Design for Micro-Electro-Mechanical Systems Devices Based on Three-Dimensional Features

张长富 1; 2; 蒋庄德 1; 卢德江 1; 任泰安 1; 王久洪 1

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Design for Micro-Electro-Mechanical Systems Devices Based on Three-Dimensional Features

更新时间：2025-12-08

- Design for Micro-Electro-Mechanical Systems Devices Based on Three-Dimensional Features
- Vol. 41, Issue 5, Pages: 571-575(2007)
- 作者机构：
  
  1. 西安交通大学机械制造系统工程国家重点实验室,西安,710049
  2. 西安工业大学机电工程学院,西安,710032
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP391.73
- Online First：10 May 2007，
  
  Published：2007
- 稿件说明：
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张长富 1, 2, 蒋庄德 1, et al. Design for Micro-Electro-Mechanical Systems Devices Based on Three-Dimensional Features[J]. 2007, 41(5): 571-575.
DOI：

张长富 1, 2, 蒋庄德 1, et al. Design for Micro-Electro-Mechanical Systems Devices Based on Three-Dimensional Features[J]. 2007, 41(5): 571-575. DOI：

摘要

提出了一种表面硅微器件结构设计方法

解决了目前微机电系统(MEMS)结构设计中直观性差、工艺难度大等问题.该方法将三维特征建模的设计思想运用到MEMS设计中

在建立三维特征库的基础上实现了器件结构的快速直观设计.通过三维设计软件SolidWorks的用户接口开发的应用程序不仅实现了从器件结构中自动提取掩膜版和工艺流程

而且消除了人工设计掩膜版和工艺流程的繁琐过程.应用实例表明

与传统的通过掩膜版设计MEMS器件结构的方法相比

该方法简洁、高效

更符合设计者所看即所得的思维方式.同时

SolidWorks软件作为开发MEMS辅助设计工具的基础平台

可以省去开发几何造型模块的任务

从而为新一代MEMS辅助设计工具的开发提供了新的思路.

Abstract

To improve straightforwardness and reduce process complexity of micro-electro-mechanical systems(MEMS)design

a new design scheme is proposed for surface micromachined device. Based on the established three-dimensional features

the solid geometric models of MEMS devices were constructed efficiently with SolidWorks. Simultaneously

the mask layouts and process flow were automatically generated with the developed program based on the application programming interfaces of SolidWorks. A practical example shows that this method enables to design MEMS geometric models efficiently in a straightforward environment without tedious fabrication process. And SolidWorks serving as the basic development platform greatly reduces complexity of developing MEMS CAD tools.

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references

常洪龙.基于“Top-Down”的MEMS集成设计方法及关键技术研究 [D]. 西安: 西北工业大学机电学院, 2002.

Antonsson E K. Structured design methods for MEMS [C]∥Structured Design Methods for MEMS Final Report. Pasadena, USA: California Institute of Technology, 1996: 53-57.

Devoe D L, Green S B, Jump J M. Automated solid model extraction for MEMS visualization [C]∥Proc Int Conf on Modeling and Simulation of Microsystems, Sensors and Actuators. Santa Clara, USA: IEEE Press, 1998: 292-297.

Venkataraman V, Sarma R, Ananthasuresh G K. Part-to-art: basis for a systematic geometric design tool for surface micromachined MEMS [C]∥Proceedings of the ASME Design Engineering Technical Conference.Baltimore, USA: ASME, 2000: 11-14.

Gao Feng, Sarma R. A declarative feature-based cross sectional design tool for surface micromachined MEMS [C]∥Proceedings of the ASME Design Automation Conference. Pittsburgh, USA: ASME, 2001: 550-560.

Li Jianhua, Liu Yusheng, Gao Shuming. Mask synthesis and verification based on geometric model for surface micro-machined MEMS [J]. Journal of Zhejiang University, 2005, 6A(9): 1007-1010.

Lo N R, Pister K S J. 3D MEMS design via Matlab interactive plots [C]∥Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems. California, USA: NSTI, 2000: 696-699.

Zhang Changfu, Jiang Zhuangde, Lu Dejiang, et al. 3D MEMS design method via SolidWorks [C]∥Proceedings of the 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Orlando, USA: IEEE, 2006: 747-751.

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