高<italic style="font-style: italic">g</italic>值微机电系统加速度传感器可靠性的

相场分析方法; 侯宪阁; 黄艳辉; 周铭; 赵杰; 夏勇; 张庆

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高g值微机电系统加速度传感器可靠性的

更新时间：2026-03-26

- 高g值微机电系统加速度传感器可靠性的
- Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers
- 西安交通大学学报 2026年
- 作者机构：
  
  1.西安交通大学仪器科学与技术学院，710049，西安
  2.安徽北方微电子研究院有限公司，215163，江苏苏州
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH825
- 收稿：2025-12-03，
  
  修回：2026-03-18，
  
  录用：2026-03-26，
- 稿件说明：
移动端阅览
相场分析方法, 侯宪阁, 黄艳辉, 等. 高g值微机电系统加速度传感器可靠性的[J/OL]. 西安交通大学学报, 2026.

HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J/OL]. JOURNAL OF XI’AN JIAOTONG UNIVERSITY, 2026.
相场分析方法, 侯宪阁, 黄艳辉, 等. 高g值微机电系统加速度传感器可靠性的[J/OL]. 西安交通大学学报, 2026. DOI：

HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J/OL]. JOURNAL OF XI’AN JIAOTONG UNIVERSITY, 2026. DOI：

摘要

本文针对高

值微机电系统（MEMS）加速度传感器在极端冲击环境下的结构失效问题，提出了一种利用相场断裂模型的可靠性分析方法。该方法以相场断裂理论为基础，构建了包含失效形式识别、裂纹演化仿真、结构改进与再验证的可靠性分析流程。通过静力学与瞬态分析，并结合相场断裂模型，对裂纹萌生与扩展的微尺度过程进行了定量化与可视化表征，并与三维高

值冲击试验结果进行对比验证。在此基础上，针对扭转梁根部的高应力集中区域提出了圆角改进设计，并通过静力、瞬态再分析以及相场断裂的对比验证，完成改进方案的抗断裂性能评估。研究结果表明：扭转梁根部存在显著的应力集中现象，是裂纹萌生与扩展的主导区域，由此揭示了应力集中与裂纹演化之间的关联。所提出的梁根圆角改进设计使应力集中降低约18%，裂纹扩展延迟约40%，从而提高了传感器在高

值冲击工况下的抗断裂可靠性。该研究为高

值MEMS加速度传感器的可靠性分析供了一种解决方案。

Abstract

To address structural failures in high-

Micro-Electro-Mechanical System(MEMS) accelerometers under extreme shocks

a reliability analysis method leveraging the phase-field fracture model is proposed. Based on phase-field fracture theory

a reliability analysis workflow encompassing failure-mode identification

crack-evolution simulation

structural improvement

and re-validation is established.

The micro-scale processes of crack initiation and propagation are characterized and visualized through static and transient analyses combined with a phase-field fracture model. The numerical results are comparatively validated against three-dimensional high-

shock test results. On this basis

a fillet improvement design is proposed for the high stress-concentration region at the torsion-beam root

and the fracture resistance of the improved scheme is evaluated via static and transient reanalysis together with phase-field fracture-based comparative validation. The results indicate that pronounced stress concentration at the torsion-beam root is the dominant region governing crack initiation and propagation

thereby revealing the relationship between stress concentration and crack evolution. The proposed beam-root fillet improvement has been shown to result in a reduction of approximately 18% in stress concentration

as well as an estimated 40% delay in crack propagation. These improvements enhance the sensor's fracture-resistance reliability under high-

impact conditions. This study proposes a viable solution for the reliability analysis of high-

MEMS accelerometers.

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高g值微机电系统加速度传感器可靠性的

Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers

DOI：

摘要

Abstract

关键词

Keywords

references