On-Line Precise Measurement Principle and System for Deep-Hole Diameter

doi:10.7652/xjtuxb201501011

您当前的位置：

首页 >

文章列表页 >

On-Line Precise Measurement Principle and System for Deep-Hole Diameter

更新时间：2025-07-09

- On-Line Precise Measurement Principle and System for Deep-Hole Diameter
- Vol. 49, Issue 1, Pages: 65-71(2015)
- 作者机构：
  
  浙江大学流体动力与机电系统国家重点实验室,杭州,310027
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb201501011
  CLC： TH135;TH822
- Online First：10 January 2015，
  
  Published：2015
- 稿件说明：
移动端阅览
On-Line Precise Measurement Principle and System for Deep-Hole Diameter[J]. 2015, 49(1): 65-71.
DOI：

On-Line Precise Measurement Principle and System for Deep-Hole Diameter[J]. 2015, 49(1): 65-71. DOI： 10.7652/xjtuxb201501011.

摘要

针对深孔零件内径测量精度要求高、测量空间受限的问题

利用机械测量转换机构和电感位移传感器

研制了一种深孔内径在线精密测量装置。首先对测量转换机构进行力学分析

推导出影响该机构测量精度的主要因素

然后提出一种针对该装置系统的误差补偿方法

并搭建了在线测量平台

最后将测量装置安装在自动化生产线上

在工作状态下对某已标定深孔内径尺寸的工件进行多次重复测量实验

根据六西格玛理论对该测量系统进行统计学分析。分析结果表明:为了提高系统的测量精度和动态特性

转换机构设计时应该选择较大的刚性比和合理的簧片高度

以保证较小的寄生转角和较大的固有频率。实验结果表明:测量系统偏倚为0.02 μm

测量极差为2 μm

测量精度为3 μm。该装置具有结构简单、测量精度高的优点

能够满足深孔内径在线测量要求。

Abstract

Considering the requirement on the high-precision measurement of deep-hole diameter with limited measuring space

a precise on-line measurement device for deep-hole diameter was designed using the mechanical measurement transformation mechanism and the inductive displacement transducer. First

the mechanics analysis of the measurement transformation mechanism was performed and the main factors affecting the measuring accuracy were deduced. Then

a method of systemic error compensation for the device was proposed

and the on-line measurement platform was set up. Finally

the measurement device was installed on the automatic production line

and the measuring experiments were carried out repeatedly to measure the calibrated inner hole diameter of a workpiece. The statistical analysis of the measurement system was performed based on the theory of Six Sigma. The analysis results suggest that in order to improve the measuring accuracy and dynamic performance of the system

a larger rigid ratio and a reasonable reed height should be chosen to ensure a smaller parasitic rotation and a higher natural frequency when the transformation mechanism is designed. The experimental results suggest that the system bias is 0.02 μm

the range is 2 μm and the measuring accuracy is 3 μm. The device has the advantage of simple structure and high precision

which meets the requirements of on-line measurement of deep-hole diameter.

关键词

Keywords

references

MA Y Z, YU Y X, WANG X H. Diameter measuring technique based on capacitive probe for deep hole or oblique hole monitoring [J]. Measurement, 2014, 47: 42-44.

SHAHABI H H, RATNAM M M. Assessment of flank wear and nose radius wear from workpiece roughness profile in turning operation using machine vision [J]. International Journal of Advanced Manu-facturing Technology, 2009, 43(1/2): 11-21.

裘祖荣, 陈浩玉, 胡文川, 等. 基于嵌入式的角度视觉检测及误差补偿 [J]. 光学精密工程, 2013, 21(10): 2480-2487.

QIU Zurong, CHEN Haoyu, HU Wenchuan, et al. Embedded angle vision inspection and error compensation for line structured lights [J]. Opt Precision Eng, 2013, 21(10): 2480-2487.

RIBY A B, PRASHANT S, SONAKAR M, et al. Identification of defects on highly reflective ring components and analysis using machine vision [J]. International Journal of Advanced Manufacturing Technology, 2011, 52(1/2/3/4): 217-233.

YU Y X, ZHANG H, WANG Z C, et al. Deep-hole inner diameter measuring system based on non-contact capacitance sensor [J]. Transactions of Tianjin University, 2010, 16(6): 447-451.

叶树亮, 谭久彬. 基于动态阿贝原则的高精度激光深孔内径测量 [J]. 光电子·激光, 2008, 8(15): 971-974.

YE S L, TAN J B. High precision laser deep hole diameter measurement based on dynamic Abbe's prin-ciple [J]. Journal of Optoelectronics·Laser, 2008, 8(15): 971-974.

王家贵, 李林峰. 基于迈克尔逊干涉原理的孔径测量及装置设计 [J]. 工具技术, 2013, 47(4): 58-60.

WANG Jiagui, LI Linfeng. Aperture measurement which based on Michelson interference principle and design of device [J]. Tool Engineering, 2013, 47(4): 58-60.

STONE J, MURALIKRISHNAN B. Geometric effects when measuring small holes with micro contact probes [J]. Journal of Research of the National Institute of Standards and Technology, 2011, 116(2): 573-587.

HRIOSHI M, AKIO K, HIROMICHI O. Development of a system for measuring micro hole accuracy using an optical fiber probe [J]. Journal of Advanced Mechanical Design, Systems and Manufacturing, 2010, 4(5): 995-1004.

