西安交通大学电力设备电气绝缘国家重点实验室,西安,710049
网络首发:2010-12-10,
纸质出版:2010
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邵先军, 马跃, 李娅西, 等. 低气压直流氩气辉光放电的数值模拟研究[J]. 西安交通大学学报, 2010,44(12):50-54.
Numerical Simulation for Low Pressure DC Argon Glow Discharge[J]. 2010, 44(12): 50-54.
建立了一维氩气直流辉光放电自洽流体模型
采用对流与扩散方程来描述带电粒子在间隙中迁移、扩散以及电子的能量变化过程
并考虑了空间电荷对电场的影响以及离子撞击阴极产生的二次电子发射作用.采用有限元法对放电模型进行数值求解
得到了放电电流随时间的演化波形
以及放电稳定后带电粒子的浓度与总通量密度的空间分布
同时也求得了电子能量与电场的空间分布.计算结果表明:加压25 μs后
放电逐渐趋于稳定状态; 当放电稳定后
在阴极位降区附近
离子密度比电子密度高几个数量级
在正柱区附近两者浓度几乎相等; 电子能量在阴极位降区内达到峰值29 eV
而在负辉区及正柱区几乎保持不变; 放电电流密度在阴极位降区主要由流向阴极的氩离子及其产生的二次电子所贡献
而在负辉区和正柱区
电子成了放电电流密度的主要贡献者.
A one-dimensional self-consistent fluid model of argon glow discharge is established. The convection and diffusion equations are proposed to describe drift-diffuse motions of charged particles in gap and variation process of electron energy. The influence of space charge on electric field and secondary electron emission from cathode surface due to ion bombardment are considered in this discharge model. And the finite-element method(FEM)is adopted for numerical solutions. The evolvement waveform of discharge current with time variety is obtained
and the spatial distributions of charged particles density
total flux density
electron energy and electric field are investigated as the discharge becomes stable. The simulation results show that discharge reaches the stable state after 25 μs computation time; in stable stage of discharge
ion density gets several orders of magnitude higher than electron density near the cathode-fall region
and almost equal in positive column region; electron energy reaches the peak value 29 eV in cathode-fall region and almost keeps constant near the positive column region and negative glow region. In the cathode-fall region
the discharge current density is mainly carried by the argon ions flowing towards the cathode and the secondary electrons which are contributed by the ions. And electrons become the main discharge current carrier in the negative glow and positive column regions.
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