Research on Visual Positioning Technology for Microhole Processing of Bonding Wedges in Chip Packaging

doi:10.7652/xjtuxb202108008

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Research on Visual Positioning Technology for Microhole Processing of Bonding Wedges in Chip Packaging

更新时间：2025-07-09

- Research on Visual Positioning Technology for Microhole Processing of Bonding Wedges in Chip Packaging
- Vol. 55, Issue 8, Pages: 59-67(2021)
- 作者机构：
  
  西安交通大学机械工程学院,西安,710049
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb202108008
  CLC： TP29
- Online First：10 August 2021，
  
  Published：2021
- 稿件说明：
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Research on Visual Positioning Technology for Microhole Processing of Bonding Wedges in Chip Packaging[J]. 2021, 55(8): 59-67.
DOI：

Research on Visual Positioning Technology for Microhole Processing of Bonding Wedges in Chip Packaging[J]. 2021, 55(8): 59-67. DOI： 10.7652/xjtuxb202108008.

摘要

针对立针加工中微孔加工位置定位问题

提出了一种基于模板匹配粗定位和基于边缘检测精定位的两步视觉定位方法。在粗定位阶段

提出了一种基于形状模板匹配和支持向量机的粗定位方法

首先建立了带掩膜的模板

在形状模板匹配的基础上

通过提前终止策略、图像金字塔

以及减少搜索面积的方法对匹配过程进行加速

在对匹配结果提取方向梯度直方图特征后

基于支持向量机进行分类从而防止误匹配。在精定位阶段

提出了一种具有角度约束的边缘检测算法定位外轮廓边缘

并采用二次函数拟合梯度极大值实现亚像素边缘定位

利用最小二乘法拟合轮廓边缘后定位微孔加工位置。在实验阶段

首先通过少量样本对支持向量机进行训练

准确率达到了99.76%

在此基础上本文粗定位方法交并比达到82.9%

而传统的模板匹配方法仅为36.5%; 将立针以不同姿态放置在不同位置

在不同光照强度下加入高斯噪声后进行精定位实验

发现本文精定位方法的最大定位误差为2.20 μm

而基于Canny边缘检测方法的最大定位误差为5.99 μm

本文算法总耗时仅需328 ms。

Abstract

A two-step visual positioning method based on template matching for rough positioning and edge detection for fine positioning is proposed to solve the problem of locating microholes of bonding wedges. In the step of rough positioning

a rough positioning method based on shape template matching and support vector machine is proposed. Firstly

the template with mask is established

and then it is based on shape template matching that the matching process is accelerated by an early termination strategy

image pyramid and reducing search area. After extracting the histogram features of oriented gradient from matching results

the classification is carried out based on support vector machine to prevent mismatching. In the fine positioning stage

an edge detection algorithm with angle constraints is proposed to accurately locate the edge of the outer contour. The sub-pixel edge positioning is realized by using a quadratic function to fit the maximum gradient

and the least square method is used to the contour edge to locate the machining location of microholes. In the experimental stage

the SVM is trained with a small number of samples

and the accuracy reaches 99.76%. On this basis

the intersection of union of the proposed coarse positioning method reaches 82.9%

while that of the traditional template matching method is only 36.5%. The fine positioning experiment is carried out by placing the bonding wedges in different positions with different postures and adding Gaussian noise under different light intensities. The maximum positioning error of the proposed fine positioning method is 2.20 microns

while the maximum positioning error based on Canny edge detection method is 5.99 microns. The proposed whole algorithm only takes 328 ms.

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references

文泽海, 卢茜, 伍艺龙, 等. 引线键合楔形劈刀及劈刀老化现象研究 [J]. 电子工艺技术, 2019, 40(1): 8-10, 16.

WEN Zehai, LU Qian, WU Yilong, et al. Research of bonding wedge and its degradation phenomenon [J]. Electronics Process Technology, 2019, 40(1): 8-10, 16.

宫在磊, 王秀峰, 王莉丽. 微电子领域中陶瓷劈刀研究与应用进展 [J]. 材料导报, 2015, 29(17): 89-94, 105.

GONG Zailei, WANG Xiufeng, WANG Lili. Research progress on bonding capillary in microelectronics [J]. Materials Review, 2015, 29(17): 89-94, 105.

WANG Yu, WU Zhiheng, DUAN Xianyun, et al. An micro head positioning slot recognition detection system based on machine vision [J]. IOP Conference Series: Materials Science and Engineering, 2019, 677(4): 042075.

BOCHKOVSKIY A, WANG C Y, LIAO H Y M. YOLOv4: optimal speed and accuracy of object detection [J]. ArXiv Preprint ArXiv, 2020: 10934.

