组合式自解耦压电薄膜三维力传感器研制

赵鹏; 王桂从; 李映君; 杨志康

doi:10.7652/xjtuxb202303013

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组合式自解耦压电薄膜三维力传感器研制

—————————————————————— | 更新时间：2025-07-09

- 组合式自解耦压电薄膜三维力传感器研制
- Development of Combined Self-Decoupling Piezoelectric Thin Film Three-Dimensional Force Sensor
- 西安交通大学学报 2023年57卷第3期页码：139-149
- 作者机构：
  
  济南大学机械工程学院,济南,250024
- 作者简介：
  
  : 2022-06-22。作者简介: 赵鹏(1996—),男,硕士生
  李映君(通信作者),男,教授,博士生导师。基金项目: 国家自然科学基金资助项目(51705200,51875250)
- 基金信息：
  
  : 2022-06-22。作者简介: 赵鹏(1996—),男,硕士生;李映君(通信作者),男,教授,博士生导师。基金项目: 国家自然科学基金资助项目(51705200,51875250);山东省高等学校青创科技支持计划资助项目(2019KJB018)。
- DOI：10.7652/xjtuxb202303013
  中图分类号： TN06;TH823
- 网络首发：2023-03-10，
  
  纸质出版：2023
- 稿件说明：
移动端阅览
赵鹏, 王桂从, 李映君, 等. 组合式自解耦压电薄膜三维力传感器研制[J]. 西安交通大学学报, 2023,57(3):139-149.

ZHAO Peng, WANG Guicong, LI Yingjun, et al. Development of Combined Self-Decoupling Piezoelectric Thin Film Three-Dimensional Force Sensor[J]. 2023, 57(3): 139-149.
赵鹏, 王桂从, 李映君, 等. 组合式自解耦压电薄膜三维力传感器研制[J]. 西安交通大学学报, 2023,57(3):139-149. DOI： 10.7652/xjtuxb202303013.

ZHAO Peng, WANG Guicong, LI Yingjun, et al. Development of Combined Self-Decoupling Piezoelectric Thin Film Three-Dimensional Force Sensor[J]. 2023, 57(3): 139-149. DOI： 10.7652/xjtuxb202303013.

摘要

针对传统三维力传感器存在的非线性误差、维间耦合误差过大等瓶颈问题

面向重载、高频、强冲击三维力的测量需求

基于聚偏氟乙烯(PVDF)压电薄膜

结合并联分载原理

创新性的利用冲击力产生的倾覆力矩

设计了立柱菱形布局的压电薄膜三维力传感器结构

立柱菱形布局时具有抵消维间耦合能力

每个立柱近似只受单个倾覆力矩的影响

故可进行组合测量。探究了PVDF压电薄膜的最优布置

采用理论分析、有限元仿真分析和实验验证相结合的方法

对传感器设计方案的可行性进行了验证。研制了组合式自解耦压电薄膜三维力传感器样机

分别对其进行准静态标定实验和动态标定实验

实验结果表明

改进后传感器具有高灵敏度、高固有频率等特点

3个方向非线性误差均小于0.2%

维间耦合误差在1.2%以内

其结构设计具备抵消维间耦合的能力。该三维力传感器在高精密轴承钢球冷镦成型及瞬态强冲击等场景下有着重要的应用价值及潜力。

Abstract

Given the bottleneck problems of a traditional three-dimensional force sensor

such as non-linear error and large error of inter-dimensional coupling

and the measurement demand of the three-dimensional force with heavy load

high frequency

and strong impact

a piezoelectric thin film three-dimensional force sensor with a diamond configuration of pillars is designed by innovatively using the overturning moment generated by impact force based on polyvinylidene fluoride(PVDF)piezoelectric thin film and combined with parallel load sharing principle. The diamond configuration of the pillars enables the sensor to compensate for inter-dimensional coupling. Each pillar is approximated to be affected by a single overturning moment and therefore combined measurements can be made. The optimal arrangement of PVDF piezoelectric thin films is investigated. The feasibility of the sensor design scheme is verified by combining theoretical analysis

finite element simulation analysis and experimental verification. A combined self-decoupling piezoelectric thin film three-dimensional force sensor prototype is developed. Quasi-static and dynamic calibration experiments are carried out respectively. The experimental results show that the improved sensor has the characteristics of high sensitivity and high natural frequency

the three-direction non-linear error is less than 0.2%

and the inter-dimensional coupling error is less than 1.2%. Its structure design can counteract the inter-dimensional coupling. The three-dimensional force sensor has important application value and potential in high-precision bearing ball cold upsetting and transient strong impact scenarios.

