Thermal Stress Analysis of Piezoelectric Force Sensors under Thermal-Structural Coupling

ZHOU Yuanqin; LI Yingjun; LI Hongyu; WANG Guicong

doi:10.7652/xjtuxb202501018

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Thermal Stress Analysis of Piezoelectric Force Sensors under Thermal-Structural Coupling

更新时间：2026-01-06

- Thermal Stress Analysis of Piezoelectric Force Sensors under Thermal-Structural Coupling
- Journal of Xi’an Jiaotong University Vol. 59, Issue 1, Pages: 194-205(2025)
- 作者机构：
  
  济南大学机械工程学院， 250022，济南
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb202501018
  CLC： TH82
- Received：20 March 2024，
  
  Online First：21 October 2024，
  
  Published：10 January 2025
- 稿件说明：
移动端阅览
ZHOU Yuanqin, LI Yingjun, LI Hongyu, et al. Thermal Stress Analysis of Piezoelectric Force Sensors under Thermal-Structural Coupling[J]. Journal of Xi’an Jiaotong University, 2025, 59(1): 194-205.
DOI：

ZHOU Yuanqin, LI Yingjun, LI Hongyu, et al. Thermal Stress Analysis of Piezoelectric Force Sensors under Thermal-Structural Coupling[J]. Journal of Xi’an Jiaotong University, 2025, 59(1): 194-205. DOI： 10.7652/xjtuxb202501018.

摘要

针对极端环境下高温传感器的可靠性受限于热应力，导致传感器零漂和温漂甚至失效的问题，提出了一种基于热-结构耦合的高温压电式力传感器热应力计算方法及其有限元模型。基于平衡方程和热-弹性理论，建立了传感器热弹性力学物理方程，分析了封装材料和温度对压电式力传感器热应力的影响规律。通过分析高温环境下压电式力传感器的热应力分布，确定传感器应力集中位置。对传感器热应力进行溯源，得到封装材料和晶组材料的热膨胀系数不一致导致热失配应力产生。将随机振动功率谱密度转换为加速度时域信号，利用多物理场耦合方法，分析得到传感器的最大热应力为134.61 MPa，小于材料的屈服强度300 MPa，验证了传感器在高温、高压和随机振动综合环境下具有良好的可靠性。通过研究氧化铝和氧化锆绝缘层对传感器最大热应力的影响，研究结果表明，温度为420 ℃时氧化铝绝缘层传感器的最大热应力比无绝缘层传感器的最大热应力小9.18 MPa，比氧化锆绝缘层传感器最大热应力小79.31 MPa，该工作可为高温环境下减小传感器热应力措施提供一定的参考。

Abstract

To address the issue of limited sensor reliability in extreme environments due to thermal stress

leading to sensor zero drift

temperature drift and even failure

a thermal stress calculation method and finite element model for high-temperature piezoelectric force sensors based on thermal-structural coupling. Based on the equilibrium equation and the thermal-elastic theory

the physical equation of thermoelastic mechanics of the sensor is established

and the impact of packaging material and temperature on the thermal stress of the piezoelectric force sensor is analyzed. By examining the thermal stress distribution of the piezoelectric force sensor in high-temperature environments

the areas of stress concentration within the sensor are identified. Tracing back the thermal stress of the sensor reveals that thermal mismatch stress arises from the disparity in the thermal expansion coefficients between the packaging material and the crystalline material. The random vibration power spectral density is converted into an acceleration time-domain signal

and the sensor's thermal stress is analyzed using a multi-physics coupling method

yielding a maximum stress of 134.61 MPa

which is below the material's yield strength by 300 MPa

confirming the sensor's reliability in high-temperature

high-pressure

and random vibration environments. An examination of the impact of alumina and zirconia insulation on the sensor's maximum thermal stress shows that at 420 ℃

the maximum thermal stress of the alumina-insulated sensor is 9.18 MPa lower than that of the non-insulated sensor and 79.31 MPa lower than that of the zirconia-insulated sensor. The research provides insights for reducing thermal stress in sensors in high-temperature environments.

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references

ZHANG Tianyi , WEI Xueyong , JIANG Zhuangde , et al . Sensitivity enhancement of a resonant mass sensor based on internal resonance [J ] . Applied Physics Letters , 2018 , 113 ( 22 ): 223505 .

袁宇鹏 , 王登攀 , 李小飞 , 等 . 面向核电状态监测用的压电加速度传感器设计 [J ] . 压电与声光 , 2019 , 41 ( 1 ): 49 - 52 .

YUAN Yupeng , WANG Dengpan , LI Xiaofei , et al . Design of high sensitive piezoelectric accelerometer for nuclear power status monitoring [J ] . Piezoelectrics & Acoustooptics , 2019 , 41 ( 1 ): 49 - 52 .

