Influence of Gas Rarefaction Effect on Unbalance Response of Micro-Electro-Mechanical(MEMS)Gas Bearing-Rotor System

doi:10.7652/xjtuxb201507022

您当前的位置：

首页 >

文章列表页 >

Influence of Gas Rarefaction Effect on Unbalance Response of Micro-Electro-Mechanical(MEMS)Gas Bearing-Rotor System

更新时间：2025-07-09

- Influence of Gas Rarefaction Effect on Unbalance Response of Micro-Electro-Mechanical(MEMS)Gas Bearing-Rotor System
- Vol. 49, Issue 7, Pages: 134-139(2015)
- 作者机构：
  
  1. 上海大学应用数学与力学研究所,上海,200072
  2. 嘉兴学院数理与信息工程学院,浙江,嘉兴,314001
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb201507022
  CLC： TH117.2
- Online First：10 July 2015，
  
  Published：2015
- 稿件说明：
移动端阅览
Influence of Gas Rarefaction Effect on Unbalance Response of Micro-Electro-Mechanical(MEMS)Gas Bearing-Rotor System[J]. 2015, 49(7): 134-139.
DOI：

Influence of Gas Rarefaction Effect on Unbalance Response of Micro-Electro-Mechanical(MEMS)Gas Bearing-Rotor System[J]. 2015, 49(7): 134-139. DOI： 10.7652/xjtuxb201507022.

摘要

为研究气体稀薄效应对微机电系统(MEMS)气体轴承-转子系统不平衡响应的影响

给出了MEMS气体轴承-转子系统运动方程和MEMS气体轴承的雷诺方程; 利用双向隐式差分算法

给出了修正雷诺方程的详细数值求解过程; 将转子运动方程与雷诺方程相结合

采用4阶龙格-库塔方法计算分析了气体稀薄效应对气体轴承-转子系统不平衡响应的影响。研究结果显示

考虑气体稀薄效应后

当质量偏心距较大时

MEMS气体轴承-转子系统的失稳轴颈转速较大

表明合适的偏心质量有助于改善系统的稳定性; 在相同的质量偏心距下

考虑气体稀薄效应时气体轴承-转子系统在较低轴颈转速处出现峰值

表明此时不平衡偏心质量对气体轴承-转子系统运动的影响增大。

Abstract

To investigate the influence of gas rarefaction effect on the unbalance response of micro-electro-mechanical system(MEMS)gas bearing-rotor system

the motion equation of the MEMS bearing-rotor system and the Reynolds equation of MEMS gas bearing are presented

and the process of solving the modified Reynolds equation using the alternating-direction implicit difference method is given. The motion equation of the rotor and the modified Reynolds equation are combined

and the influence of gas rarefaction effect on the unbalance response of MEMS gas bearing-rotor system is analyzed using the 4th-order Rounge-Kutta method. The study shows that the stability speed of the journal of MEMS rotor system is higher with larger mass eccentricity when the gas rarefaction effect is considered

therefore

a proper eccentric mass of the rotor could improve the stability of MEMS gas bearing-rotor system. With the same eccentric mass

the peak value of unbalance response of MEMS gas bearing-rotor system emerged at the lower rotational speed

which shows that the unbalanced eccentric mass would have much influence on the motion of MEMS rotor system when the gas rarefaction effect is taken into account.

关键词

Keywords

references

EPSTEIN A H. Millimeter-scale, micro-electro-mechanical systems gas turbine engines [J]. ASME Journal of Engineering for Gas Turbines and Power, 2004, 126: 205-226.

孟光, 张文明. 微机电系统动力学 [M]. 北京: 科学出版社, 2008: 1-6.

ORR D J. Macroscale investigation of high speed gas bearing for MEMS devices [D]. Cambridge, USA: Massachusetts Institute of Technology, 2000.

PIEKOS E S. Numerical simulation of gas-lubricated journal bearings for microfabricated machines [D]. Cambridge, USA: Massachusetts Institute of Technology, 2000.

TEO C J. MEMS turbomachinery rotor-dynamics: modeling, design and testing [D]. Cambridge, USA: Massachusetts Institute of Technology, 2006.

LIU L X. Theory for hydrostatic gas journal bearings for micro-electro-mechanical systems [D]. Cambridge, USA: Massachusetts Institute of Technology, 2005.

LEE Y, KWAK H, KIM C, et al. Numerical prediction of slip flow effect on gas-lubricated journal bearings for MEMS/MST-based micro-rotating machinery [J]. Tribology International, 2005, 38: 89-96.

