A novel scheme of SF

6

gas sensor for surface acoustic wave device based on ZnO films is proposed. ZnO particles prepared by microemulsion method is fabricated on the acoustic track of surface acoustic wave device

where the ZnO films enable to absorb and desorb SF

6

gas physically. The input interdigital transducer apodized by wavelet function and bulk acoustic wave suppressed by multistrip coupler are adopted in SF

6

gas sensor for surface acoustic wave device based on ZnO films

thus the frequency response performances are ameliorated. The dual track receiving structure is incorporated into the sens

or

thus the environment disturbance quantities for measurement signal are eliminated

and the reliability and veracity are further improved. The experimental results confirm that the SF

6

gas sensor for surface acoustic wave device based on ZnO films is endowed with better reproducibility

and excellent response performance for different concentration SF

6

gas in the measurement range

and the linearity sensitivity reaches to 7.3 kHz/10

-6

from 0.5×10

-6

to 20×10

-6

. The sensor can continuously work

but has intersectant sensibility for CO

2

and N

2

.