Phase-Field Analysis Method for the Reliability of High-<italic style="font-style: italic">g</italic> Micro-Electro-Mechanical System Accelerometers

HOU Xiange; HUANG Yanhui; ZHOU Ming; ZHAO Jie; XIA Yong; ZHANG Qing

doi:null

您当前的位置：

首页 >

文章列表页 >

Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers

更新时间：2026-03-26

- Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers
- JOURNAL OF XI’AN JIAOTONG UNIVERSITY (2026)
- 作者机构：
  
  1.西安交通大学仪器科学与技术学院，710049，西安
  2.安徽北方微电子研究院有限公司，215163，江苏苏州
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH825
- Received：03 December 2025，
  
  Revised：2026-03-18，
  
  Accepted：26 March 2026，
- 稿件说明：
移动端阅览
HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J/OL]. JOURNAL OF XI’AN JIAOTONG UNIVERSITY, 2026.
DOI：

HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J/OL]. JOURNAL OF XI’AN JIAOTONG UNIVERSITY, 2026. DOI：

摘要

本文针对高

值微机电系统（MEMS）加速度传感器在极端冲击环境下的结构失效问题，提出了一种利用相场断裂模型的可靠性分析方法。该方法以相场断裂理论为基础，构建了包含失效形式识别、裂纹演化仿真、结构改进与再验证的可靠性分析流程。通过静力学与瞬态分析，并结合相场断裂模型，对裂纹萌生与扩展的微尺度过程进行了定量化与可视化表征，并与三维高

值冲击试验结果进行对比验证。在此基础上，针对扭转梁根部的高应力集中区域提出了圆角改进设计，并通过静力、瞬态再分析以及相场断裂的对比验证，完成改进方案的抗断裂性能评估。研究结果表明：扭转梁根部存在显著的应力集中现象，是裂纹萌生与扩展的主导区域，由此揭示了应力集中与裂纹演化之间的关联。所提出的梁根圆角改进设计使应力集中降低约18%，裂纹扩展延迟约40%，从而提高了传感器在高

值冲击工况下的抗断裂可靠性。该研究为高

值MEMS加速度传感器的可靠性分析供了一种解决方案。

Abstract

To address structural failures in high-

Micro-Electro-Mechanical System(MEMS) accelerometers under extreme shocks

a reliability analysis method leveraging the phase-field fracture model is proposed. Based on phase-field fracture theory

a reliability analysis workflow encompassing failure-mode identification

crack-evolution simulation

structural improvement

and re-validation is established.

The micro-scale processes of crack initiation and propagation are characterized and visualized through static and transient analyses combined with a phase-field fracture model. The numerical results are comparatively validated against three-dimensional high-

shock test results. On this basis

a fillet improvement design is proposed for the high stress-concentration region at the torsion-beam root

and the fracture resistance of the improved scheme is evaluated via static and transient reanalysis together with phase-field fracture-based comparative validation. The results indicate that pronounced stress concentration at the torsion-beam root is the dominant region governing crack initiation and propagation

thereby revealing the relationship between stress concentration and crack evolution. The proposed beam-root fillet improvement has been shown to result in a reduction of approximately 18% in stress concentration

as well as an estimated 40% delay in crack propagation. These improvements enhance the sensor's fracture-resistance reliability under high-

impact conditions. This study proposes a viable solution for the reliability analysis of high-

MEMS accelerometers.

关键词

Keywords

references

刘思远 . 压阻式高 g 值加速度传感器设计与制备 [D ] . 山西 : 中北大学 , 2024 .

LIU S . Design and fabrication of piezoresistive high g value

accelerometer [D ] . Taiyuan : North University of China , 2024 .

关存贺 , 许高斌 , 王焕章 , 张宇 , 马渊明 . 复杂应力条件下MEMS加速度传感器可靠性分析 [J ] . 电子测量与仪器学报 , 2023 , 37 ( 7 ): 17 - 25 .