ZHANG Wenming, ZHOU Jianbin, MENG Guang. Performance and stability analysis of gas-lubricated journal bearings in MEMS [J]. Tribology International, 2011, 44: 887-897.

黄海, 孟光, 赵三星. 二阶滑移边界对微型气浮轴承稳态性能的影响 [J]. 力学学报, 2006, 38(5): 668-673.

HUANG Hai, MENG Guang, ZHAO Sanxing. The effects of second-order slip-flow on the steady performance of micro gas bearing [J]. Chinese Journal of Theoretical and Applied Mechanics, 2006, 38(5): 668-673.

ZHANG Xiaoqing, WANG Xiaoli, LIU Ren, et al. Influence of temperature on nonlinear dynamic characteristics of spiral-grooved gas-lubricated thrust bearing-rotor systems for microengine [J]. Tribology International, 2013, 61: 138-143.

ZHANG Xiaoqing, WANG Xiaoli, ZHANG Yuyan. Non-linear dynamic analysis of the ultra-short micro gas journal bearing-rotor systems considering viscous friction effects [J]. Nonlinear Dynamics, 2013, 73: 751-765.

刘韧, 王晓力. 微气体螺旋槽推力轴承润滑数值模拟 [J]. 机械工程学报, 2010, 46(21): 113-117.

LIU Ren, WANG Xiaoli. Numerical predication of the performance of micro gas lubricated spiral groove thrust bearing [J]. Journal of Mechanical Engineering, 2010, 46(21): 113-117.

张海军, 祝长生, 杨琴. 基于稀薄效应的微气体径向轴承稳态性能 [J]. 力学学报, 2009, 41(6): 941-946.

ZHANG Haijun, ZHU Changsheng, YANG Qin. Steady characteristics of micro gas journal bearings based on rarefaction effect [J]. Chinese Journal of Theoretical and Applied Mechanics, 2009, 41(6): 941-946.

ZHANG Haijun, ZHU Changsheng, TANG Ming. The effects of rarefaction on the characteristics of micro gas journal bearings [J]. Journal of Zhejiang University: Science, 2010, 10(5): 43-49.

谢友柏, 汤玉娣. 具有非线性油膜力的滑动轴承-转子系统振动特性的研究 [J]. 西安交通大学学报, 1987, 21(6): 93-104.

XIE Youbai, TANG Yudi. Influence of non-linearity of hydrodynamic oil film forces on vibration characteristics of a journal bearing-rotor system [J]. Journal of Xi'an Jiaotong University, 1987, 21(6): 93-104.

袁小阳, 朱均. 不平衡转子-滑动轴承系统稳定性的非线性研究 [J]. 振动与冲击, 1996, 15(1): 71-76.

YUAN Xiaoyang, ZHU Jun. Study on the non-linear stability of unbalanced rotor bearing systems [J]. Journal of Vibration and Shock, 1996, 15(1): 71-76.

MENG Guang, ZHANG Wenming, HUANG Hai, et al. Micro-rotor dynamics for micro-electro-mechanical systems(MEMS)[J]. Chaos, Solitons and Fractals, 2009, 40: 538-562.

BURGDORFER A. The influence of the molecular mean free path on the performance of hydrodynamic gas lubricated bearings [J]. Journal of Basic Engineering, 1959, 81(1): 94-100.

WU L, BOGY D B. New first and second order slip models for the compressible Reynolds equations [J]. ASME Journal of Tribology, 2003, 125(3): 558-561.

王兴波, 钟志华. 求解周期性三对角方程组的广义Thomas 算法 [J]. 计算力学学报, 2004, 21(1): 73-76.

WANG Xingbo, ZHONG Zhihua. Generalized Thomas algorithm for solving cyclic tridiagonal equations [J]. Chinese Journal of Computational Mechanics, 2004, 21(1): 73-76.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Transfer Function Method for Suppressing of Unbalance Response of Rotor-Bearing System

Knowledge Graph Representation Learning Driven by Semantic Discrimination and Subgraph Integration

Numerical Simulation of Heat-Moisture Barrier Performance of a Horizontal Air Curtain in Cold Storage

Influence of Structural Parameters on the Summer Operational Characteristics of a Three-Tower-in-One Indirect Air-Cooling System

Study on the Thermodynamic Properties in the Anomalous Region of Supercritical Water

Related Author

李昊

陈淑江

马金奎

路长厚

Related Institution

School of Mechanical Engineering, Shandong University

⁰