聂泳忠 , 颜黄苹 , 黄元庆 . 铋层状与铌酸锂复合压电陶瓷传感器的温度特性 [J ] . 厦门大学学报(自然科学版) , 2016 , 55 ( 3 ): 441 - 444 .

NIE Yongzhong , YAN Huangping , HUANG Yuanqing . Temperature characteristics of a Bi 4 Ti 3 O 1 2-LiNbO 3 compound piezoelectric ceramic sensor [J ] . Journal of Xiamen University (Natural Science) , 2016 , 55 ( 3 ): 441 - 444 .

CHEN Yankun , XU Qian , ZHANG Xiuqin , et al . Materials and sensing mechanisms for high-temperature pressure sensors: a review [J ] . IEEE Sensors Journal , 2023 , 23 ( 22 ): 26910 - 26924 .

单存良 , 梁庭 , 王文涛 , 等 . 基于SOI的MEMS高温压阻式压力传感器 [J ] . 微纳电子技术 , 2021 , 58 ( 4 ): 325 - 331 .

SHAN Cunliang , LIANG Ting , WANG Wentao , et al . MEMS high temperature piezoresistive pressure sensor based on SOI [J ] . Micronanoelectronic Technology , 2021 , 58 ( 4 ): 325 - 331 .

赵立波 , 赵玉龙 , 李建波 , 等 . 倒杯式耐高温高频响压阻式压力传感器 [J ] . 西安交通大学学报 , 2010 , 44 ( 7 ): 50 - 54 .

ZHAO Libo , ZHAO Yulong , LI Jianbo , et al . Inverted-cup high-temperature and high-frequency piezoresistive pressure sensor [J ] . Journal of Xi'an Jiaotong University , 2010 , 44 ( 7 ): 50 - 54 .

OSIPOV A A , IANKEVICH G A , OSIPOV A A , et al . Silicon carbide dry etching technique for pressure sensors design [J ] . Journal of Manufacturing Processes , 2022 , 73 : 316 - 325 .

LI Chen , SUN Boshan , JIA Pengyu , et al . Capacitive pressure sensor with integrated signal-conversion circuit for high-temperature applications [J ] . IEEE Access , 2020 , 8 : 212787 - 212793 .

ZHU Chen , GERALD R E , HUANG Jie . Progress toward sapphire optical fiber sensors for high-temperature applications [J ] . IEEE Transactions on Instrumentation and Measurement , 2020 , 69 ( 11 ): 8639 - 8655 .

AMOREBIETA J , DURANA G , ORTEGA-GOMEZ A , et al . Packaged multi-core fiber interferometer for high-temperature sensing [J ] . Journal of Lightwave Technology , 2019 , 37 ( 10 ): 2328 - 2334 .

MIAO Qianqian , LIU Chaoran , ZHANG Nan , et al . Toward self-powered inertial sensors enabled by triboelectric effect [J ] . ACS Applied Electronic Materials , 2020 , 2 ( 10 ): 3072 - 3087 .

JIANG Xiaoning , KIM K , ZHANG Shujun , et al . High-temperature piezoelectric sensing [J ] . Sensors , 2013 , 14 ( 1 ): 144 - 169 .

王天资 , 周志勇 , 李伟 , 等 . 高温压电振动传感器及陶瓷材料研究应用进展 [J ] . 传感器与微系统 , 2020 , 39 ( 6 ): 1 - 4 .

WANG Tianzi , ZHOU Zhiyong , LI Wei , et al . Progress in research and application of high temperature piezoelectric vibration sensors and piezo ceramic materials [J ] . Transducer and Microsystem Technologies , 2020 , 39 ( 6 ): 1 - 4 .

LIU Yan , WANG Hai , ZHAO Wei , et al . Thermal-performance instability in piezoresistive sensors: inducement and improvement [J ] . Sensors , 2016 , 16 ( 12 ): 1984 .

WANG Mengzhu , DONG Helei , MAO Xiaobiao , et al . Thermally matched multilayer ceramic composite insulating layers for high-temperature thick/thin-film sensors on nickel-based superalloy [J ] . Ceramics International , 2024 , 50 ( 2 ): 3852 - 3860 .

刘石豪 , 张振海 , 何光 . 高温压电加速度传感器设计与仿真优化 [J ] . 压电与声光 , 2023 , 45 ( 5 ): 775 - 779 .

LIU Shihao , ZHANG Zhenhai , HE Guang . Design and simulation optimization of high-temperature piezoelectric accelerometers [J ] . Piezoelectrics & Acoustooptics , 2023 , 45 ( 5 ): 775 - 779 .

ZHANG Yunfan , LI Bowen , LI Hui , et al . Investigation of potting-adhesive-induced thermal stress in MEMS pressure sensor [J ] . Sensors , 2021 , 21 ( 6 ): 2011 .