GAO Hua, HU Chao. A new approach of template matching and localization based on the guidance of feature points [C]∥2018 IEEE International Conference on Information and Automation(ICIA). Piscataway, NJ, USA: IEEE, 2018: 548-553.

李德龙, 龚时华, 王子悦, 等. 基于视觉伺服的LED芯片形状匹配算法研究 [J]. 计算机工程与应用, 2018, 54(12): 146-151.

LI Delong, GONG Shihua, WANG Ziyue, et al. Research on shape matching algorithm of LED chip based on visual servoing [J]. Computer Engineering and Applications, 2018, 54(12): 146-151.

ZHAO Zhongqiu, ZHENG Peng, XU Shoutao, et al. Object detection with deep learning: a review [J]. IEEE Transactions on Neural Networks and Learning Systems, 2019, 30(11): 3212-3232.

ZHU Jie, CHEN Zhiqian. Real time face detection system using adaboost and haar-like features [C]∥2015 2nd International Conference on Information Science and Control Engineering. Piscataway, NJ, USA: IEEE, 2015: 404-407.

WANG Zhengbo, MA Xing, MU Chunyang, et al. Research on adhesive workpiece recognition and positioning based on machine vision [C]∥Proceedings of the 2019 4th International Conference on Automation, Control and Robotics Engineering. New York, USA: ACM, 2019: 5.

OWOTOGBE J S, IBIYEMI T S, ADU B A. Edge detection techniques on digital images: a review [J]. International Journal of Science and Research, 2019, 4(11): 329-332.

吕红阳, 陈立国, 仲丁元, 等. 基于双显微视觉的光刻版位姿定位算法 [J]. 科学技术与工程, 2020, 20(32): 13295-13301.

LÜ Hongyang, CHEN Liguo, ZHONG Dingyuan, et al. Positioning algorithm of lithographic mask posture based on binocular micro-vision [J]. Science Technology and Engineering, 2020, 20(32): 13295-13301.

赵振民, 彭国华, 符立梅. 基于形状模板的快速高精度可靠图像匹配 [J]. 计算机应用, 2010, 30(2): 441-444.

ZHAO Zhenmin, PENG Guohua, FU Limei. Fast high-precision reliable image matching algorithm based on shape [J]. Journal of Computer Applications, 2010, 30(2): 441-444.

张秀珍, 吴贵芳, 普杰信, 等. 基于模板匹配的彩色印品套印偏差检测方法 [J]. 计算机仿真, 2015, 32(10): 250-253, 403.

ZHANG Xiuzhen, WU Guifang, PU Jiexin, et al. A method for color overprint deviation inspect based on template matching [J]. Computer Simulation, 2015, 32(10): 250-253, 403.

郑遂, 瑚琦, 高鹏飞, 等. 基于直方图凹度分析的印刷网点图二值化算法研究 [J]. 光学仪器, 2013, 35(2): 32-36.

ZHENG Sui, HU Qi, GAO Pengfei, et al. Research on print dot image binarization based on histogram concavity analysis [J]. Optical Instruments, 2013, 35(2): 32-36.

GONZALEZ R C. WOODS R E. 数字图像处理 [M]. 3版. 阮秋琦, 阮宇智, 译. 北京: 电子工业出版社, 2020: 470-473.

SUGIANA A, APRILLIA B S, RIFQI M N. Detection of level crossing barriers using the histogram of oriented gradients method and support vector machine [J]. IOP Conference Series: Materials Science and Engineering, 2020, 830: 032043.

CHANDRA M A, BEDI S S. Survey on SVM and their application in image classification [J/OL]. International Journal of Information Technology, http:∥doi.org/10.1007/s41870-017-0080-1.pdf.

MENG Yingchao, ZHANG Zhongping, YIN Huaqiang, et al. Automatic detection of particle size distribution by image analysis based on local adaptive Canny edge detection and modified circular Hough transform [J]. Micron, 2018, 106: 34-41.

WU Zhen, CHEN Fan, LIANG Guoyuan, et al. Accurate localization of defective circular PCB mark based on sub-pixel edge detection and least square fitting [C]∥2019 IEEE 8th Data Driven Control and Learning Systems Conference(DDCLS). Piscataway, NJ, USA: IEEE, 2019: 465-470.

VON GIOI R G, RANDALL G. A sub-pixel edge detector: an implementation of the Canny/Devernay algorithm [J]. Image Processing on Line, 2017, 7: 347-372.

郑行家, 钟宝江. 图像直线段检测算法综述与测评 [J]. 计算机工程与应用, 2019, 55(17): 9-19.

ZHENG Hangjia, ZHONG Baojiang. Overview and evaluation of image straight line segment detection algorithms [J]. Computer Engineering and Applications, 2019, 55(17): 9-19.

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