Multi-Flexure Piezoresistive Accelerometer for Vibration Detection

doi:10.7652/xjtuxb201308006

您当前的位置：

首页 >

文章列表页 >

Multi-Flexure Piezoresistive Accelerometer for Vibration Detection

更新时间：2025-05-08

- Multi-Flexure Piezoresistive Accelerometer for Vibration Detection
- Vol. 47, Issue 8, Pages: 33-37(2013)
- 作者机构：
  
  西安交通大学机械制造系统工程国家重点实验室,西安,710049
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb201308006
  CLC： TP212
- Online First：10 August 2013，
  
  Published：2013
- 稿件说明：
移动端阅览
Multi-Flexure Piezoresistive Accelerometer for Vibration Detection[J]. 2013, 47(8): 33-37.
DOI：

Multi-Flexure Piezoresistive Accelerometer for Vibration Detection[J]. 2013, 47(8): 33-37. DOI： 10.7652/xjtuxb201308006.

摘要

为满足制造装备智能化发展对测振传感器的需求

针对常见加速度传感器在性能、成本和微型化上的不足

研制了一种基于微机电系统技术的多梁结构压阻式加速度传感器。通过将2根短小敏感梁引入传统双桥结构的方式

在提升固有频率的同时

保证了传感器仍具有较高的测量灵敏度。利用敏感梁上的最大应力和结构固有频率相乘的结果作为性能评价标准

结合梁变形理论和实际工艺条件确定了传感器的结构尺寸。采用硅材料刻蚀、硼离子注入、溅射金属铝及阳极键合等工艺

制作了传感器芯片。实验结果表明

所研制的加速度传感器能够准确测量不同频率下的加速度信号

在每g下的灵敏度达到了0.544 mV

满量程精度达到了1.76%

固有频率达到了13.61 kHz

相对于双桥结构传感器

其综合性能提升了近85%。

Abstract

To meet the requirements for vibration detection sensor in intelligent manufacturing and overcome shortcomings in the existing accelerometers including unsatisfactory performances

higher cost and bulky volume

a multi-flexure piezoresistive accelerometer is developed based on micro-electro-mechanical system(MEMS)technology. The proposed accelerometer introduces two tiny beams into the conventional quad-beam structure

which enhances the accelerometer's natural frequency without decreasing the sensitivity. The product of natural frequency and sensitivity is regarded as the evaluation factor to determine the sensor structural dimensions

considering the constraints form analytical optimization and manufacturing process. The sensor chip is fabricated by silicon etching

boron implantation

Al sputtering and anodic bonding. The experimental results show that the developed accelerometer possesses a sensitivity of 0.544 mV per gravity acceleration

a full scale accuracy of 1.76% and natural frequency of 13.61 kHz

and can accurately acquire the acceleration signal with different frequencies. Compared with the conventional quad-beam sensor

the comprehensive property of the proposed multi-flexure accelerometer is improved by 85%.

关键词

Keywords

references

中华人民共和国科学技术部. 智能制造科技发展十二五专项规划 [DB/OL]. [2012-10-15]. http:∥www.gov.cn/gzd t/att/att/site1/20120424/001e3741a47411 0045d901.pdf.

VOGL A, WANG D T, STORÅS P, et al. Design process and characterisation of a high-performance vibration sensor for wireless condition monitoring [J]. Sensors and Actuators: A Physical, 2009,153(2):155-161.

ALBARBAR A, MEKID S, STARR A, et al. Suitability of MEMS accelerometers for condition monitoring:an experimental study [J]. Sensors, 2008,8(2):784-799.

LIU Jun, SHI Yunbo, LI Ping, et al. Experimental study on the package of high-g accelerometer [J]. Sensors and Actuators: A Physical, 2012,173(1):1-8.

SANKAR A R, JENCY J G, DAS S. Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures [J]. Microsystem Technologies, 2012,18(1):9-23.

赵立波,赵玉龙,蒋庄德. 特种压阻式加速度传感器的研制 [J]. 西安交通大学学报, 2006,40(9):1049-1052.

ZHAO Libo, ZHAO Yulong, JIANG Zhuangde. Research on special piezoresistive acceleration sensor [J]. Journal of Xi'an Jiaotong University, 2006,40(9):1049-1052.

YAZDI N, AYAZI F, NAJAFI K. Micromachined inertial sensors [J]. Proceedings of the IEEE, 1998,86(8):1640-1659.

吴迪,谢贵久,金忠,等. SOI压力传感器的灵敏度优化设计 [J]. 传感技术学报, 2012,25(8):1064-1068.

WU Di, XIE Guijiu, JIN Zhong, et al. Design optimization for the sensitivity of SOI pressure sensor [J]. Chinese Journal of Sensors and Actuators, 2012,25(8):1064-1068.

吴成军. 工程振动与控制 [M]. 西安:西安交通大学出版社, 2008:47-83.

BAO Minhang. Micro mechanical transducers: pressure sensors,accelerometers and gyroscopes [M]. Amsterdam,Netherlands: Elsevier, 2000:295-306.

赵立波,赵玉龙,方续东,等. 耐高温硅隔离压阻力敏芯片的研究 [J]. 西安交通大学学报, 2010,44(9):59-63.

ZHAO Libo, ZHAO Yulong, FANG Xudong, et al. High temperature silicon-on-insulator piezoresistive pressure sensitive chip [J]. Journal of Xi'an Jiaotong University, 2010,44(9):59-63.

ZHAO Yulong, SUN Lu, LIU Yan, et al. Incorporation of the stress concentration slots into the flexures for a high-performance microaccelerometer [J]. Review of Scientific Instruments, 2012,83(7):0750021-0750027.

秦会峰,孟庆森,宋永刚,等. 硼硅玻璃与硅阳极键合界面形成机理分析 [J]. 功能材料, 2006,37(9):1369-1371.

QIN Huifeng, MENG Qingsen, SONG Yonggang, et al. The mechanisms of anodic bonding between borosilicate glass and silicon [J]. Journal of Functional Materials, 2006,37(9):1369-1371.

李科杰. 新编传感器技术手册 [M]. 北京:国防工业出版社, 2002:59-77.

LI Yuefa, ZHENG Qinglong, HU Yating, et al. Micromachined piezoresistive accelerometers based on an asymmetrically gapped cantilever [J]. Journal of Microelectromechanical Systems, 2011,20(1):83-94.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Research on Inherent Characteristics and Sensitivities of Planetary Gear Transmission

Multi-Objective Assembly Performance Oriented Optimization of Vertical Cable Pretension in Large Deployable Mesh Antenna

Design for Micro-Electro-Mechanical Systems Devices Based on Three-Dimensional Features

Gamma Sensitivities of Compton Detector with Relatively Permanent Vacuum Atmosphere

Analog Circuit Fault Diagnosis with Multi-Objective Particle Swarm Optimization

Related Author

周建星 1

孙文磊 1

陶庆 1

ZHAO Qiangqiang

HONG Jun

He Yayin

ZHU Jialong

Related Institution

School of Mechanical Engineering, Xinjiang University

China Academy of Space Technology, Xi'an Branch

Key Laboratory of Modern Design and Rotor-Bearing System (Ministry of Education),School of Mechanical Engineering ,Xi’an Jiaotong University

School of Mechanical and Electrical Engineering, Xi'an Technological University

Northwest Institute of Nuclear Technology

⁰