一种ZnO单晶肖特基结X射线探测器及其特性研究

您当前的位置：

首页 >

文章列表页 >

一种ZnO单晶肖特基结X射线探测器及其特性研究

更新时间：2025-07-09

- 一种ZnO单晶肖特基结X射线探测器及其特性研究
- Issue 9, Pages: 169-175(2022)
- 作者机构：
  
  1. 西安交通大学电子与信息学部
  2. 西安市微纳电子与系统集成重点实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN36
- Published：2022
- 稿件说明：
移动端阅览
[J]. 2022, (9): 169-175.
DOI：

[J]. 2022, (9): 169-175. DOI：

摘要

针对传统的硅基辐射探测器在极端环境应用中表现出抗辐照和耐高温能力差的问题，提出并实现了一种采用ZnO单晶制备的肖特基结X射线探测器，并对其各项电学特性进行了测试分析。利用磁控溅射法在ZnO单晶的两面分别制备了Au电极和Al电极；在400℃下退火使得Au-ZnO形成肖特基接触，Al-ZnO形成欧姆接触。常温暗场条件下电流特性测试结果表明：器件的反向电流与温度的倒数成指数关系；在-10 V反向偏置电压下的器件电流为15μA

10 V正向偏置电压下的电流为100μA;在偏置电压为-10 V时测量器件对X射线的响应，发现响应电流随射线电子束流的增加而增加；当加速电压为30 keV、入射X射线电子束流在1～10μA范围内时器件有较高的能量分辨率；在偏置电压为-10 V条件下对器件施加以周期性光照时，器件上升时间和下降时间分别为0.04 s和3.59 s

响应速度快且重复性好。该研究结果表明，基于ZnO单晶的Au/ZnO/Al结构的肖特基结探测器件在X射线探测领域具有较好的应用前景。

Abstract

关键词

Keywords

references

顾建龙.n型ZnO欧姆接触及肖特基接触电极的研究[D].浙江大学,2013(10).

郭小川,彭文博,蔡亚辉,郭书文,赵小龙,贺永宁.小体积电压输出型ZnO惠斯通电桥式紫外探测单元[J].西安交通大学学报,2022(01).

祁晓萌,彭文博,赵小龙,贺永宁.基于高阻ZnO薄膜的光电导型紫外探测器[J].物理学报,2015(19).

李新坤,张天宇,王增斌.ZnO薄膜器件欧姆电极的高掺杂接触法制备[J].半导体光电,2014(04).

赵小龙,康雪,陈亮,张忠兵,刘金良,欧阳晓平,彭文博,贺永宁.ZnO半导体电导型X射线探测器件研究[J].物理学报,2014(09).

刘瑞斌,邹炳锁.Lasing behaviour from the condensation of polaronic excitons in a ZnO nanowire[J].Chinese Physics B,2011(04).

韦敏,邓宏,王培利,李阳.ZnO基紫外探测器的研究进展与关键技术[J].材料导报,2007(12).

常艳玲,张琦锋,孙晖,吴锦雷.ZnO纳米线双绝缘层结构电致发光器件制备及特性研究[J].物理学报,2007(04).

魏学成,赵有文,董志远,李晋闽.ZnO单晶的缺陷及其对材料性质的影响[J].半导体学报,2006(10).

赵懿琨,连洁,张飒飒,王公堂,宫文栎,于元勋,卜刚.ZnO基紫外探测器的研究进展[J].材料导报,2006(01).

Zhao Xiaolong,Huang Danyang,He Yongning,Peng Wenbo,Li Gaoming.Demonstration of an n-ZnO/p-Si/n-Si heterojunction bipolar phototransistor for X-ray detection[J].Solid State Electronics,2022.

Zhao Xiaolong,Huang Danyang,Li Ganggui,He Yongning,Peng Wenbo,Li Gaoming.High sensitivity X-ray detector based on a 25 µm-thick ZnO film[J].Sensors and Actuators: A. Physical,2022.

