滑移及黏度对超精密气浮工作台性能影响研究

陈东菊; 董丽华; 潘日; 范晋伟

doi:10.7652/xjtuxb201711010

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滑移及黏度对超精密气浮工作台性能影响研究

更新时间：2025-07-09

- 滑移及黏度对超精密气浮工作台性能影响研究
- Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage
- 西安交通大学学报 2017年51卷第11期页码：63-70+143
- 作者机构：
  
  北京工业大学先进制造技术北京市重点实验室,北京,100124
- 作者简介：
- 基金信息：
  
  : 2017-03-23。作者简介: 陈东菊(1980—),女,副教授。基金项目: 国家自然科学基金资助项目(51475010,51105005)
- DOI：10.7652/xjtuxb201711010
  中图分类号： TH16
- 网络首发：2017-11-10，
  
  纸质出版：2017
- 稿件说明：
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陈东菊, 董丽华, 潘日, 等. 滑移及黏度对超精密气浮工作台性能影响研究[J]. 西安交通大学学报, 2017,51(11):63-70+143.

Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage[J]. 2017, 51(11): 63-70+143.
陈东菊, 董丽华, 潘日, 等. 滑移及黏度对超精密气浮工作台性能影响研究[J]. 西安交通大学学报, 2017,51(11):63-70+143. DOI： 10.7652/xjtuxb201711010.

Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage[J]. 2017, 51(11): 63-70+143. DOI： 10.7652/xjtuxb201711010.

摘要

针对超精密气浮工作台内部微小间隙气体的性能展开研究

实现了微尺度下气体滑移及黏度对气浮工作台性能影响的分析。基于气体润滑理论和微尺度下气体滑移和黏度的研究

实现了气浮工作台内气膜流态模型的修正

利用有限差分法给出了雷诺方程的数值求解过程; 通过求解修正模型

分析不同供气压强和气膜间隙下

滑移和黏度对气浮工作台性能影响的机理。研究结果表明:气体滑移和黏度会引起气浮工作台承载力的降低和气膜刚度的增大

但不会改变供气压强和气膜间隙对工作台的影响趋势

只是影响程度发生改变

当同时考虑滑移和黏度时

承载力比忽略时降低最多(约为21.95%)

最大刚度比忽略时提升最大(约为15%)。滑移和黏度的存在使得气浮工作台的实际性能最优参数小于理想的最优性能参数

最优气膜间隙由原来的10 μm变为6 μm。最后

通过试验验证发现

同时考虑气体滑移和黏度时

气浮工作台的性能最接近实际工况

承载力的仿真曲线与试验曲线最吻合

刚度的试验值与仿真值的误差约为9.59%。

Abstract

Based on the study on the performance of gas in an ultra-precision air bearing stage

the effects of velocity slip and viscosity at micro scale on the performance of air-bearing stage are studied. The modified film flow model was established by the theory of gas lubrication and the research of slip and viscosity in micro scale. The numerical solution of the Reynolds equation is obtained by the finite difference method. The influences of slip and viscosity on performance of air-bearing stage at different gas supply pressures and gas film clearances are analyzed by solving Reynolds equations. The result shows that the loading capacity is smaller and the stiffness is larger when considering the slip and viscosity

while the influencing trend of gas supply pressure and gas film clearance on the air bearing stage is kept the same

only the degrees of change are affected. When the slip and viscosity are taken into account at the same time

the loading capacity is decreased by 21.95%

and the maximum stiffness is increased by 15%. The optimum performance parameters of the air bearing stage are less than the ideal optimum performance parameters when slip and viscosity are considered. The optimum gas film clearance is changed from the original 10 μm to 6 μm. Finally

the test results showed that when the slip and viscosity are considered at the same time

the stiffness of the air bearing stage is close to the actual working condition. The simulation curve of the loading capacity is in good agreement with the test curve

and the average error between the test and simulation values is about 9.59%.

关键词

Keywords

references

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