Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen

ZENG Haitao; XU Feng; YU Zhipeng; PU Liang; LIU Yunsheng

doi:10.7652/xjtuxb202607010

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Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen

Special Topic Preparation of High-Purity Gas | 更新时间：2026-07-09

- Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen
- Journal of Xi'an Jiaotong University Vol. 60, Issue 7, Pages: 97-108(2026)
- 作者机构：
  
  西安交通大学能源与动力工程学院，710049，西安
  宏芯气体（上海）有限公司，201210，上海
  西安交通大学深低温技术与装备教育部重点实验室，710049，西安
  江西卓超科技有限公司，338000，江西新余
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb202607010
  CLC： TQ116
- Received：18 November 2025，
  
  Published：10 July 2026
- 稿件说明：
移动端阅览
ZENG Haitao, XU Feng, YU Zhipeng, et al. Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen[J]. Journal of Xi'an Jiaotong University, 2026, 60(7): 97-108.
DOI：

ZENG Haitao, XU Feng, YU Zhipeng, et al. Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen[J]. Journal of Xi'an Jiaotong University, 2026, 60(7): 97-108. DOI： 10.7652/xjtuxb202607010.

摘要

为满足电子行业对超纯氮品质要求的提升，改善深冷空分生产电子级超纯氮的能耗，利用Aspen Plus仿真软件构建了深冷空分制氮流程模型，并进行了多目标优化分析。首先，在相似氮产品要求前提下，比较了2种制氮流程的模拟结果；然后，以性能表现较优的低压塔抽气双塔流程为基础，通过Box-Behnken响应曲面法分析了比功耗对高压塔分离压力、低压塔分离压力、高压塔理论塔板数、低压塔理论塔板数的敏感性，分析了设计变量间相互作用对比功耗的影响，建立了包括比功耗在内的4个响应量与设计变量之间的预测模型，得出了最优参数组合并对优化前、后系统主要部件进行了

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分析。结果表明：预测模型具有优良的准确性；在最优参数组合下，预测值与模拟值的误差为0.02%；流程中大部分

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损源于空气压缩单元、精馏单元及主换热器；优化后，氮气产量提升了7.30%，比功耗降低了3.74%，单位产量氮气

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损降低了6.33%，系统

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效率从45.13%提升至47.05%。

Abstract

To meet the increasing demand for electronic-grade ultra-pure nitrogen and to minimize energy consumption during production of such nitrogen via cryogenic air separation，cryogenic air separation process models were developed using Aspen Plus，and a multi-obj ective optimization analysis was conducted.Firstly，the simulation results of two nitrogen production processes were compared under equivalent nitrogen product specifications.Secondly，based on the superior performance of the dual-column process with gas extraction from the low-pressure column（LPC），the sensitivity of specific power consumption to four design variables—separation pressure of the high-pressure column（HPC），separation pressure of the LPC，and the number of theoretical stages in both columns—was investigated using the Box-Behnken response surface methodology. The interactions between these design variables and their effects on specific power consumption were analyzed，and predictive models relating the design variables to four response variables were established.An optimal parameter combination was subsequently identified，followed by a comparative exergy analysis between the optimized and initial conditions.The results indicate that the predictive models exhibit high accuracy，with a relative error of only 0.02% between the predicted and simulated values under optimal parameter combination. Most of the exergy destruction comes from the air compression unit，distillation unit，and main heat exchanger. After optimization，nitrogen production increased by 7.30%，specific power consumption decreased by 3.74%，and exergy destruction per unit of nitrogen production was reduced by 6.33%.Consequently，the system exergy efficiency was enhanced from 45.13% to 47.05%.

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references

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