一种基于Radon变换的精密工作台微位移和转动测量方法

姜歌东; 陶涛; 梅雪松; 袁渊浩

您当前的位置：

首页 >

文章列表页 >

一种基于Radon变换的精密工作台微位移和转动测量方法

更新时间：2025-07-09

- 一种基于Radon变换的精密工作台微位移和转动测量方法
- Micro-Displacement and Rotation Measurement Method of Precision Worktable Based on Radon Transformation
- 西安交通大学学报 2009年43卷第5期页码：31-35
- 作者机构：
  
  西安交通大学机械工程学院,西安,710049
- 作者简介：
- 基金信息：
  
  :2008-10-29. 作者简介: 姜歌东(1971-),女,副教授. 基金项目: 国家自然科学基金资助项目(50505035);国家“863计划”资助项目(2008AA42045);国家“973规划”资助项目(2005CB724100);教育部新世纪优秀人才资助项目(NCET-07-0667).
- DOI：
  中图分类号： TB92
- 网络首发：2009-05-10，
  
  纸质出版：2009
- 稿件说明：
移动端阅览
姜歌东, 陶涛, 梅雪松, 等. 一种基于Radon变换的精密工作台微位移和转动测量方法[J]. 西安交通大学学报, 2009,43(5):31-35.

Micro-Displacement and Rotation Measurement Method of Precision Worktable Based on Radon Transformation[J]. 2009, 43(5): 31-35.
姜歌东, 陶涛, 梅雪松, 等. 一种基于Radon变换的精密工作台微位移和转动测量方法[J]. 西安交通大学学报, 2009,43(5):31-35. DOI：

Micro-Displacement and Rotation Measurement Method of Precision Worktable Based on Radon Transformation[J]. 2009, 43(5): 31-35. DOI：

摘要

针对精密工作台微位移和转动测量问题

提出一种基于平面正交光栅图像Radon变换的精密工作台位移测量方法.构建了由平面正交光栅和显微摄像系统组成的测量实验台

在不同实验条件下识别了平面正交光栅的栅线间距和角度

进行了工作台运动测量实验.实验结果证明

Radon变换对噪声不敏感

能很容易地识别出不同条件下平面正交光栅的倾角和位置

可精确地测量工作台位移

测量误差小于1 μm. 通过对现有系统测量分辨率的分析

提出了取消相机镜头和适配镜、以CCD感光面直接接收放大的光栅图像来进一步提高测量系统分辨率的方案.

Abstract

A measurement method based on the Radon transformation of plane orthogonal-grating image is proposed for measuring the micro-displacement and rotation of a precision worktable. A test table is constructed

which is mainly composed of micro-photography device and plane orthogonal-grating. The grating spaces and angles of the plane orthogonal-grating images are identified under different conditions

and the displacement experiment of the precision worktable is conducted. The experiment results show that Radon transformation is insensitive to measuring noise and the grating position and angles of plane orthogonal-grating image can be easily identified; the displacement of the worktable can be measured accurately

and the measuring error gets within 1 μm. By a analyzing the resolution capacity of the current measuring system

the measuring system configuration for further enhancing precision is proposed

where the camera lens and adapter in micro-photography device become unnecessary

and the amplified grating image is directly received by CCD sensor.

关键词

Keywords

references

吴鹰飞, 周兆英. 超精密定位工作台 [J]. 微细加工技术, 2002, 41(2): 41-47.

WU Yingfei, ZHOU Zhaoyin. Ultra precision stages [J]. Micro Fabrication Technology, 2002, 41(2): 41-47.

HOLMES M, HOCKENA R, TRUMPER D L. The long-range scanning stage: a novel platform for scanned-probe microscopy [J]. Precision Engineering, 2000, 24(1): 191-209.

KIM W J, TRUMPER D L. High-precision magnetic levitation stage for photolithography [J]. Precision Engineering, 1998, 22(2): 66-77.

KUO S K, SHAN X, MENQ C H. Large travel ultra precision xy θ motion control of a magnetic-suspension stage [J]. IEEE/ASME Transactions on Mechatronics, 2003, 8(3): 334-341.

JUNG K S, BAE Y S. Study on a novel contact-free planar system using direct drive DC coils and permanent magnets [J]. IEEE/ASME Transactions on Mechatronics, 2002, 7(2): 35-43.

王庆有, 蔡锐, 马愈昭,等. 采用面阵CCD对大尺寸轴径进行高精度测量的研究 [J]. 光电工程, 2003, 30(6): 36-38.

WANG Qingyou, CAI Rui, MA Yuzhao, et al. A study on high-precision measurement of large-size axis diameter with array CCD [J]. Opto-Electronic Engineering, 2003, 30(6): 36-38.

林逢春, 刘旭. 基于线阵列CCD的带转像棱镜的位置测量 [J]. 浙江大学学报, 2006, 40(6): 1089-1092.

LIN Fengchun, LIU Xu. Position measurement method based on linear array CCD with inverting prism [J]. Journal of Zhejiang University, 2006, 40(6): 1089-1092.

李文炳, 冯平, 蔡增伸,等. 基于数字图像处理的位移测量 [J]. 浙江工业大学学报, 2004, 32(6):688-691.

LI Wenbing, FENG Ping, CAI Zengshen, et al. Displacement measuring based on digital image processing [J]. Journal of Zhejiang University of Technology, 2004, 32(6):688-691.

吴鹰飞, 周兆英. 利用图像处理实现平面工作台三自由度位移的同步检测 [J]. 光学技术, 2002, 28(4): 326-328, 331.

WU Yingfei, ZHOU Zhaoying. Synchronous detection of xy θ displacements by image processing [J]. Optical Technique, 2002, 28(4): 326-328, 331.

CHANG S, WANG C S, XIONG C Y, et al. Nanoscale in-plane displacement evaluation by AFM scanning and digital image correlation processing [J]. Nanotechnology, 2005(6): 344-349.

GALIGEKERE R R, HOLDSWORTH D W. Moment patterns in the Radon space [J]. Optical Engineering, 2000, 39(4): 1088-1097.

LI J H, PAN Q, ZHANG H C, et al. Image recognition using Radon transform [C]∥The IEEE 6th International Conference on Intelligent Transportation Systems-IV: Image Analysis. New York,USA: IEEE Computer Society, 2003: 741-745.

孙东卫, 朱程辉. 基于Radon变换的倾斜车牌图像角度检测与校正 [J]. 微计算机应用, 2008, 29(2): 18-21.

SUN Dongwei, ZHU Chenghui. Skew angle detection of the vehicle license plate image and correct based on Radon transformation [J]. Microcomputer Applications, 2008, 29(2): 18-21.

胡学朋, 王进祥, 刘松芬,等. 三维倾角分布的Radon变换计算 [J]. 南开大学学报, 2006, 39(5): 1-5.

HU Xuepeng, WANG Jinxiang, LIU Songfen, et al. 3D dip distribution computed with Radon transformation [J]. Acta Scientiarum Naturalium Universitatis Nankaiensis, 2006, 39(5): 1-5.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

冷库水平空气幕热湿阻隔性能数值模拟研究

电动车辆间接热系统快速除湿响应迟滞机理及优化控制策略

多工况下离心压气机叶轮-机匣一体联合设计优化

水蒸气掺混对氨裂解气旋流燃烧与排放特性的影响研究

电子级超纯氮深冷空分流程节能优化研究