王春明 , 陈娟囡 , 陆宏婷 , 等 . 高居里温度铋层状结构铌酸铋钙(CaBi 2 Nb 2 O 9 )压电陶瓷 [J ] . 科学通报 , 2021 , 66 ( 16 ): 2061 - 2070 .

WANG Chunming , CHEN Juannan , LU Hongting , et al . High curie temperature bismuth layer-structured ferroelectric calcium bismuth niobate (CaBi 2 Nb 2 O 9 ) piezoelectric ceramics [J ] . Chinese Science Bulletin , 2021 , 66 ( 16 ): 2061 - 2070 .

吴金根 , 高翔宇 , 陈建国 , 等 . 高温压电材料、器件与应用 [J ] . 物理学报 , 2018 , 67 ( 20 ): 1 - 30 .

WU Jingen , GAO Xiangyu , CHEN Jianguo , et al . Review of high temperature piezoelectric materials, devices, and applications [J ] . Acta Physica Sinica , 2018 , 67 ( 20 ): 1 - 30 .

XU Mingtian . A novel numerical method for solving heat conduction problems [J ] . International Journal of Heat and Mass Transfer , 2016 , 103 : 285 - 290 .

LI Qiuhua , HOU Pengfei , SHANG Shouming , et al . Three-dimensional thermal-stress analysis of transversely isotropic double-layer plate based on Green's function [J ] . International Journal of Mechanical Sciences , 2022 , 227 : 107431 .

WANG Cun , YANG Jiajun , HUANG Wei , et al . Numerical simulation and analysis of thermal stress distributions for a planar solid oxide fuel cell stack with external manifold structure [J ] . International Journal of Hydrogen Energy , 2018 , 43 ( 45 ): 20900 - 20910 .

YILBAS B S , ARIF A F M . Material response to thermal loading due to short pulse laser heating [J ] . International Journal of Heat and Mass Transfer , 2001 , 44 ( 20 ): 3787 - 3798 .

JIN Zhong , TIAN Junwang , TANG Xin , et al . Simulation and reliability testing of leadless package high-temperature pressure sensor [J ] . Microelectronics Journal , 2022 , 129 : 105568 .

KORKMAZ M E , GUPTA M K , GÜNAY M , et al . Comprehensive analysis of tool wear, surface roughness and chip morphology in sustainable turning of Inconel-601 alloy [J ] . Journal of Manufacturing Processes , 2023 , 103 : 156 - 167 .

DONG Xue , AN Qiliang , ZHANG Shupeng , et al . Porous ceramics based on high-thermal-stability Al 2 O 3 -ZrO 2 nanofibers for thermal insulation and sound absorption applications [J ] . Ceramics International , 2023 , 49 ( 19 ): 31035 - 31045 .

KUMAR K S , KALOS P S , AKHTAR M N , et al . Experimental and theoretical analysis of exhaust manifold by uncoated and coated ceramics (Al 2 O 3 , TiO 2 and ZrO 2 ) [J ] . Case Studies in Thermal Engineering , 2023 , 50 : 103465 .

陈益哲 , 庞玉华 , 王建国 , 等 . GH2907合金热变形本构方程 [J ] . 稀有金属材料与工程 , 2019 , 48 ( 11 ): 3577 - 3584 .

CHEN Yizhe , PANG Yuhua , WANG Jianguo , et al . Constitutive equation for hot deformation of GH2907 superalloy [J ] . Rare Metal Materials and Engineering , 2019 , 48 ( 11 ): 3577 - 3584 .

徐雄 , 李钊 , 万志鹏 , 等 . 长期时效对低膨胀高温合金GH2909性能的影响 [J ] . 材料研究学报 , 2021 , 35 ( 5 ): 330 - 338 .

XU Xiong , LI Zhao , WAN Zhipeng , et al . Effect of long-term aging on properties of low expansion superalloy GH2909 [J ] . Chinese Journal of Materials Research , 2021 , 35 ( 5 ): 330 - 338 .

杜飞 , 田镇熊 , 刘宏磊 , 等 . 采用有限体积法的自然对流换热拓扑优化数值方法 [J ] . 西安交通大学学报 , 2024 , 58 ( 8 ): 103 - 113 .

DU Fei , TIAN Zhenxiong , LIU Honglei , et al . A numerical method for topology optimization of natural convection heat transfer based on finite volume method [J ] . Journal of Xi'an Jiaotong University , 2024 , 58 ( 8 ): 103 - 113 .

MARTIN R . Noise power spectral density estimation based on optimal smoothing and minimum statistics [J ] . IEEE Transactions on Speech and Audio Processing , 2001 , 9 ( 5 ): 504 - 512 .

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