Direct Calibration Improvement for Frame Compliance of Nanoindentation Instrument

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Direct Calibration Improvement for Frame Compliance of Nanoindentation Instrument

更新时间：2025-05-08

- Direct Calibration Improvement for Frame Compliance of Nanoindentation Instrument
- Vol. 46, Issue 8, Pages: 122-127(2012)
- 作者机构：
  
  吉林大学机械科学与工程学院,长春,130025
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH87
- Online First：10 August 2012，
  
  Published：2012
- 稿件说明：
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Direct Calibration Improvement for Frame Compliance of Nanoindentation Instrument[J]. 2012, 46(8): 122-127.
DOI：

Direct Calibration Improvement for Frame Compliance of Nanoindentation Instrument[J]. 2012, 46(8): 122-127. DOI：

摘要

为获取纳米压痕测试装置的机架柔度

分析了Doerner-Nix、Oliver-Pharr、Sun Yong、Van Vliet等几种机架柔度标定方法

并在Van Vliet方法的基础上

提出了一种直接标定纳米压痕测试装置机架柔度的改进方法.该方法在已有测试装置基础上只需用平头圆棒替换原有压头即可实现对测试装置机架柔度的标定

标定过程接近装置实际工作状态

保证了标定结果的可用性.利用此改进方法标定得到了自主研制的纳米压痕测试装置的机架柔度值为0.007 94 mm/N

标定结果与通过Sun Yong方法得到的结果基本一致

说明了改进方法的可信性.提出的改进方法可方便、快速地对纳米压痕测试装置机架柔度进行标定

也可以扩展用于标定其他精密仪器装备的机架柔度.

Abstract

To obtain frame compliance of nanoindentation instruments

several calibration methods

such as Doerner-Nix method

Oliver-Pharr method

Sun Yong method and Van Vliet method are reviewed and analyzed. Following Van Vliet method

an improved one to directly calibrate frame compliance of nanoindentation instrument is proposed. Taking a round rod with flat end instead of the indenter

it can be realized to calibrate frame compliance near the working condition of nanoindentation instruments. The improved method enables to calibrate frame compliance of a self-made nanoindentation instrument as 0.007 94 mm/N

which coincides with that obtained by Sun Yong method. It can also be extended to calibrate compliance frame of other precise instruments and devices.

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references

YANG F Q, GENG K B, LIAW P K, et al. Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology [J]. J Mater Res, 2004, 19(1): 3-20.

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