Thermal Stress Analysis of Crystal Morphology in Growth of Silicon Carbide Bulk Crystal by PVT Method

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Thermal Stress Analysis of Crystal Morphology in Growth of Silicon Carbide Bulk Crystal by PVT Method

更新时间：2025-07-09

- Thermal Stress Analysis of Crystal Morphology in Growth of Silicon Carbide Bulk Crystal by PVT Method
- Vol. 45, Issue 1, Pages: 117-121(2011)
- 作者机构：
  
  西安交通大学金属材料强度国家重点实验室,西安,710049
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN304.2
- Online First：10 January 2011，
  
  Published：2011
- 稿件说明：
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Thermal Stress Analysis of Crystal Morphology in Growth of Silicon Carbide Bulk Crystal by PVT Method[J]. 2011, 45(1): 117-121.
DOI：

Thermal Stress Analysis of Crystal Morphology in Growth of Silicon Carbide Bulk Crystal by PVT Method[J]. 2011, 45(1): 117-121. DOI：

摘要

利用有限元方法对物理气相传输(PVT)法生长碳化硅晶体过程中出现的3种典型生长形态进行了热应力分析.结果表明:在3种晶体生长形态中

热应力最大值都出现在晶体与石墨坩埚盖接触区域; 平面型生长形态中温度场及相应的热应变场和等效应力场分布均比较均匀; 凸面型和凹面型生长形态的温度场及相应的热应变场和等效应力场分布均变化较大

而且在凸面型的中间区域和凹面型的边缘区域也存在较大的应力值. 因此

为提高晶体质量

提出在石墨坩埚盖上沉积或反应生成碳化硅过渡层来减小热应力的改良方法

同时调整碳化硅晶体生长系统

尽量保证碳化硅晶体的平面型生长形态.

Abstract

Three kinds of classical growth morphologies appearing in the physical vapor transport(PVT)growth process of silicon carbide bulk crystal are analyzed with regard to thermal stress by finite elements method. The results indicate that the maximum of thermal stress is located in the adjacent region of the silicon carbide and the graphite crucible lid. The distributions of the temperature field

and the corresponding thermal strain field and equivalent stress field get more homogenous in the flat growth morphology than that in the concave and convex growth morphology. And stress concentration appears at the center of the concave growth morphology and at the margin of the convex growth morphology. For improving the crystal quality

transition layer of silicon carbide formed by deposition or reaction on the graphite crucible lid is suggested to reduce the thermal stress

and the growth system of SiC crystal should be modified to maintain crystal growth in the flat morphology.

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references

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