Two-Dimensional High Precision Positioning Maglev Stage

您当前的位置：

首页 >

文章列表页 >

Two-Dimensional High Precision Positioning Maglev Stage

更新时间：2025-07-09

- Two-Dimensional High Precision Positioning Maglev Stage
- Vol. 42, Issue 11, Pages: 1377-1381(2008)
- 作者机构：
  
  西安交通大学机械工程学院,西安,710049
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH133.3
- Online First：10 November 2008，
  
  Published：2008
- 稿件说明：
移动端阅览
Two-Dimensional High Precision Positioning Maglev Stage[J]. 2008, 42(11): 1377-1381.
DOI：

Two-Dimensional High Precision Positioning Maglev Stage[J]. 2008, 42(11): 1377-1381. DOI：

摘要

为了解决传统精密机械支承平台由于传动副的间隙、摩擦以及传动杆件弹性变形等引起的运动与定位误差问题

研制了具有“近零摩擦”运动副的高精度磁悬浮二维定位平台样机.该定位平台采用两层结构

最大行程500 mm

每层平台均采用结构相同的6对电磁铁

并以四角磁悬浮支承和侧向平动控制的方式置于导轨之上来实现平台的磁悬浮运动.通过设计磁悬浮平台的受力结构

获得了对平台垂直、水平方向的解耦控制方案.根据电磁轴承系统的数学模型分析

设计并开发了二维电磁悬浮平台和控制系统

使用dSPACE数字控制平台和模拟控制手段

实现了电磁悬浮平台在比例、积分和微分(PID)控制下的5自由度静态稳定悬浮.试验结果表明

悬浮精度达到了10 μm

因而有希望成为新一代半导体制造中的高精度定位平台.

Abstract

To eliminate the movement and position error caused by gap

friction of motion pair and elastic deformation of driving-part for the traditional mechanical stage

a prototype for two-dimensional movement maglev stage with near-zero-friction motion pair is developed

where the double stage structure with 500 mm movement distant is adopted

each stage is constracted with six pairs of the same electromagnets to achieve magnetic levitation motion

and the stage in the way of foursquare magnetic levitation and translational control in the side direction are located above the lead rail. Designing the magnetic force applied to the one-dimension stage

the decoupling control scheme of the maglev stage for vertical and horizontal directions is established. According to the mathematic model of active magnetic bearing system

the two-dimensional maglev stage and the control system are designed and developed. With the method of dSPACE digital control prototype and analog control

the maglev stage is successfully levitated in 5 degrees of freedom under PID control

and the start-levitation characteristic and shock response of the maglev stage are tested. The suspension accuracy of two-dimensional maglev stage gets to 10 μm

which predicts the further applications for the next-generation of semiconductor manufacturing.

关键词

Keywords

references

DONALD M R, EDDIE L. Future prospects magnetic for maglev technology applications [C]∥ The 18 th Magnetically Levitated System and Linear Drives Conference. Shanghai, China:[s. n.], 2004:65-75.

KAZNORI I, FUMIO S. New scanners for the 100 nm era [J]. SPIE, 2001,43(46): 621-633.

LEX M. A novel planar magnetic bearing and motor configuration applied in a positioning stage [D]. Delft, India: Delft University of Technology, 2000.

MARC B, VAN DE COEN V, SJEF T,et al. The performance advantages of a dual stage system [J]. Proceedings of SPIE, 2004, 53(77): 742-757.

郭庆鼎,刘德君,赵希梅.基于输入解耦的6DOF磁悬浮平台悬浮高度的H∞控制 [J].电工技术学报,2005,20(11):70-74.

GUO Qingding, LIU Dejun, ZHAO Ximei. H∞ control of 6DOF magnetic suspension planar stage suspension height based on input decoupling[J]. Transactions of China Electrotechnical Society, 2005,20(11):70-74.

杨霞,吴红波,李新叶,等.磁悬浮平台系统的P-Fuzzy-PID控制 [J].组合机床与自动化加工技术,2006(12):45-47.

YANG Xia, WU Hongbo, LI Xinye, et al. P-Fuzzy-PID control in a magnetic suspension platform system[J]. Modular Machine Tool Automatic Manufacturing Technique, 2006(12):45-47.

郝晓红,梅雪松,张东升,等.新型磁悬浮精密定位平台的研究 [J].西安交通大学学报,2005,39(9):937-940.

HAO Xiaohong, MEI Xuesong, ZHANG Dongsheng, et al. New magnetically levitated precision positioning stage [J]. Journal of Xi'an Jiaotong University, 2005,39(9):937-940.

朱涛.极紫外光刻机工件台精密机械及相关技术[D].长春:中国科学院研究生院,2006.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Windage Loss and Flow Characteristics in Impeller Back Gaps of sCO2 Radial Inflow Turbines

Review of the Application of EBSILON Software in Combined Heat and Power System Optimization

I/O Performance Modeling and Prediction Method for Large-Scale Parallel Applications Using Machine Learning

Energy Efficiency Optimization of the Cryogenic Air Separation Process for Electronic-Grade Ultra Pure Nitrogen

Influence of Structural Parameters on the Summer Operational Characteristics of a Three-Tower-in-One Indirect Air-Cooling System

Related Author

No data

Related Institution

No data

⁰