当驱动电压峰峰值为560 V、振动频率为183.74 Hz、吸液周期为0.4 s、排液周期为0.1 s
背压为0.3 kPa时
去离子水输出流量为6.12 mL/min。得到的实验数据证明了脉动离心隔膜压电泵的有效性。
Abstract
A pulsed centrifugal diaphragm piezoelectric pump is introduced to effectively coordinate the high frequency characteristics of piezoelectric materials and low frequency characteristics of check valves in conventional piezoelectric pumps. The centrifugal force in the swing motion of a vibrating tube is utilized to drive liquid within the tube to flow
and the diaphragm in the pump chamber is deformed
so that the volume of the pump chamber is changed and liquid delivery is completed by check valves. The working principle of the pump is explained
and a dynamic model for the driving part of the pump is established to study its dynamic characters such as resonant frequency
vibrating mode shape
centrifugal force and calculation expression of vibrating amplitude limit. A prototype pump is fabricated to measure its characters including admittance
pulsation
flow rate and backpressure
and to verify the correctness of theoretic analyzes. Experimental results show that the pump can precisely hold and discharge the volume of liquid in every pulse
and can pump deionized water at a flow rate of 6.12 ml/min under a backpressure of 0.3 kPa with driving voltages of 560 V
vibrating frequency of 183.74 Hz
absorbing period of 0.4 s and dispensing period of 0.1 s. The experimental results validate the effectiveness of the pulsed centrifugal diaphragm piezoelectric pump.
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references
ACCOTO D, CARROZZA M C, DARIO P. Modelling of micropumps using unimorph piezoelectric actuator and ball valves[J]. Journal of Micromechanics and Microengineering, 2000, 10(2): 277-281.
ZHANG Zhonghua, KAN Junwu, WANG Shuyun, et al. Flow rate self-sensing of a pump with double piezoelectric actuators[J]. Mechanical Systems and Signal Processing, 2013, 41(1/2): 639-648.
CHENG C H, TSENG Y P. Characteristic studies of the piezoelectrically actuated micropump with check valve[J]. Microsystem Technology, 2013(19): 1707-1715.
LEE D G, OR S W, CARMAN G P. Design of a piezoelectric-hydraulic pump with active valves[J]. Journal of Intelligent Material Systems and Structures, 2004, 15(2): 107-116.
DOLL A, WISCHKE M, SCHRAG H J, et al. Characterization of active silicon microvalves with piezoelectric membrane actuators[J]. Microelectronic Engineering, 2007, 84(5/6/7/8): 1202-1206.
SEONG M, MOHANCHANDRA K P, LIN Y, et al. Development of a high flow-rate/high operating frequency nitinol MEMS valve[C]∥Proceedings of the Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems. Bellingham, Washington, USA: SPIE, 2008: 69322F.
CARDENAS A M, DLUTOWSKI J, BUMGARNER J, et al. Development of various designs of low-power MEMS valves for fluidic applications[J]. Sensors and Actuators: A, 2007, 136(1): 374-384.
MA Yuting, KONG Fanrang, PAN Chengliang, et al. Miniature tubular centrifugal piezoelectric pump utilizing wobbling motion[J]. Sensors and Actuators: A, 2010, 157(2): 322-327.
CUI Can, JIANG Han, LI Yinghui. Semi-analytical method for calculating vibration characteristics of variable cross-section beam[J]. Journal of Vibration and Shock, 2012, 31(14): 85-88.