure sensors [J]. Journal of Beijing University of Aeronautics and Astronautics, 2018, 44(8): 1672-1681.

顾廷炜, 孔德仁. 基于GA-BP神经网络的落锤液压动标装置准静态校准模型 [J]. 南京理工大学学报, 2017, 41(5): 581-586.

GU Tingwei, KONG Deren. Quasi-static calibration model of drop hammer hydraulic dynamic pressure calibration device based on GA-BP neural network [J]. Journal of Nanjing University of Science and Technology, 2017, 41(5): 581-586.

GU Tingwei, SHANG Fei, KONG Deren, et al. Absolute quasi-static calibration method of piezoelectric high-pressure sensor based on force sensor [J]. Review of Scientific Instruments, 2019, 90(5): 055111.

DIAO Kuan, YAO Zhenjian, WANG Zhongyu, et al. Investigation of vibration effect on dynamic calibration of pressure sensors based on shock tube system [J]. Measurement, 2020, 149: 107015.

MÄKINEN T, PERTILÄ P. Shooter localization and bullet trajectory, caliber, and speed estimation based on detected firing sounds [J]. Applied Acoustics, 2010, 71(10): 902-913.

任孟虎. 基于激波与光测的弹丸飞行参数复合探测研究 [D]. 西安: 西安工业大学, 2021.

李雪伍, 高瑞, 黄艳斐, 等. 铌酸钾钠无铅压电陶瓷掺杂及制备技术现状 [J]. 中国表面工程, 2023, 36(2): 1-20.

LI Xuewu, GAO Rui, HUANG Yanfei, et al. Research status of lead-free piezoelectric ceramic doping and preparation technology of potassium sodium niobate [J]. China Surface Engineering, 2023, 36(2): 1-20.

李永生, 姚贞建, 丁义凡. 激波管反射阶跃压力上升时间高精度估计 [J]. 仪器仪表学报, 2022, 43(9): 10-18.

LI Yongsheng, YAO Zhenjian, DING Yifan. High-accuracy estimation of the rise time of shock tube reflection step pressure [J]. Chinese Journal of Scientific Instrument, 2022, 43(9): 10-18.

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