Optimization of Polyimide-Based Flexible Neural Microelectrode

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Optimization of Polyimide-Based Flexible Neural Microelectrode

更新时间：2025-07-09

- Optimization of Polyimide-Based Flexible Neural Microelectrode
- Vol. 44, Issue 7, Pages: 85-89(2010)
- 作者机构：
  
  1. 中国科学院上海微系统与信息技术研究所,上海,200050
  2. 中国科学院研究生院,北京,100039
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH74
- Online First：10 July 2010，
  
  Published：2010
- 稿件说明：
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Optimization of Polyimide-Based Flexible Neural Microelectrode[J]. 2010, 44(7): 85-89.
DOI：

Optimization of Polyimide-Based Flexible Neural Microelectrode[J]. 2010, 44(7): 85-89. DOI：

摘要

对一种聚酰亚胺基柔性神经微电极进行了结构及制作工艺等方面的优化.针对动物视网膜的刺激

设计制作了具有固定通孔结构的柔性神经微电极.在制作工艺方面

使用空气等离子体表面处理以增强金属层的黏附性

降低了微电极的界面阻抗

增强了微电极稳定性

使之适于长期植入.优化后微电极的电极金属层牢固且具有较低的界面阻抗(43 kΩ)

比处理前降低了25.4%

误差减小了约4/5

具有良好的实用性.

Abstract

The geometry and fabrication of polyimide-based flexible neural microelectrodes were optimized. Aiming at retinal prosthesis

several thru-holes were designed in the flexible neural microelectrode for fixating the electrode during implantation. And a plasma treatment was employed in the fabrication procedure to improve the adhesion of metal layer on the polymer for a long-term implantation. The optimized flexible microelectrode shows stronger adhesion

25.4% lower interface impedance(43 kΩ)

and a four fifths reduction of error.

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references

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