GUAN C , XU G , WANG H , et al . Reliability Analysis of MEMS Acceleration Sensors under Complex Stress Conditions [J ] . Journal of Electronic Measurement and Instrumentation , 2023 , 37 ( 7 ): 17 - 25 .

李世维 , 王群书 , 古仁红 , 等 . 高 g 值微机械加速度传感器的现状与发展 [J ] . 仪器仪表学报 , 2008 , 29 ( 4 ): 892 - 896 .

LI S , WANG Q , GU R , et al . Situation and trend of high-g micromachined accelerometer [J ] . Chinese Journal of Scientific Instrument , 2008 , 29 ( 4 ): 892 - 896 .

Xu Y , Liu S , He C , et al . Reliability of MEMS inertial devices in mechanical and thermal environments: A review [J ] . Heliyon , 2024 , 10 ( 5 ).

中华人民共和国国家质量监督检验检疫总局 , 中国国家标准化管理委员会 . MEMS高g值加速度传感器性能试验方法 : GB/T 33929—2017 [S ] . 北京 : 中国标准出版社 , 2017 .

General Administration of Quality Supervision , Inspection and Quarantine of the People’s Republic of China ; Standardization Administration of China . Test methods of the performance for MEMS high g accelerometer : GB/T 33929—2017 [S ] . Beijing : Standards Press of China , 2017 .

DelRio F W , Cook R F , Boyce B L . Fracture strength of micro-and nano-scale silicon components [J ] . Applied Physics Reviews , 2015 , 2 ( 2 ).

尹丽晶 , 张魁 , 崔波 . MEMS器件可靠性评价标准分析及建议 [J ] . 环境技术 , 2024 , 42 ( 8 ): 23 - 27 .

YIN L , ZHANG K , CUI B . Analysis and Suggestion on Reliability Evaluation Standards of MEMS Devices [J ] . Environmental Technology , 2024 , 42 ( 8 ): 23 - 27 .

张豪 , 于继东 , 裴晓阳 , 等 . 相场断裂方法发展概况 [J ] . 高压物理学报 , 2019 , 33 ( 3 ): 128 - 139 .

ZHANG H , YU J , PEI X , et al . An Overview of Phase Field Approach to Fracture [J ] . Chinese Journal of High Pressure Physics , 2019 , 33 ( 3 ): 128 - 139 .

Kristensen P K , Niordson C F , Martínez-Pañeda E . An assessment of phase field fracture: crack initiation and growth [J ] . Philosophical Transactions of the Royal Society A , 2021 , 379 ( 2203 ): 20210021 .

Nagaraja S , Carrara P , De Lorenzis L . Experimental characterization and phase-field modeling of anisotropic brittle fracture in silicon [J ] . Engineering Fracture Mechanics , 2023 , 293 : 109684 .

Li P , Li W , Tan Y , et al . A phase field fracture model for ultra-thin micro-/nano-films with surface effects [J ] . International Journal of Engineering Science , 2024 , 195 : 104004 .

Bourdin B , Francfort G A , Marigo J J . Numerical experiments in revisited brittle fracture [J ] . Journal of the Mechanics and Physics of Solids , 2000 , 48 ( 4 ): 797 - 826 .

Carollo V , Guillén-Hernández T , Reinoso J , et al . Recent advancements on the phase field approach to brittle fracture for heterogeneous materials and structures [J ] . Advanced modeling and simulation in engineering sciences , 2018 , 5 ( 1 ): 8 .

吴建营 . 固体结构损伤破坏统一相场理论, 算法和应用 [J ] . 力学学报 , 2021 , 53 ( 2 ): 301 - 329 .

WU J . On the unified phase-field theory for damage and failure in solids and structures: Theoretical and numerical aspects [J ] . Acta Mechanica Sinica , 2021 , 53 ( 2 ): 301 - 329 .

Wu J Y , Nguyen V P . A length scale insensitive phase-field damage model for brittle fracture [J ] . Journal of the Mechanics and Physics of Solids , 2018 , 119 : 20 - 42 .

