超快脉冲激光对钛合金的烧蚀特性与作用机理

郑卜祥 1; 姜歌东 1; 王文君 1; 2; 梅雪松 1; 2

doi:10.7652/xjtuxb201412004

您当前的位置：

首页 >

文章列表页 >

超快脉冲激光对钛合金的烧蚀特性与作用机理

更新时间：2025-07-09

- 超快脉冲激光对钛合金的烧蚀特性与作用机理
- Ablation Characteristics and Interaction Mechanism of Ultra-Fast Pulse Laser-Induced Damage in Titanium Alloy
- 西安交通大学学报 2014年48卷第12期页码：21-28
- 作者机构：
  
  1. 西安交通大学机械工程学院,西安,710049
  2. 西安交通大学机械制造系统工程国家重点实验室,西安,710054
- 作者简介：
- 基金信息：
  
  : 2014-04-28。作者简介: 郑卜祥(1980—),男,博士生,工程师;王文君(通信作者),女,副教授。基金项目: 国家自然科学基金重大研究计划资助项目(91123024);教育部长江学者和创新团队发展计划资助项目(IRT1172);中央高校基本科研业务费专项资金资助项目(xjj2012113)
- DOI：10.7652/xjtuxb201412004
  中图分类号： TN249;O434.14
- 网络首发：2014-12-10，
  
  纸质出版：2014
- 稿件说明：
移动端阅览
郑卜祥 1, 姜歌东 1, 王文君 1, 等. 超快脉冲激光对钛合金的烧蚀特性与作用机理[J]. 西安交通大学学报, 2014,48(12):21-28.

Ablation Characteristics and Interaction Mechanism of Ultra-Fast Pulse Laser-Induced Damage in Titanium Alloy[J]. 2014, 48(12): 21-28.
郑卜祥 1, 姜歌东 1, 王文君 1, 等. 超快脉冲激光对钛合金的烧蚀特性与作用机理[J]. 西安交通大学学报, 2014,48(12):21-28. DOI： 10.7652/xjtuxb201412004.

Ablation Characteristics and Interaction Mechanism of Ultra-Fast Pulse Laser-Induced Damage in Titanium Alloy[J]. 2014, 48(12): 21-28. DOI： 10.7652/xjtuxb201412004.

摘要

为探究超快脉冲激光对难加工材料的烧蚀特性与损伤机制

利用皮秒脉冲激光研究钛合金的烧蚀阈值、烧蚀形貌和作用机理。依据烧蚀面积和激光能量密度的线性关系

确定了钛合金的烧蚀阈值

通过显微镜观察分析了不同激光参数下钛合金的表面烧蚀形貌

采用雪崩电离与多光子电离详细解释了超快脉冲激光对钛合金的作用机理

并从烧蚀形貌和阈值角度划分了烧蚀区域。结果表明:钛合金的烧蚀阈值约为0.109 J/cm

; 在1 064 nm波长下的烧蚀质量要优于532 nm波长下的质量

而低重复频率能获得高质量的微结构

烧蚀中央区域材料去除更为均匀

且烧蚀弹坑形状规则

表面平滑; 随着脉冲数和能量的增加

光子能量累积增多

烧蚀尺度和形貌特征愈加明显

烧蚀边界愈加清晰

说明脉冲数和光子能量累积是表面微结构诱导的关键要素之一; 烧蚀区域可划分为改性区、过渡区、再沉积区和烧蚀区

在烧蚀区以多光子电离为主

在改性区、过渡区和再沉积区以雪崩电离为主。该结果可为超快脉冲激光微结构精密加工提供参考。

Abstract

To reveal ablation characteristics and damage mechanism of difficult-to-machine material processed by ultra-fast pulse laser

the ablation threshold

ablation morphology and interaction mechanism of titanium alloy are investigated by picosecond pulse laser. Focusing on the linear dependence of laser energy density on the ablation area

the threshold fluence of ultra-fast pulse laser-induced ablation in titanium alloy is determined. The ablation morphologies of titanium alloy surface under the different laser parameters are observationally analyzed. The interaction mechanism of titanium alloy processed by ultra-fast pulse laser is explained

in detail with the theories of avalanche ionization and multiphoton ionization

and the different ablation zones are distinguished according to the ablation morphology and threshold fluence. The results show that the ablation threshold of titanium alloy reaches 0.109 J/cm

