纳米多孔结构单晶硅热电薄膜声子热导率数值研究

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纳米多孔结构单晶硅热电薄膜声子热导率数值研究

更新时间：2025-07-09

- 纳米多孔结构单晶硅热电薄膜声子热导率数值研究
- Issue 5, Pages: 23-30(2017)
- 作者机构：
  
  1. 西安特种设备检验检测院
  2. 西安交通大学热流科学与工程教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC： O484
- Published：2017
- 稿件说明：
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[J]. 2017, (5): 23-30.
DOI：

[J]. 2017, (5): 23-30. DOI：

摘要

为降低多孔热电薄膜的热导率来提升其热电转换效率

基于离散坐标法和松弛时间近似模型求解声子Boltzmann输运方程

对单晶硅纳米多孔热电薄膜声子热导率进行了数值研究

获得了多孔硅薄膜厚度、孔隙率、边界镜面率和声子散射边界面积对其热导率的影响规律

讨论了孔隙率、多孔薄膜厚度对薄膜各向异性导热特性的影响。结果表明:随着孔隙率的增加及薄膜厚度的减小

热导率逐渐降低;当孔隙率增加到64%

且硅薄膜厚度减小到块材料硅声子平均自由程的1/10时

与块材料热导率相比

薄膜热导率至少下降两个数量级。通过分析多孔薄膜中的热流分布特性

提出了优化设计薄膜多孔结构的方法

为设计低热导率高效热电薄膜提供了理论依据。

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