关键词

Keywords

references

王明凯, 闫柯, 马帅军, 等. 联合载荷作用下精密角接触球轴承动态特性演变规律 [J]. 航空动力学报, 2022, 37(6): 1134-1149.

WANG Mingkai, YAN Ke, MA Shuaijun, et al. Evolutionary regularity of dynamic characteristics for precision angular contact ball bearing under combined loads [J]. Journal of Aerospace Power, 2022, 37(6): 1134-1149.

杨万博, 霍元明, 何涛, 等. TC16钛合金航空紧固件冷镦成形实验研究 [J]. 塑性工程学报, 2020, 27(10): 7-12.

YANG Wanbo, HUO Yuanming, HE Tao, et al. Experimental study on cold heading forming of TC16 titanium alloy aerospace fastener [J]. Journal of Plasticity Engineering, 2020, 27(10): 7-12.

文生平, 周正军, 张啸言, 等. 基于计算机视觉的轴承滚子表面缺陷在线检测系统 [J]. 华南理工大学学报(自然科学版), 2020, 48(10): 76-87.

WEN Shengping, ZHOU Zhengjun, ZHANG Xiaoyan, et al. Online detection system of bearing roller's surface defects based on computational vision [J]. Journal of South China University of Technology(Natural Science Edition), 2020, 48(10): 76-87.

徐兴盛, 李映君, 王桂从, 等. 轮辐结构压电式六维力传感器设计 [J]. 光学精密工程, 2020, 28(12): 2655-2664.

XU Xingsheng, LI Yingjun, WANG Guicong, et al. Design of six-axis force piezoelectric sensor with spoke structure [J]. Optics and Precision Engineering, 2020, 28(12): 2655-2664.

倪娜, 薛晓敏, 张陵, 等. 高灵敏度离子皮肤手指关节角度传感器的设计 [J]. 西安交通大学学报, 2021, 55(3): 164-174.

NI Na, XUE Xiaomin, ZHANG Ling, et al. Highly sensitive ionic skin for measuring finger joint angles [J]. Journal of Xi'an Jiaotong University, 2021, 55(3): 164-174.

LI Yingjun, XU Xingsheng, WANG Guicong, et al. Fault-tolerant measurement mechanism research on pre-tightened four-point supported piezoelectric six-dimensional force/torque sensor [J]. Mechanical Systems and Signal Processing, 2020, 135: 106420.

周凤玺, 蒲育. 功能梯度压电材料梁的热-机-电耦合振动及屈曲特性分析 [J]. 机械工程学报, 2021, 57(8): 166-174.

ZHOU Fengxi, PU Yu. Vibration and buckling behaviors of functionally graded piezoelectric material beams subjected to thermal-mechanical-electrical loads [J]. Journal of Mechanical Engineering, 2021, 57(8): 166-174.

曹经錡, 康健炜, 袁卫锋. 柔性压电复合材料薄膜无线应变传感器研究 [J]. 电子测量与仪器学报, 2021, 35(6): 184-190.

CAO Jingqi, KANG Jianwei, YUAN Weifeng. Research on wireless strain sensor using flexible piezoelectric composite film [J]. Journal of Electronic Measurement and Instrumentation, 2021, 35(6): 184-190.

张艳芳, 刘玉荣, 许章铖. 基于PVDF三维力传感器设计 [J]. 仪器仪表学报, 2021, 42(7): 66-72.

ZHANG Yanfang, LIU Yurong, XU Zhangcheng. Design of three-dimensional force sensor based on PVDF [J]. Chinese Journal of Scientific Instrument, 2021, 42(7): 66-72.

LI Yingjun, WANG Guicong, CUI Huanyong, et al. Dynamic characteristics and optimization research on PVDF piezoelectric film force sensor for steel ball cold heading machine [J]. ISA Transactions, 2019, 94: 265-275.

TING Y, CHEN H Y, CHEN Junhao, et al. Design and performance evaluation of a multi-axis thin-film sensor for milling process measurement [J]. Sensors and Actuators: A Physical, 2021, 332(1): 113147.

PETROVIC' P B, PAVLOVIC' V B, VLAHOVIC' B, et al. A high-sensitive current-mode pressure/force detector based on piezoelectric polymer PVDF [J]. Sensors and Actuators: A Physical, 2018, 276: 165-175.