; the ablation quality of titanium alloy processed by a picosecond pulse laser of 1 064 nm wavelength gets better than that by 532 nm wavelength

and low repetition rate favors high-quality microstructure; the ablative central area has more uniform material removal

and the ablation crater has regular shape and smooth surface. With increasing pulse number and laser energy

the accumulation of photon energy increases

ablation dimension and morphological characteristics become more obvious

and the ablation boundary becomes more distinct. It indicates that pulse number and accumulation of photon energy are respectively one of the key factors for inducing surface microstructure. The observed ablation zone can be divided into modified region

transition region

redeposition region and ablation region. Multiphoton ionization dominates in the ablation region

while avalanche ionization dominates in the modified

transition and redeposition regions.

关键词

Keywords

references

李梁, 孙健科, 孟祥军. 钛合金的应用现状及发展前景[J]. 钛工业进展, 2004, 21(5): 19-24.

LI Liang, SUN Jianke, MENG Xiangjun. Application state and prospects for titanium alloys[J]. Titanium Industry Progress, 2004, 21(5): 19-24.

李重河, 朱明, 王宁, 等. 钛合金在飞机上的应用[J]. 稀有金属, 2009, 33(1): 84-91.

LI Chonghe, ZHU Ming, WANG Ning, et al. Application of titanium alloy in airplane[J]. Chinese Journal of Rare Metals, 2009, 33(1): 84-91.

MAIO Y D, COLOMBIER J P, CAZOTTES P, et al. Ultrafast laser ablation characteristics of PZT ceramic: analysis methods and comparison with metals[J]. Optics and Lasers in Engineering, 2012, 50(11): 1582-1591.

STRATAKIS E. Nanomaterials by ultrafast laser processing of surfaces[J]. Science of Advanced Materials, 2012, 4(3/4): 407-431.

YANG Xiaojun, LI Ming, WANG Li, et al. A new method of processing high-precision micro-hole with the femtosecond laser[J]. Applied Mechanics and Materials, 2013, 268/269/270: 382-386.

赵清亮, 姜涛, 董志伟, 等. 飞秒激光加工SiC的烧蚀阈值及材料去除机理[J]. 机械工程学报, 2010, 46(21): 172-177.

ZHAO Qingliang, JIANG Tao, DONG Zhiwei, et al. Ablation threshold and material removal mechanisms of SiC processed by femtosecond laser[J]. Chinese Journal of Mechanical Engineering, 2010, 46(21): 172-177.

MANNION P T, MAGEE J, COYNE E, et al. The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air[J]. Applied Surface Science, 2004, 233(1/2/3/4): 275-287.

MANNION P, MAGEE J, COYNE E, et al. Ablation thresholds in ultrafast laser micro-machining of common metals in air[C]∥Opto-Ireland 2002: Optics and Photonics Technologies and Applications, Proceedings of SPIE. Bellingham, WA, USA: SPIE, 2003: 470-478.

SEMEROK A, DUTOUQUET C. Ultrashort double pulse laser ablation of metals[J]. Thin Solid Films, 2004, 453/454(4): 501-505.

SEMALTIANOS N G, PERRIE W, FRENCH P, et al. Femtosecond laser ablation characteristics of nickel-based superalloy C263[J]. Applied Physics: A Materials Science and Processing, 2009, 94(4): 999-1009.

ROBERTS D E, PLESSIS A D, BOTHA L R. Femtosecond laser ablation of silver foil with single and double pulses[J]. Applied Surface Science, 2010, 256(6): 1784-1792.

THOMAS D A, LIN Z, ZHIGILEI L V, et al. Atomistic modeling of femtosecond laser-induced melting and atomic mixing in Au film Cu substrate system[J]. Applied Surface Science, 2009, 255(24): 9605-9612.

SPIRO A, LOWE M, PASMANIK G. Drilling rate of five metals with picosecond laser pulses at 355, 532, and 1 064 nm[J]. Applied Physics: A Materials Science and Processing, 2012, 107(1): 801-808.

PAPAKONSTANTINOU P, VAINOS N A, FOTAKIS C. Microfabrication by UV femtosecond laser ablation of Pt, Cr and indium oxide thin films[J]. Applied Surface Science, 1999, 151(3/4): 159-170.

