Design and Fabrication for Valveless Micropump Driven by Dielectric Elastomer

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Design and Fabrication for Valveless Micropump Driven by Dielectric Elastomer

更新时间：2025-07-09

- Design and Fabrication for Valveless Micropump Driven by Dielectric Elastomer
- Vol. 43, Issue 7, Pages: 92-95(2009)
- 作者机构：
  
  西安交通大学机械工程学院,西安,710049
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN4
- Online First：10 July 2009，
  
  Published：2009
- 稿件说明：
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Design and Fabrication for Valveless Micropump Driven by Dielectric Elastomer[J]. 2009, 43(7): 92-95.
DOI：

Design and Fabrication for Valveless Micropump Driven by Dielectric Elastomer[J]. 2009, 43(7): 92-95. DOI：

摘要

提出了一种由电致动聚合物材料(DE)驱动的平面扩散/收缩管无阀微泵.通过分析扩散/收缩管的角度、长度、最小宽度等关键参数对微泵性能的影响

对无阀微泵的结构进行了设计.基于UV-LIGA工艺

将DE泵膜和SU-8泵体键合制作了无阀微泵的模型

并对DE泵膜结构进行了实验研究

确定了合理的结构形式

实现了微泵的单向泵送.在3 500 V、8 Hz直流正弦电压的作用下

无阀微泵的流量最大

为21.2 μL/min

并且结构简单、易于密封、成本低.实验结果对电致动聚合物微泵进一步的科学研究和实际应用都具有较大的促进作用.

Abstract

A dielectric elastomer(DE)valveless micropump with plane diffuser/nozzle elements is investigated. The structure of the valveless micropump is designed by analyzing the effects of angle

length

minimum width of the diffuser-nozzle to the diffusivity. Based on UV-LIGA technique

the DE diaphragms and the SU-8 structure are bonded and the valveless micropump is accomplished. A DE diaphragms structure is conformed by experiment to realize the pumping. The maximum flow rate of 21.2 μL/min is achieved under 3 500 V

8 Hz sine wave. The valveless micropump with simple structure and lower cost demonstrates its further application foreground.

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references

PELRINE R, SOMMER-LARSEN P, KOMBLUH R, et al. Applications of dielectric elastomer actuators [C]∥Smart Structures and Materials. Newport Beach,CA,USA: SPIE, 2001:335-349.

KOFOD G, KOMBLUH R, PELRINE R, et al. Actuation response of polyacrylate dielectric elastomers [C]∥Smart Structures and Materials. Newport Beach,CA, USA: SPIE, 2003:787-793.

KOMBLUH R, PELRINE R, JOSEPH J, et al. High-field electrostriction of elastomeric polymer dielectrics for actuation[C]∥Proceedings of the SPIE Conference on Electroactive Polymer Actuators and Devices. Newport Beach, CA, USA: SPIE,1999:149-160.

刘昌威.基于MEMS技术的无阀微泵的研究与设计[D].西安:西安交通大学机械工程学院,2008.

JACKMAN R J, FLOYD T M, GHODSSI R, et al.Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy [J]. Micromechanics and Microengineering, 2001(11): 263-269.

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