针对传统的硅基辐射探测器在极端环境应用中表现出抗辐照和耐高温能力差的问题,提出并实现了一种采用ZnO单晶制备的肖特基结X射线探测器,并对其各项电学特性进行了测试分析。利用磁控溅射法在ZnO单晶的两面分别制备了Au电极和Al电极;在400℃下退火使得Au-ZnO形成肖特基接触,Al-ZnO形成欧姆接触。常温暗场条件下电流特性测试结果表明:器件的反向电流与温度的倒数成指数关系;在-10 V反向偏置电压下的器件电流为15μA
10 V正向偏置电压下的电流为100μA;在偏置电压为-10 V时测量器件对X射线的响应,发现响应电流随射线电子束流的增加而增加;当加速电压为30 keV、入射X射线电子束流在1~10μA范围内时器件有较高的能量分辨率;在偏置电压为-10 V条件下对器件施加以周期性光照时,器件上升时间和下降时间分别为0.04 s和3.59 s
响应速度快且重复性好。该研究结果表明,基于ZnO单晶的Au/ZnO/Al结构的肖特基结探测器件在X射线探测领域具有较好的应用前景。
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