氧化锌/银双层膜负反馈阴极电极的制备及性能研究

商世广; 朱长纯; 贺永宁; 刘卫华

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氧化锌/银双层膜负反馈阴极电极的制备及性能研究

专题研究 | 更新时间：2025-12-08

- 氧化锌/银双层膜负反馈阴极电极的制备及性能研究
- Research on Preparation and Characteristics of ZnO/Ag Bilayer Negative Feedback Cathode Electrode
- 西安交通大学学报 2007年41卷第12期页码：1470-1473+1478
- 作者机构：
  
  西安交通大学电子与信息工程学院,西安,710049
- 作者简介：
- 基金信息：
  
  : 2007-05-28. 作者简介: 商世广(1975～),男,博士生;朱长纯(联系人),男,教授,博士生导师. 基金项目: 国家自然科学基金资助项目(60036010, 60476037);国家高技术研究发展计划资助项目(2001AA313090)
- DOI：
  中图分类号： O484.11;TF138
- 网络首发：2007-12-10，
  
  纸质出版：2007
- 稿件说明：
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商世广, 朱长纯, 贺永宁, 等. 氧化锌/银双层膜负反馈阴极电极的制备及性能研究[J]. 西安交通大学学报, 2007,41(12):1470-1473+1478.

商世广, 朱长纯, 贺永宁, et al. Research on Preparation and Characteristics of ZnO/Ag Bilayer Negative Feedback Cathode Electrode[J]. 2007, 41(12): 1470-1473+1478.
商世广, 朱长纯, 贺永宁, 等. 氧化锌/银双层膜负反馈阴极电极的制备及性能研究[J]. 西安交通大学学报, 2007,41(12):1470-1473+1478. DOI：

商世广, 朱长纯, 贺永宁, et al. Research on Preparation and Characteristics of ZnO/Ag Bilayer Negative Feedback Cathode Electrode[J]. 2007, 41(12): 1470-1473+1478. DOI：

摘要

提出了一种可显著改善碳纳米管(CNTs)场致发射性能的ZnO/Ag双层膜负反馈阴极电极的制备方法.在条形银电极上溅射沉积一定厚度的Zn膜

经热氧化和湿法刻蚀制备成ZnO/Ag双层膜电极.同单层的Ag或氧化铟锡电极相比

该电极不仅具有足够的负反馈电阻(限流电阻)阻止CNTs场发射中过流的发生

而且降低了条形阴极电极的线性电阻

确保了场发射的均匀性.当溅射沉积Zn膜的厚度从40 nm增到120 nm时

热氧化形成的ZnO由孤岛状的颗粒变为连续体的薄膜

ZnO/Ag双层膜电极的表面光洁度比单层的Ag电极有很大的提高

负反馈电阻层的电阻增大

负反馈的能力增强.CNTs薄膜阴极场发射特性曲线证明

ZnO/Ag双层膜电极能明显降低场发射电流的波动

有效提高器件的稳定性和寿命.

Abstract

A preparation method of ZnO/Ag bilayer negative feedback cathode electrodes was proposed

which can remarkably improve the field emission properties of carbon nanotube(CNT)films. Direct current magnetron sputtering was adopted to deposit Zn film on strip sliver electrodes

and then thermal oxidizing and wet etching were employed to fabricate ZnO/Ag bilayer strip electrodes. Compared to monolayer electrodes of silver and indium tin oxide

the bilayer electrode not only possesses adequate negative feedback or limiting-current resistance to suppress over-current

but also induces the linear resistance to ensure luminescence uniformity. When the thickness of as-deposited Zn layer increased from 40 nm to 120 nm

the morphology of thermal oxidizing ZnO changed from islanded grains to continuous film. Thus

the ZnO/Ag bilayer electrode has smoother surface than sliver electrode. The limiting-current resistance was increased and the negative feedback ability was enhanced. The field emission characteristics of CNT film cathode prove that the ZnO/Ag bilayer electrode can decrease the fluctuation of CNT field emission current

and improve device stability and lifetime effectively.

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Keywords

references

应根裕, 胡文波, 邱勇.平板显示技术[M]. 北京:人民邮电出版社, 2002:417-418.

Li Weizhi, Ji Xingqiao, Zhong Zhiyou, et al. Sulfuric acid treatment of indium tin oxide for application of organic light-emitting diodes [C]∥Proc SPIE Int Soc Opt Eng.Bellingham, USA:International Society for Optical Engineering, 2006:60300A.

Chiu C C, Tsai T Y, Tai N H, et al. Field emission properties of carbon nanotube arrays through the pattern transfer process [J]. Nanotechnology, 2006, 17(12): 2840-2844.

Kim J S, Ahn K S, Kim C O, et al. Ultraviolet laser treatment of multiwall carbon nanotubes grown at low temperature [J]. Appl Phys Lett, 2003, 82(10):1607-1609.

Jung Y J, Son G H, Park J H, et al. Fabrication and properties of under-gated triode with CNT emitter for flat lamp [J]. Diamond Relat Mater, 2005, 14(12): 2109-2112.

Levine J D, Meyer R, Baptist R, et al. Field emission from microtip test arrays using resistor stabilization [J]. J Vac Sci Technol: B, 1995, 13(2): 474-475.

David C P, Whitson T, Janiac D, et al. A study of low temperature crystallization of amorphous thin film indium-tin-oxide [J]. J Appl Phys, 1999, 85(12): 8445-8450.

Hwang M S, Jeong H S, Kim W M, et al. Properties of co-deposited indium tin oxide and zinc oxide films using a bipolar pulse power supply and a dual magnetron sputter source [J]. J Vac Sci Technol: A, 2003, 21(4): 1399-1402.

曾凡光,朱长纯,刘兴辉,等.用机械破碎方法提高印刷碳纳米管薄膜的场发射性能[J].西安交通大学学报,2005,39(8):863-866.

Zeng Fanguang, Zhu Changchun, Liu Xinghui,et al. Enhancing field emission properties of printed carbon nanotube films by mechanical crushing treatment [J]. Journal of Xi'an Jiaotong University, 2005,39(8): 863-866.

Li Yukui, Zhu Changchun, Liu Xinghui. Field emission display with carbon nanotubes cathode: prepared by a screen-printing process [J]. Diamond Relat Mater, 2002, 11(11): 1845-1847.

Liu C, Matsutani T, Asanuma T, et al. Room-temperature growth of crystalline indium tin oxide films on glass using low-energy oxygen-ion-beam assisted deposition [J]. J Appl Phys, 2003, 93(4): 2262-2266.

Zhang Jihua, Wang Xi, Yang Wenwei, et al. Interaction between carbon nanotubes and substrate and its implication on field emission mechanism [J]. Carbon, 2006, 44(3): 418-422.

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