Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO<sub>2</sub> Thin Film

HU Zongxin; TIAN Bing; TAN Zejie; XU Zhenheng; WANG Hairong

doi:10.7652/xjtuxb202409013

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Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film

更新时间：2025-07-28

- Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film
- Vol. 58, Issue 9, Pages: 129-138(2024)
- 作者机构：
  
  1. 西安交通大学精密微纳制造技术全国重点实验室,西安,710049
  2. 西安交通大学机械工程学院,西安,710049
  3. 南方电网数字电网研究院有限公司,广州,510700
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb202409013
  CLC： TM835;TP212
- Online First：10 September 2024，
  
  Published：2024
- 稿件说明：
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HU Zongxin, TIAN Bing, TAN Zejie, et al. Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film[J]. 2024, 58(9): 129-138. DOI: 10.7652/xjtuxb202409013.
DOI：

HU Zongxin, TIAN Bing, TAN Zejie, et al. Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film[J]. 2024, 58(9): 129-138. DOI: 10.7652/xjtuxb202409013. DOI：

摘要

为了实现变压器油中溶解的乙炔气体检测

研发了一款基于Au修饰SnO

气敏薄膜的乙炔气体传感器。通过射频溅射制备SnO

薄膜

进而通过直流溅射制备Au并改变溅射时间

得到不同Au修饰量的气敏薄膜

采用微机电系统(MEMS)工艺开发了基于气敏薄膜的乙炔气体传感芯片。对比纯SnO

以及不同Au修饰量的SnO

气敏薄膜的气敏性能

结果显示

基于20 s-Au修饰的SnO

薄膜MEMS乙炔传感器性能最佳

最佳工作温度为200 ℃

体积分数为1×10

-6

的乙炔气体的响应值高达14

响应恢复时间分别为5 s和87 s

且具有良好的重复性

检测限低至0.1×10

-6

(体积分数)。对比测试体积分数为1×10

-6

下变压器油中溶解的氢气、甲烷等其他气体

所研发的MEMS乙炔气体传感器仍具有优越的选择性

在长期测试下保持良好稳定性

可为解决变压器油中溶解乙炔气体的检测难题提供一种元件选择。

Abstract

To detect acetylene gas dissolved in transformer oil

an acetylene gas sensor based on Au decorated SnO

gas sensing thin film is developed. SnO

thin films were prepared using radio frequency magnetron sputtering followed by the deposition of Au using direct current magnetron sputtering. The different amounts of Au decoration were realized by adjusting the deposition time.Then the acetylene gas sensing chips

based on gas sensing thin films

are fabrica

ted using the process of micro electro mechanical systems(MEMS). The sensing properties of the pure SnO

and Au decorated SnO

films are compared. The results indicates that the sensor using the 20 s-Au decorated SnO

film shows superior performance

operating optimally at 200 °C. It exhibits a response value of 14 to acetylene gas at a volume fraction of 1×10

-6

with response and recovery times of 5 s and 87 s

respectively. The sensor exhibits excellent repeatability

with a detection limit of 0.1×10

-6

in volume fraction. In comparison testing against hydrogen

methane

and other gases dissolved in the transformer oil at a concentration of 1×10

-6

volume fraction

the sensor has a good selective response to acetylene and maintains excellent performance stability over long-term testing. It can serve as a component selection for addressing the challenge of detecting dissolved acetylene gas in transformer oil.

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Keywords

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⁰

Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO2 Thin Film

DOI：10.7652/xjtuxb202409013

摘要

Abstract

关键词

Keywords

references

Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO₂ Thin Film