彭小武, 马国鹭, 赵涌, 等. 三维力传感器的设计和静态解耦算法研究 [J]. 传感技术学报, 2021, 34(11): 1518-1522.

PENG Xiaowu, MA Guolu, ZHAO Yong, et al. Design of three-dimensional force sensor and research on the static decoupling algorithm [J]. Chinese Journal of Sensors and Actuators, 2021, 34(11): 1518-1522.

杨述焱, 孙东杰, 李丹若, 等. 用于生物力学测量的新型电容式三维力传感器 [J]. 计量学报, 2021, 42(4): 495-502.

YANG Shuyan, SUN Dongjie, LI Danruo, et al. Three dimensional force sensor for biomechanical measurement based on capacitance principle [J]. Acta Metrologica Sinica, 2021, 42(4): 495-502.

REZVANI S, NIKOLOV N, KIM C J, et al. Development of a vise with built-in piezoelectric and strain gauge sensors for clamping and cutting force measurements [J]. Procedia Manufacturing, 2020, 48: 1041-1046.

张晨, 张元开, 王均. 基于串并混联柔顺机构的三维力传感器设计 [J]. 仪表技术与传感器, 2019(8): 4-7, 31.

ZHANG Chen, ZHANG Yuankai, WANG Jun. Design of three-dimensional force sensor based on string and hybrid compliant mechanism [J]. Instrument Technique and Sensor, 2019(8): 4-7, 31.

HE Xiu, RAN Zengling, XIAO Yaqin, et al. Three-dimensional force sensors based on all-fiber Fabry-Perot strain sensors [J]. Optics Communications, 2021, 490: 126694.

陈乐瑞, 曹建福, 胡河宇. 采用非线性频谱的重载工业机器人故障机理分析 [J]. 西安交通大学学报, 2021, 55(5): 92-101.

CHEN Lerui, CAO Jianfu, HU Heyu. Fault mechanism analysis for heavy-load industrial robot with nonlinear spectrum [J]. Journal of Xi'an Jiaotong University, 2021, 55(5): 92-101.

李晓田, 邹博文, 王安麟. 适应多工况的工程机械液压元件载荷集总参数动态响应模型 [J]. 西安交通大学学报, 2021, 55(5): 56-64.

LI Xiaotian, ZOU Bowen, WANG Anlin. Lumped parameters dynamic response model of loads for hydraulic components of construction machinery adapted to multiple working conditions [J]. Journal of Xi'an Jiaotong University, 2021, 55(5): 56-64.

常龙飞, 牛清正, 宋伟, 等. 压阻式柔性应变传感纤维的手指姿态识别装置 [J]. 西安交通大学学报, 2020, 54(8): 116-123.

CHANG Longfei, NIU Qingzheng, SONG Wei, et al. A finger gesture recognition device with piezoresistive flexible strain sensing fiber [J]. Journal of Xi'an Jiaotong University, 2020, 54(8): 116-123.

陈广州, 陈刚, 潘莉, 等. 基于PVDF/GO纳米复合薄膜的柔性压电传感器 [J]. 微纳电子技术, 2022, 59(3): 236-241.

CHEN Guangzhou, CHEN Gang, PAN Li, et al. Flexible piezoelectric sensors based on PVDF/GO nanocomposite films [J]. Micronanoelectronic Technology, 2022, 59(3): 236-241.

李响, 段宇, 宋小俊, 等. 组合型类蜂窝夹芯结构设计及面内力学性能研究 [J]. 西安交通大学学报, 2022, 56(7): 168-176.

LI Xiang, DUAN Yu, SONG Xiaojun, et al. Design of combined quasi-honeycomb core structure and research on its in-plane mechanical properties [J]. Journal of Xi'an Jiaotong University, 2022, 56(7): 168-176.

江文松, 尹肖, 李泓洋, 等. 基于参数辨识的力传感器动态校准方法 [J]. 计量学报, 2021, 42(5): 603-608.

JIANG Wensong, YIN Xiao, LI Hongyang, et al. Dynamic calibration method of a force transducer based on parameter identification [J]. Acta Metrologica Sinica, 2021, 42(5): 603-608.

LI Yingjun, YANG Cong, WANG Guicong, et al. Research on the parallel load sharing principle of a novel self-decoupled piezoelectric six-dimensional force sensor [J]. ISA Transactions, 2017, 70: 447-457.

KANG M K, LEE S, KIM J H. Shape optimization of a mechanically decoupled six-axis force/torque sensor [J]. Sensors and Actuators: A Physical, 2014, 209: 41-51.

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