中国科学技术大学精密机械与精密仪器系,合肥,230026
网络首发:2014-08-10,
纸质出版:2014
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邓知森 1, 马玉婷 2, 3, 等. 脉动离心隔膜压电泵的原理与试验[J]. 西安交通大学学报, 2014,48(8):98-103.
Theoretical and Experimental Research on Pulsed Centrifugal Diaphragm Piezoelectric Pump[J]. 2014, 48(8): 98-103.
邓知森 1, 马玉婷 2, 3, 等. 脉动离心隔膜压电泵的原理与试验[J]. 西安交通大学学报, 2014,48(8):98-103. DOI: 10.7652/xjtuxb201408017.
Theoretical and Experimental Research on Pulsed Centrifugal Diaphragm Piezoelectric Pump[J]. 2014, 48(8): 98-103. DOI: 10.7652/xjtuxb201408017.
针对有阀压电容积泵中压电元件的高频特性和单向阀的低频特性不兼容的问题
提出了脉动离心隔膜压电泵。它利用振动管内的液体在离心力的作用下产生定向流动的特性来驱动泵腔中的隔膜产生形变
从而改变泵腔体积
借助单向阀实现液体的定向输送。首先分析了其工作原理
其次建立了压电泵驱动部分的动力学模型
得出了振动频率、模态振型、离心力和振幅极限的计算表达式。最后制作了原理样机
测量了压电泵的阻抗特性、脉冲特性、流量和压力等性能
验证了理论分析的正确性。实验结果表明:该压电泵可以保持并精确输出液体脉冲
当驱动电压峰峰值为560 V、振动频率为183.74 Hz、吸液周期为0.4 s、排液周期为0.1 s
背压为0.3 kPa时
去离子水输出流量为6.12 mL/min。得到的实验数据证明了脉动离心隔膜压电泵的有效性。
A pulsed centrifugal diaphragm piezoelectric pump is introduced to effectively coordinate the high frequency characteristics of piezoelectric materials and low frequency characteristics of check valves in conventional piezoelectric pumps. The centrifugal force in the swing motion of a vibrating tube is utilized to drive liquid within the tube to flow
and the diaphragm in the pump chamber is deformed
so that the volume of the pump chamber is changed and liquid delivery is completed by check valves. The working principle of the pump is explained
and a dynamic model for the driving part of the pump is established to study its dynamic characters such as resonant frequency
vibrating mode shape
centrifugal force and calculation expression of vibrating amplitude limit. A prototype pump is fabricated to measure its characters including admittance
pulsation
flow rate and backpressure
and to verify the correctness of theoretic analyzes. Experimental results show that the pump can precisely hold and discharge the volume of liquid in every pulse
and can pump deionized water at a flow rate of 6.12 ml/min under a backpressure of 0.3 kPa with driving voltages of 560 V
vibrating frequency of 183.74 Hz
absorbing period of 0.4 s and dispensing period of 0.1 s. The experimental results validate the effectiveness of the pulsed centrifugal diaphragm piezoelectric pump.
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