Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage

doi:10.7652/xjtuxb201711010

您当前的位置：

首页 >

文章列表页 >

Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage

更新时间：2025-07-09

- Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage
- Vol. 51, Issue 11, Pages: 63-70+143(2017)
- 作者机构：
  
  北京工业大学先进制造技术北京市重点实验室,北京,100124
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb201711010
  CLC： TH16
- Online First：10 November 2017，
  
  Published：2017
- 稿件说明：
移动端阅览
Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage[J]. 2017, 51(11): 63-70+143.
DOI：

Research on the Influences of Slip and Viscosity of Gas on the Performance of Air-Bearing Stage[J]. 2017, 51(11): 63-70+143. DOI： 10.7652/xjtuxb201711010.

摘要

针对超精密气浮工作台内部微小间隙气体的性能展开研究

实现了微尺度下气体滑移及黏度对气浮工作台性能影响的分析。基于气体润滑理论和微尺度下气体滑移和黏度的研究

实现了气浮工作台内气膜流态模型的修正

利用有限差分法给出了雷诺方程的数值求解过程; 通过求解修正模型

分析不同供气压强和气膜间隙下

滑移和黏度对气浮工作台性能影响的机理。研究结果表明:气体滑移和黏度会引起气浮工作台承载力的降低和气膜刚度的增大

但不会改变供气压强和气膜间隙对工作台的影响趋势

只是影响程度发生改变

当同时考虑滑移和黏度时

承载力比忽略时降低最多(约为21.95%)

最大刚度比忽略时提升最大(约为15%)。滑移和黏度的存在使得气浮工作台的实际性能最优参数小于理想的最优性能参数

最优气膜间隙由原来的10 μm变为6 μm。最后

通过试验验证发现

同时考虑气体滑移和黏度时

气浮工作台的性能最接近实际工况

承载力的仿真曲线与试验曲线最吻合

刚度的试验值与仿真值的误差约为9.59%。

Abstract

Based on the study on the performance of gas in an ultra-precision air bearing stage

the effects of velocity slip and viscosity at micro scale on the performance of air-bearing stage are studied. The modified film flow model was established by the theory of gas lubrication and the research of slip and viscosity in micro scale. The numerical solution of the Reynolds equation is obtained by the finite difference method. The influences of slip and viscosity on performance of air-bearing stage at different gas supply pressures and gas film clearances are analyzed by solving Reynolds equations. The result shows that the loading capacity is smaller and the stiffness is larger when considering the slip and viscosity

while the influencing trend of gas supply pressure and gas film clearance on the air bearing stage is kept the same

only the degrees of change are affected. When the slip and viscosity are taken into account at the same time

the loading capacity is decreased by 21.95%

and the maximum stiffness is increased by 15%. The optimum performance parameters of the air bearing stage are less than the ideal optimum performance parameters when slip and viscosity are considered. The optimum gas film clearance is changed from the original 10 μm to 6 μm. Finally

the test results showed that when the slip and viscosity are considered at the same time

the stiffness of the air bearing stage is close to the actual working condition. The simulation curve of the loading capacity is in good agreement with the test curve

and the average error between the test and simulation values is about 9.59%.

关键词

Keywords

references

叶树亮, 李东升. 应用有限体积法研究空气静压导轨力学特性 [J]. 光学精密工程, 2008, 16(5): 809-814.

YE Shuliang, LI Dongsheng. Study on mechanical characteristics of aerostatic bearing with finite volume method [J]. Optics and Precision Engineering, 2008, 16(5): 809-814.

BIRD G A. Molecular gas dynamics and the direct simulation of gas flows [M]. Oxford, Britain: Clarendon Press, 2003: 23-30.

BURGDORFER A. The influence of the molecular mean free path on the performance of hydrodynamics gas lubricated bearing [J]. Basic Eng Trans ASME, 1959, 81: 94-99.

