To reduce modal coupling effect of longitudinal and bending hybrid linear ultrasonic motor and improve the controllability and efficiency
a new modal decoupling motor is proposed and investigated. The motor contains a Langevin transducer configuration where longitudinal piezoceramics are positioned in the middle part of the motor
and the bending piezoceramics are positioned at longitudinal and bending antinodal plane. The longitudinal and bending natural frequencies are degenerated by adjusting structure parameters following FEM modal analysis
and the modal coupling reduces obviously in impedance analysis and laser vibrometer measurement. The typical output performances get the maximum as speed 920 mm/s and thrust force 45 N
which outperform 480 mm/s and 25 N of the previous motor.
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