Phase-Field Analysis Method for the Reliability of High-<italic style="font-style: italic">g</italic> Micro-Electro-Mechanical System Accelerometers

HOU Xiange; HUANG Yanhui; ZHOU Ming; ZHAO Jie; XIA Yong; ZHANG Qing

doi:10.7652/xjtuxb202608018

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Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers

更新时间：2026-07-28

- Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers
- Journal of Xi'an Jiaotong University Vol. 60, Issue 8, Pages: 205-217(2026)
- 作者机构：
  
  西安交通大学仪器科学与技术学院，710049，西安
  安徽北方微电子研究院有限公司，215163，江苏苏州
- 作者简介：
- 基金信息：
- DOI：10.7652/xjtuxb202608018
  CLC： TH825
- Received：03 December 2025，
  
  Online First：30 March 2026，
  
  Published：10 August 2026
- 稿件说明：
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HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J]. Journal of Xi'an Jiaotong University, 2026, 60(8): 205-217. DOI: 10.7652/xjtuxb202608018.
DOI：

HOU Xiange, HUANG Yanhui, ZHOU Ming, et al. Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers[J]. Journal of Xi'an Jiaotong University, 2026, 60(8): 205-217. DOI: 10.7652/xjtuxb202608018. DOI：

摘要

针对高

值（

为重力加速度）微机电系统（MEMS）加速度传感器在极端冲击环境下的结构失效问题，提出了一种利用相场断裂模型的可靠性分析方法。该方法以相场断裂理论为基础，构建了包含失效形式识别、裂纹演化仿真、结构改进与再验证的可靠性分析流程。通过静力学与瞬态分析，并结合相场断裂模型，对裂纹萌生与扩展的微尺度过程进行了定量化与可视化表征，并与三维高

值冲击试验结果进行了对比验证。在此基础上，针对扭转梁根部的高应力集中区域提出了圆角改进设计，并通过静力、瞬态再分析以及相场断裂的对比验证，完成改进方案的抗断裂性能评估。研究结果表明：扭转梁根部存在显著的应力集中现象，是裂纹萌生与扩展的主导区域，由此揭示了应力集中与裂纹演化之间的关联。所提出的梁根圆角改进设计使应力集中降低了约18%，裂纹扩展延迟了约40%，从而提高了传感器在高

值冲击工况下的抗断裂可靠性。该研究为高

值MEMS加速度传感器的可靠性分析供了一种解决方案。

Abstract

To address structural failures in high-

micro-electro-mechanical system (MEMS) accelerometers under extreme shock environments

a reliability analysis method using the phasefield fracture model was proposed. Based on phase-field fracture theory

a reliability analysis workflow encompassing failure mode identification

crack evolution simulation

structural improvement

and re-validation was established. The micro-scale processes of crack initiation and propagation were quantitatively and visually characterized through static and transient analyses combined with a phase-field fracture model. The numerical results were comparatively validated against three-dimensional high-

shock test result

s. On this basis

a fillet improvement design was proposed for the high stress concentration region at the torsion-beam root

and the fracture resistance of the improved scheme was evaluated via static and transient re-analysis together with phase-field fracture-based comparative validation. The results indicate that pronounced stress concentration at the torsion-beam root is the dominant region governing crack initiation and propagation

thereby revealing the relationship between stress concentration and crack evolution. The proposed beam-root fillet improvement design reduces stress concentration by approximately 18% and delays crack propagation by about 40%

thus improving the fracture resistance reliability of the sensor under high-

impact conditions. This study provides a feasible solution for the reliability analysis of high-

MEMS accelerometers.

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Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers

DOI：10.7652/xjtuxb202608018

摘要

Abstract

关键词

Keywords

references