Fabrication of Novel Piezoelectric Micro-Cantilever Probe

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Fabrication of Novel Piezoelectric Micro-Cantilever Probe

更新时间：2025-07-09

- Fabrication of Novel Piezoelectric Micro-Cantilever Probe
- Vol. 45, Issue 1, Pages: 79-82(2011)
- 作者机构：
  
  1. 大连理工大学微纳米技术及系统辽宁省重点实验室,大连,116024
  2. 大连理工大学精密与特种加工教育部重点实验室,大连,116024
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN305
- Online First：10 January 2011，
  
  Published：2011
- 稿件说明：
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Fabrication of Novel Piezoelectric Micro-Cantilever Probe[J]. 2011, 45(1): 79-82.
DOI：

Fabrication of Novel Piezoelectric Micro-Cantilever Probe[J]. 2011, 45(1): 79-82. DOI：

摘要

为实现压电探针在纳米器件表征和加工领域的应用

设计并制作了一种压电微悬臂梁探针.采用各向异性湿法腐蚀的方法得到纳米级硅针尖

用局部压电层方法解决了压电微悬臂梁探针制作过程中探针、压电薄膜和微悬臂梁之间的工艺兼容性问题.使用微力传感器测试平台对尺寸为450 μm×70 μm的压电悬臂梁探针进行测试

结果表明

这种尺寸的压电悬臂梁探针的弹性常数为21.17 N/m

与理论计算值相符.通过对压电探针的设计制作

总结了湿法腐蚀-干法刻蚀等工艺的结合方案

为压电探针的广泛应用奠定了基础.

Abstract

To realize the application of piezoelectric probe to characterization and fabrication of nano-samples

a new piezoelectric cantilever was designed and fabricated. Wet anisotropic etching was used to produce nano-silicon-tip

and local piezoelectric layer was designed for the fabrication compatibilities among the probe

piezoelectric film and cantilever. A 450 μm×70 μm piezoelectric probe was tested on micro-force sensing platform. The measurement result indicates that the elastic constant of the cantilever gets 21.17 N/m

which matches the theoretic one. Moreover

a feasible process was summarized.

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references

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