ZHU X, VILLENEUVE D M, NAUMOV A Y, et al. Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses[J]. Applied Surface Science, 1999, 152(3/4): 138-148.

SYMIETZ C, LEHMANN E, GILDENHAAR R, et al. Mechanical stability of Ti6Al4V implant material after femtosecond laser irradiation[J]. Journal of Applied Physics, 2012, 112(2): 023103.

NAYAK B K, GUPTA M C, KOLASINSKI K W. Formation of nano-textured conical microstructures in titanium metal surface by femtosecond laser irradiation[J]. Applied Physics: A Materials Science and Processing, 2008, 90(3): 399-402.

VOROBYEV A Y, GUO C. Femtosecond laser blackening of metals[C]∥52nd IEEE International Midwest Symposium on Circuits and Systems. Piscataway, NJ, USA: IEEE, 2009: 905-908.

VOROBYEV A Y, GUO C. Colorizing metals with femtosecond laser pulses[J]. Applied Physics Letters, 2008, 92(4): 041914.

PECHOLT B, VENDAN M, DONG Y, et al. Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication[J]. The International Journal of Advanced Manufacturing Technology, 2008, 39(3/4): 239-250.

李晓溪, 贾天卿, 冯东海, 等. 超短脉冲激光照射下氧化铝的烧蚀机理[J]. 物理学报, 2004, 53(7): 2154-2158.LI Xiaoxi, JIA Tianqing, FENG Donghai, et al. The mechanism of ablation of sapphire by an ultra-short pulse laser[J]. Acta Physica Sinica, 2004, 53(7): 2154-2158.

LENZNER M, KRUGER J, SARTANIA S, et al. Femtosecond optical breakdown in dielectrics[J]. Physical Review Letters, 1998, 80(18): 4076-4079.

ZHENG Buxiang, JIANG Gedong, WANG Wenjun, et al. Ablation experiment and threshold calculation of titanium alloy irradiated by ultra-fast pulse laser[J]. AIP Advances, 2014, 4(3): 031310.

LIU J M. Simple technique for measurements of pulsed Gaussian-beam spot sizes[J]. Optics Letters, 1982, 7(5): 196-198.

RUNG S, CHRISTIANSEN A, HELLMANN R. Influence of film thickness on laser ablation threshold of transparent conducting oxide thin-films[J]. Applied Surface Science, 2014, 305(6): 347-351.

刘金环. 高斯光束的光学变换[J]. 光学精密工程, 1994, 2(3): 15-21.

LIU Jinhuan. Optical transform of Gaussian beam[J]. Optics and Precision Engineering, 1994, 2(3): 15-21.

王贵兵, 刘仓理. 凯芙拉环氧复合材料烧蚀阈值实验研究[J]. 激光技术, 2003, 27(5): 457-459.

WANG Guibing, LIU Cangli. Experimental research of the ablation threshold of Kevlar/epoxy[J]. Laser Technology, 2003, 27(5): 457-459.

孙元征, 林晓辉, 陈云飞. 超短脉冲激光烧蚀熔融硅的理论模型[J]. 功能材料与器件学报, 2008, 14(1): 38-42.

SUN Yuanzheng, LIN Xiaohui, CHEN Yunfei. Theoretical model investigation about the mechanism of ultrashort pulse laser ablation fused silica[J]. Journal of Functional Materials and Devices, 2008, 14(1): 38-42.

余本海, 戴能利, 王英, 等. 飞秒激光烧蚀LiNbO3晶体的形貌特征与机理研究[J]. 物理学报, 2007, 56(10): 5821-5826.

YU Benhai, DAI Nengli, WANG Ying, et al. Morphology and mechanism of femtosecond laser-induced structural changes in lithium niobate crystal[J]. Acta Physica Sinica, 2007, 56(10): 5821-5826.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

钛合金网板多点成形起皱缺陷的数值模拟

Ti-6Al-4V合金的修正本构模型及其有限元仿真

人工关节材料表面仿生树状分叉网络的润滑研究

TC4钛合金与316L不锈钢感应钎焊接头的组织与性能

采用机器学习的大规模并行程序I/O性能建模与预测方法