氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响

黄若轩 1; 孙鹏 2; 朱芳萍 2; 祁正兵 2; 王周成 2

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氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响

更新时间：2025-07-09

- 氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响
- Influences of Nitrogen Flow Percentage on Microstructure and Hardness of ZrN Nano-Coatings from Magnetron Sputtering
- 西安交通大学学报 2011年45卷第1期页码：137-140
- 作者机构：
  
  厦门大学材料学院,福建,厦门,361005
- 作者简介：
- 基金信息：
  
  : 2010-05-17. 作者简介: 黄若轩(1984-),男,硕士生;王周成(联系人),男,教授. 基金项目: 国家科技支撑计划资助项目(2007BAE05B04)
- DOI：
  中图分类号： TG174.444
- 网络首发：2011-01-10，
  
  纸质出版：2011
- 稿件说明：
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黄若轩 1, 孙鹏 2, 朱芳萍 2, 等. 氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响[J]. 西安交通大学学报, 2011,45(1):137-140.

Influences of Nitrogen Flow Percentage on Microstructure and Hardness of ZrN Nano-Coatings from Magnetron Sputtering[J]. 2011, 45(1): 137-140.
黄若轩 1, 孙鹏 2, 朱芳萍 2, 等. 氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响[J]. 西安交通大学学报, 2011,45(1):137-140. DOI：

Influences of Nitrogen Flow Percentage on Microstructure and Hardness of ZrN Nano-Coatings from Magnetron Sputtering[J]. 2011, 45(1): 137-140. DOI：

摘要

利用磁控溅射方法

通过改变氮气流量制备出ZrN纳米涂层

研究了氮气流量对ZrN纳米涂层结构及硬度的影响

并采用表面轮廓仪、X射线衍射仪、扫描电镜及纳米压痕表征了ZrN纳米涂层的厚度、相结构、形貌及硬度.实验结果表明

随着氮气流量增加

涂层厚度减小

涂层择优取向由(111)变为(200)

对应的截面形貌由柱状结构变为非柱状结构; 传统的位错滑移机制不适用于ZrN纳米涂层的塑性变形

其硬度随择优取向和晶粒尺寸的增大而增加.

Abstract

The influences of nitrogen flow percentage on microstructure and hardness of ZrN nano-coatings fabricated by DC magnetron sputtering were investigated. The thickness

phase structure

morphology of cross-section and hardness of ZrN nano-coatings were characterized with profilometer

X-ray diffraction

scanning electron microscope and nanoindentation. The results show that the nitrogen flow percentage significantly affects the thickness and phase structure of ZrN nano-coatings. With increasing nitrogen flow percentage

the coating thickness decreases and the phase structure evolves from the orientation(111)to(200)

the cross-section morphology changes from columnar structure to non-columnar structure as well. For the ZrN nano-coating

the dislocation sliding is not the cause for plastic deformation

and the hardness increases with the increasing grain size and preferred orientation.

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references

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