Guo Shuwen,Zhao Xiaolong,He Yongning,Pan Zijian,Yang Mingchao,Cai Yahui,Fu Xianghe,Zhang Liangliang.Low-Voltage and High-Gain Ultraviolet Detector Based on 4H-SiC n-p-n Bipolar Phototransistor[J].IEEE TRANSACTIONS ON ELECTRON DEVICES,2021.

aff > .Study of a Neutron-resistant p+-Si/n-ZnO Photodetector with Avalanching Gain[J].Sensors and Actuators A: Physical,2020.

Wenbo Peng,Zijian Pan,Fangpei Li,Yahui Cai,Yongning He.Pyro-phototronic effect enhanced ZnO nanowire-based tri-layer heterojunction for visible light sensing and communication[J].Nano Energy,2020.

Edgars Butanovs,Alexei Kuzmin,Jelena Butikova,Sergei Vlassov,Boris Polyakov.Synthesis and characterization of ZnO/ZnS/MoS2 core-shell nanowires[J].Journal of Crystal Growth,2017.

Wang Zhaona,Yu Ruomeng,Wang Xingfu,Wu Wenzhuo,Wang Zhong Lin.Ultrafast Response p-Si/n-ZnO Heterojunction Ultraviolet Detector Based on Pyro-Phototronic Effect.[J].Advanced materials (Deerfield Beach, Fla.),2016.

Yongning He,Xiaolong Zhao,Xuyang Wang,Liang Chen,Wenbo Peng,Xiaoping Ouyang.Characterizations of an X-ray detector based on a Zn 2 SiO 4 film[J].Sensors & Actuators: A. Physical,2015.

Haruyuki Endo,Tetsuya Chiba,Kazuyuki Meguro,Kyo Takahashi,Mitsuru Fujisawa,Shigeaki Sugimura,Shinya Narita,Yasube Kashiwaba,Eiichi Sato.Fabrication and characterization of a ZnO X-ray sensor using a high-resistivity ZnO single crystal grown by the hydrothermal method[J].Nuclear Inst. and Methods in Physics Research, A,2011.

Sachindra Nath Das,Kyeong-Ju Moon,Jyoti Prakash Kar,Ji-Hyuk Choi,Junjie Xiong,Tae Il Lee,Jae-Min Myoung.ZnO single nanowire-based UV detectors[J].Applied Physics Letters,2010.

Huang Michael H.,Mao Samuel,Feick Henning,Yan Haoquan,Wu Yiying,Kind Hannes,Weber Eike,Russo Richard,Yang Peidong.ChemInform Abstract: Room-Temperature Ultraviolet Nanowire Nanolasers.[J].ChemInform,2010.

Nause J,Nemeth B.Pressurized melt growth of ZnO boules[J].Semiconductor Science and Technology,2005.

Kania D.R.,Landstrass M.I.,Plano M.A.,Pan L.S.,Han S..Diamond radiation detectors[J].Diamond and Related Materials,1993(5-7).

(美) 施敏, ( ) 伍国钰, 著.半导体器件物理[M].西安交通大学出版社,2008.

马宏宇.ZnO量子点及其紫外探测器的制备与特性研究[D].中国科学院大学(中国科学院长春光学精密机械与物理研究所),2021(01).

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Integrated and Joint Design Optimization of Centrifugal Compressor Impeller and Casing Treatment at Multiple Working Points

Numerical Simulation of Heat-Moisture Barrier Performance of a Horizontal Air Curtain in Cold Storage

Effects of Expansion Angle Crater Film Hole on the Film Cooling Characteristics of a Double-Wall Structure

I/O Performance Modeling and Prediction Method for Large-Scale Parallel Applications Using Machine Learning

Electrothermal Coupling Research on the Evolutionary Law of Anti-Corona Performance for High-Altitude Air-Cooled Generators

Related Author

No data

Related Institution

No data

⁰