Wu J Y , Nguyen V P , Nguyen C T , et al . Phase-field modeling of fracture [J ] . Advances in applied mechanics , 2020 , 53 : 1 - 183 .

汤涛 , 乔中华 . 相场方程的高效数值算法 [J ] . 中国科学：数学 , 2020 , 50 ( 6 ): 20 . DOI: 10.1360/SSM-2020-0042 http://dx.doi.org/10.1360/SSM-2020-0042 .

TANG T , QIAO Z . Efficient numerical methods for phase-field equations [J ] . Science China Mathematics , 2020 , 50 ( 6 ): 873 - 916 .

张文兵 , 沈振中 , 徐力群 , 等 . 基于COMSOL的脆性材料相场断裂模型 [J ] . 计算力学学报 , 2023 , 40 ( 2 ): 273 - 280 .

ZHANG W , SHEN Z , XU L , et al . A phase-field fracture model for brittle materials based on COMSOL [J ] . Chinese Journal of Computational Mechanics , 2023 , 40 ( 2 ): 273 - 280 .

Anderson T L . Fracture mechanics: fundamentals and applications [M ] . CRC press , 2005 .

田富成 , 冀家乐 , 陈树昱 , 等 . 软材料大变形断裂的相场建模与应用 [J ] . 高分子学报 , 2025 , 56 ( 2 ): 179 - 199 .

TIAN F , JI J , CHEN S , et al . Large Deformation Fracture in Soft Materials: Phase-field Modeling and Applications [J ] . Acta Polymerica Sinica , 2025 , 56 ( 2 ): 179 – 199 .

Feng Y , Li J . Phase-field cohesive fracture theory: A unified framework for dissipative systems based on variational inequality of virtual works [J ] . Journal of the Mechanics and Physics of Solids , 2022 , 159 : 104737 .

裘沙沙 , 刘星泽 , 宁文杰 , 等 . 断裂相场模型的三维自适应有限元方法 [J ] . 应用数学和力学 , 2024 , 45 ( 4 ): 391 - 399 .

QIU S , LIU X , NING W , et al . A Three-Dimensional Adaptive Finite Element Method for Phase-Field Models of Fracture [J ] . Applied Mathematics and Mechanics , 2024 , 45 ( 4 ): 391 – 399 .

Klinsmann M , Rosato D , Kamlah M , et al . An assessment of the phase field formulation for crack growth [J ] . Computer Methods in Applied Mechanics and Engineering , 2015 , 294 : 313 - 330 .

刘陈飘 , 刘凯 , 王芳丽 , 等 . 基于相场法的铝锂合金搅拌摩擦焊接头脆性断裂数值模拟 [J ] . 焊接学报 , 2025 , 46 ( 10 ): 1 - 11 .

LIU C , LIU K , WANG F , et al . Numerical simulation of brittle fracture of Al-Li alloy friction stir welding joint based on phase field method [J ] . Transactions of The China Welding Institution , 2025 , 46 ( 10 ): 1 - 11 .

Sarmadi N , Mousavi Nezhad M , Fisher Q J . On the numerical and mesh-dependent parameters in a computationally enhanced phase-field fracture model coupled with a novel mesh refinement strategy [J ] . Engineering with Computers , 2023 , 39 ( 6 ): 3973 - 3992 .

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Dynamic Fault Tree Analysis Method Based on Discrete-Time Bayesian Networks

I/O Performance Modeling and Prediction Method for Large-Scale Parallel Applications Using Machine Learning

Research on the Electrohydrodynamic Effects of Ionic Liquid-Modified Fuels

Numerical Simulation of the Energy Conversion Process in Thermoacoustic Engines with Different Stack Materials

Mechanism and Optimal Control Strategy for Hysteresis in Rapid Dehumidification Response of Indirect Thermal Systems in Electric Vehicles

Related Author

周忠宝

周经伦

孙权

金光

董豆豆

Related Institution

School of Information System and Management, National University of Defense Technology

⁰

Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers

DOI：

摘要

Abstract

关键词

Keywords

references