刘宇, 段耀宇, 刘利, 等. 悬臂梁陀螺仪机械性能优化及系统实现 [J]. 光学精密工程, 2012, 20(9): 2051-2059.

LIU Yu, DUAN Yaoyu, LIU Li, et al. Mechanical performance optimization and system implementation of cantilever beam gyroscope [J]. Opt Precision Eng, 2012, 20(9): 2051-2059.

赵立波, 徐龙起, 热合曼艾比布力, 等. 矩形微悬臂梁的流固耦合谐振频率分析 [J]. 西安交通大学学报, 2013, 47(11): 60-64.

ZHAO Libo, XU Longqi, RAHMAN Hebibul, et al. Resonant frequency of the rectangular micro-cantilever in fluid-structure interaction [J]. Journal of Xi'an Jiaotong University, 2013, 47(11): 60-64.

乔龙学, 王伟刚, 何姗. 双悬臂梁直径测量传感器性能分析 [J]. 浙江大学学报: 工学版, 2012, 46(6): 1060-1066.

QIAO Longxue, WANG Weigang, HE Shan. Perfor-mance analysis on twin-cantilever transducer for measuring diameter [J]. Journal of Zhejiang University: Engineering Science, 2012, 46(6): 1060-1066.

崔岩, 张吕权, 夏劲松, 等. 压电微悬臂梁探针的制作工艺研究 [J]. 西安交通大学学报, 2011, 45(1): 79-82.

CUI Yan, ZHANG Lvquan, XIA Jinsong, et al. Fabrication of novel piezoelectric microcantilever probe [J]. Journal of Xi'an Jiaotong University, 2011, 45(1): 79-82.

闫晓鹏, 武瑛. 材料力学 [M]. 北京: 清华大学出版社, 2013.

MURANAKA Y, INABA M, ASANO T, et al. Parasitic rotation in parallel spring movements [J]. Int J Jpn Soc Pre Eng, 1991, 25(3): 208-213.

王立成, 黄兴达, 丁汉. 原位检测系统中触发式测头的误差分析与补偿 [J]. 中国机械工程, 2012, 23(15): 1774-1778.

WANG Licheng, HUANG Xinda, DING Han. Error analysis and compensation for touch trigger probe of on-machine measurement system [J]. China Mechanical Engineering, 2012, 23(15): 1774-1778.

马逢时, 周暐, 刘传冰. 六西格玛管理统计指南 [M]. 北京: 中国人民大学出版社, 2013.

李朝辉,王昭,黄军辉,等.滚转角测量中直角棱镜相位损失及解决方法.2014,48(9):112-116.[doi:10.7652/xjtuxb2014 09019]

彭希锋,王玲,杨文剑,等.自适应优化控制的人工髋关节磨损三坐标测量及评估方法.2014,48(8):128-135.[doi:10.7652/xjtuxb201408022]

俞珏,庄健,于德弘.采用李雅普诺夫函数的电液伺服系统反馈线性化控制.2014,48(7):71-76.[doi:10.7652/xjtuxb 201407013]

杨军,施虎,梅雪松,等.双驱伺服进给系统热误差的试验测量与预测模型构建.2013,47(11):53-59.[doi:10.7652/xjtuxb201311010]

曹建安,张乐平,吴昊,等.采用倾角传感器实现空间旋转角度测量的解析方法研究.2013,47(10):109-114.[doi:10.7652/xjtuxb201310019]

吕涛,刘志刚,邓忠文,等.一种光纤组量程扩增的激光频率扫描干涉绝对测距系统.2013,47(9):77-82.[doi:10.7652/xjtuxb201309013]

钟丽红,王昭,汤善治,等.机床滚转角测量中敏感元件倾斜引起的误差分析.2013,47(5):99-103.[doi:10.7652/xjtuxb 201305018]

邓玉芬,郭俊杰,王金栋,等.激光跟踪仪在重型车床几何精度检测中的应用.2013,47(1):74-79.[doi:10.7652/xjtuxb 201301015]

韩有昂,张英杰,喻明让.一种有向投影的测量数据刀具轨迹生成技术.2011,45(9):11-14.[doi:10.7652/xjtuxb2011 09003]

张维光,赵宏.线结构光多传感器三维测量系统误差校正方法.2011,45(6):75-80.[doi:10.7652/xjtuxb201106014]

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Configuration Design and Stiffness Characteristics Analysis of Metamorphic Hybrid Robot Arm Mechanism

Estimating Dynamic Stiffness of Coordinate Measuring Machine for Compensation of Acceleration Error

Compensation of Friction Error for X-Y Table

Errors Compensation Method for Multi-Linear Structured Light Sensor

Error Analysis and Compensation of Linear Structured Light Scanning Probes

Related Author

LIU Rongqiang

GUO Hongwei

KOU Ziming

SHI Chuang

ZHANG Jing

WANG Qiaochu

郭俊杰 1

Related Institution

School of Mechanical Engineering, Taiyuan University of Technology

School of Mechanical Engineering, Yanshan University

Hebei Innovation Center for Equipment Light Weight Design and Manufacturing

School of Mechatronics Engineering, Harbin Institute of Technology

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University

⁰