ROY S, RAJU R. Modeling gas flow through micro channels and nan pores [J]. Journal of Applied Physics, 2003, 93(8): 4870-4879.

MCHENLY M J, GALLIS M A, BOYD I D. Empirical slip and viscosity model performance for microscale gas flow [J]. International Journal for Numerical Methods in Fluids, 2005, 49(11): 1169-1191.

孙江龙, 吕续舰, 郭磊, 等. 微尺度流动研究的简要综述 [J]. 机械强度, 2010, 32(3): 502-508.

SUN Jianglong LV Xujian, GUO Lei, et al. Brief summarization of micro-scale flow research [J]. Journal of Mechanical Strength, 2010, 32(3): 502-508.

KENNARD E H. Kinetic theory of gases [M]. New York, USA: McGraw-Hill, 1938: 148-150.

张海军, 祝长生, 杨琴. 黏度效应对气体径向微轴承性能的影响 [J]. 中国电机工学报, 2009, 29(29): 84-88.

ZHANG Haijun, ZHU Changsheng, YANG Qin. Effect of effective viscosity on performance of micro gas journal bearings [J]. Proceeding of the CSEE, 2009, 29(29): 84-88.

宁方伟, 龙威, 公玲, 等. 稀薄条件下平板间润滑气膜内速度滑移现象分析 [J]. 机械强度, 2016, 38(186): 738-743.

NING Fangwei, LONG Wei, GONG Ling, et al. Analysis of velocity slip between flat in lubrication film under conditions of thin gas [J]. Journal of Mechanical Strength, 2016, 38(186): 738-743.

张文明, 孟光, 周健斌. 微机电系统压膜阻尼特性分析 [J]. 振动与冲击, 2006, 25(4): 41-45.

ZHANG Wenming, MENG Guang, ZHOU Jianbin. Damping analysis of MEMS film [J]. Journal of Vibration and Shock, 2006, 25(4): 41-45.

VEIJOLA T, KUISMA H, LAHDENPERA J, et al. Equivalent-circuit model of the squeezed gas film in a silicon accelerometer [J]. Sensors and Actuators: A, 1995, 48: 239-248.

杨琴, 刘宇陆, 张海军, 等. 气体稀薄效应对微机电系统(MEMS)气体轴承-转子系统不平衡响应的影响 [J]. 西安交通大学学报, 2015, 49(7): 134-139.

YANG Qin, LIU Yulu, ZHANG Haijun, et al. Influence of gas rarefaction effect on unbalance response of micro-electro-mechanical(MEMS)gas bearing-rotor system [J]. Journal of Xi'an Jiaotong University, 2015, 49(7): 134-139.

刘强, 张从鹏. 直线电机驱动的H型气浮工作台运动平台 [J]. 光学精密工程, 2007, 15(10): 1540-1546.

LIU Qiang, ZHANG Congpeng. H-type air-bearing motion state driven by linear motors [J]. Optics and Precision Engineering, 2007, 15(10): 1540-1546.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Rheological Properties of Mineral Oil and Nanoparticles Mixture

Influence of Emulsifier and Dispersed Phase on Viscosity of Emulsion

Contact Characters of Rolling Linear Guide Way Pair Under Heavy Load

Development of Density and Viscosity Measurement System by Microelectromechanical Systems Sensor

Analysis for Hydrodynamic Foil Thrust Bearings Considering Temperature Effects

Related Author

史琳 2

毕胜山 1

盛宏至 2

李海鹏 1

申琪 1

姚季 1

仝利娟 1

吴东垠 1

Related Institution

工程教育部重点实验室

School of Energy and Power Engineering, Xi'an Jiaotong University

College of Mechanical and Power Engineering, China Three Gorges University

Key Laboratory of Thermo-Fluid Science and Engineering of MOE, Xi 'an Jiaotong University

Key Laboratory of Thermal-Fluid Science and Engineering of MOE, Xi'an Jiaotong University

⁰